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Journal: Sensors, 2023
Volume: 23
Number: 2830
Article:
Study on the Hierarchical Predictive Control of Semiconductor Silicon Single Crystal Quality Based on the Soft Sensor Model
Authors:
by
Yin Wan, Ding Liu, Jun-Chao Ren and Shi-Hai Wu
Link:
https://www.mdpi.com/1424-8220/23/5/2830
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