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Journal: Sensors, 2022
Volume: 22
Number: 8100
Article:
Design and 3D FEM Analysis of a Flexible Piezoelectric Micromechanical Ultrasonic Transducer Based on Sc-Doped AlN Film
Authors:
by
Qinghua Ren, Junhong Chen, Xin Liu, Songsong Zhang and Yuandong Gu
Link:
https://www.mdpi.com/1424-8220/22/21/8100
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