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Journal: Sensors, 2022
Volume: 22
Number: 6778
Article:
Design, Simulation, and Fabrication of Multilayer Al2O3 Ceramic Micro-Hotplates for High Temperature Gas Sensors
Authors:
by
Bolun Tang, Yunbo Shi, Jianwei Li, Jie Tang and Qiaohua Feng
Link:
https://www.mdpi.com/1424-8220/22/18/6778
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