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Journal: Sensors, 2022
Volume: 22
Number: 6254
Article:
Development of a Noninvasive Real-Time Ion Energy Distribution Monitoring System Applicable to Collisional Plasma Sheath
Authors:
by
Inho Seong, Sijun Kim, Youngseok Lee, Chulhee Cho, Jangjae Lee, Wonnyoung Jeong, Yebin You and Shinjae You
Link:
https://www.mdpi.com/1424-8220/22/16/6254
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