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Journal: SensorsVolume: 20Number: 3652
Article: An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer
  • Authors:
  • Xiaoxiao Song1,
  • Huafeng Liu1,* and
  • Yanyan Fang1
  • et al.
Link: https://www.mdpi.com/1424-8220/20/13/3652

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