Order Article Reprints

Song X, Liu H, Fang Y, Zhao C, Qu Z, Wang Q, Tu L-C. An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer. Sensors. 2020; 20(13):3652. https://doi.org/10.3390/s20133652

Song, Xiaoxiao, Huafeng Liu, Yanyan Fang, Chun Zhao, Ziqiang Qu, Qiu Wang, and Liang-Cheng Tu. 2020. "An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer" Sensors 20, no. 13: 3652. https://doi.org/10.3390/s20133652

Song, X., Liu, H., Fang, Y., Zhao, C., Qu, Z., Wang, Q., & Tu, L.-C. (2020). An Integrated Gold-Film Temperature Sensor for In Situ Temperature Measurement of a High-Precision MEMS Accelerometer. Sensors, 20(13), 3652. https://doi.org/10.3390/s20133652