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Open AccessArticle

A New Design of an MOEMS Gyroscope Based on a WGM Microdisk Resonator

Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
Author to whom correspondence should be addressed.
Sensors 2019, 19(12), 2798;
Received: 6 May 2019 / Revised: 30 May 2019 / Accepted: 3 June 2019 / Published: 21 June 2019
(This article belongs to the Special Issue Optomechanical Sensors)
In this paper, we present a new design for a micro-opto-electro-mechanical (MOEMS) gyroscope based on a whispering-gallery mode (WGM) microdisk resonator and MEMS resonator. The mechanical characteristics, frequency split, and quality factor (Q) of the MEMS resonator; the optical characteristics, Q value, and coupling regimes of the WGM resonator; and the coupling between the two resonators were analyzed. Its operation principle—the transformation process from angular velocity to the resonance wavelength of the WGM resonator—is presented at same time. Next, the analysis conclusions were validated with the help of simulations in ANSYS and FDTD (Finite-Difference Time-Domain) Solutions. Afterwards, some key specifications were estimated based on the results of simulations. Lastly, the fabrication process is detailed. View Full-Text
Keywords: disk resonator; MOEMS gyroscope; whispering-gallery mode (WGM) disk resonator; MOEMS gyroscope; whispering-gallery mode (WGM)
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Xia, D.; Huang, L.; Zhao, L. A New Design of an MOEMS Gyroscope Based on a WGM Microdisk Resonator. Sensors 2019, 19, 2798.

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