Ni, Z.; Yang, C.; Xu, D.; Zhou, H.; Zhou, W.; Li, T.; Xiong, B.; Li, X.
Monolithic Composite “Pressure + Acceleration + Temperature + Infrared” Sensor Using a Versatile Single-Sided “SiN/Poly-Si/Al” Process-Module. Sensors 2013, 13, 1085-1101.
https://doi.org/10.3390/s130101085
AMA Style
Ni Z, Yang C, Xu D, Zhou H, Zhou W, Li T, Xiong B, Li X.
Monolithic Composite “Pressure + Acceleration + Temperature + Infrared” Sensor Using a Versatile Single-Sided “SiN/Poly-Si/Al” Process-Module. Sensors. 2013; 13(1):1085-1101.
https://doi.org/10.3390/s130101085
Chicago/Turabian Style
Ni, Zao, Chen Yang, Dehui Xu, Hong Zhou, Wei Zhou, Tie Li, Bin Xiong, and Xinxin Li.
2013. "Monolithic Composite “Pressure + Acceleration + Temperature + Infrared” Sensor Using a Versatile Single-Sided “SiN/Poly-Si/Al” Process-Module" Sensors 13, no. 1: 1085-1101.
https://doi.org/10.3390/s130101085
APA Style
Ni, Z., Yang, C., Xu, D., Zhou, H., Zhou, W., Li, T., Xiong, B., & Li, X.
(2013). Monolithic Composite “Pressure + Acceleration + Temperature + Infrared” Sensor Using a Versatile Single-Sided “SiN/Poly-Si/Al” Process-Module. Sensors, 13(1), 1085-1101.
https://doi.org/10.3390/s130101085