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Journal: Sensors, 2010
Volume: 10
Number: 1338

Article: Characterization of Thick and Thin Film SiCN for Pressure Sensing at High Temperatures
Authors: by Alfin Leo, Sergey Andronenko, Ion Stiharu and Rama B. Bhat
Link: https://www.mdpi.com/1424-8220/10/2/1338

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