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Journal: SensorsVolume: 10Number: 1338
Article: Characterization of Thick and Thin Film SiCN for Pressure Sensing at High Temperatures
  • Authors:
  • Alfin Leo1,
  • Sergey Andronenko1,† and
  • Ion Stiharu2,*
  • et al.
Link: https://www.mdpi.com/1424-8220/10/2/1338

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