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Journal: Sensors, 2010
Volume: 10
Number: 1338
Article:
Characterization of Thick and Thin Film SiCN for Pressure Sensing at High Temperatures
Authors:
by
Alfin Leo, Sergey Andronenko, Ion Stiharu and Rama B. Bhat
Link:
https://www.mdpi.com/1424-8220/10/2/1338
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