Search Results (22)

Mg–Zn–Mn-based biocomposites hold prospects as potential orthopedic material. The composition of these composites can be modulated, based on applications, by selective elemental alloying. Towards that, the addition of silicon (Si), hydroxyapatite (HA), or both is considered, followed by the consolidation method, such as spark plasma sintering (SPS). In this study, the micro-mechanical properties of Mg–Zn–Mn–(Si–HA) composites were investigated through the micro-pillar compression method. The effect of Si and HA incorporation on the mechanical characteristics and deformation mechanism was also elucidated. The microstructure of the composite presents porosity, together with different bioactive phases, such as Mg–Zn, CaMg, Mn–P, MgSi₂, Mn–Si, Mn–CaO, CaMgSi, and Ca–Mn–O. Such porous structures were determined to facilitate cell growth when used as an implant, particularly for musculoskeletal-related disabilities. The yield stress (YS) and compressive stress of the Mg–Zn–Mn–Si–HA were about 1543 ± 99 MPa and 1825 ± 102 MPa, respectively. These values were about 5.8 and 4.8 times higher, respectively, than those of Mg–Zn–Mn–HA composites (266 ± 42 MPa and 380 ± 10 MPa, respectively), and the same was observed for the elastic modulus. Besides that, alloying with HA and Si alters the deformation mechanism from brittle (for Mg–Zn–Mn–Si composites) or ductile (for Mg–Zn–Mn–HA composites) to predominant ductile failure without compromising the attained mechanical properties. Full article

This study aims to establish and optimize a process for the fabrication of 3D microstructures of the biocompatible polymer Parylene C using hot embossing techniques. The different process parameters such as embossing temperature, embossing force, demolding temperature and speed, and the usage of a release agent were optimized, utilizing adhesive micropillars as a use case. To enhance compatibility with conventional semiconductor fabrication techniques, hot embossing of Parylene C was adapted from conventional stainless steel substrates to silicon chip platforms. Furthermore, this adaptation included an investigation of the effects of the hot embossing process on metal layers embedded in the Parylene C, ensuring compatibility with the ultra-thin Parylene printed circuit board (PCB) demonstrated previously. To evaluate the produced microstructures, a combination of characterization methods was employed, including light microscopy (LM) and scanning electron microscopy (SEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and Fourier-transform infrared spectroscopy (FTIR). These methods provided comprehensive insights into the morphological, chemical, and structural properties of the embossed Parylene C. Considering the improved results compared to existing patterning techniques for Parylene C like plasma etching or laser ablation, the developed hot embossing approach yields a superior structural integrity, characterized by increased feature resolution and enhanced sidewall smoothness. These advancements render the method particularly suitable for diverse applications, including but not limited to, sensor optical components, adhesive interfaces for medical wearables, and microfluidic systems. Full article

The rapid progress of electronic devices has necessitated efficient heat dissipation within boiling cooling systems, underscoring the need for improvements in boiling heat transfer coefficient (HTC) and critical heat flux (CHF). While different approaches for micropillar fabrication on copper or silicon substrates have been developed and have shown significant boiling performance improvements, such enhancement approaches on aluminum surfaces are not broadly investigated, despite their industrial applicability. This study introduces a scalable approach to engineering hierarchical micro-nano structures on aluminum surfaces, aiming to simultaneously increase HTC and CHF. One set of samples was produced using a combination of nanosecond laser texturing and chemical etching in hydrochloric acid, while another set underwent an additional laser texturing step. Three distinct micropillar patterns were tested under saturated pool boiling conditions using water at atmospheric pressure. Our findings reveal that microcavities created atop pillars successfully facilitate nucleation and micropillars representing nucleation site areas on a microscale, leading to an enhanced HTC up to 242 kW m⁻² K⁻¹. At the same time, the combination of the surrounding hydrophilic porous area enables increased wicking and pillar patterning, defining the vapor–liquid pathways on a macroscale, which leads to an increase in CHF of up to 2609 kW m⁻². Full article

Unrestricted manipulations on terahertz (THz) waves are highly desired in integration-optics, but THz devices based on conventional materials are usually bulky in size. Although all-silicon metasurfaces have exhibited great capabilities in manipulating THz waves, most of them are less efficient and have limited functionalities. In this work, we first design a silicon meta-atom structure consisting of a high-aspect-ratio (AR) micro-pillar that exhibits nearly perfect transmission and large transmission phase of THz wave, and systemically study how the fabrication quality (e.g., steepness of the sidewall and the vertical thickness distribution) may influence the final performance of a functional metasurface constructed with such meta-atoms. After experimentally examining how two working phases in the deep-reactive-ion-etch technology (i.e., the etch and passivation phases) influence the quality of the fabricated meta-devices, we develop an optimized Bosch process to realize high-AR (~20:1) all-silicon metasurfaces by balancing two working phases. We finally design/fabricate a high-AR silicon metasurface and experimentally demonstrate that it behaves as a high-efficiency half-wave-plate for THz waves in transmission geometry. Our results pave the avenue to realize ultra-compact THz meta-devices with high performance in transmission geometry, which is highly desirable for THz applications. Full article

We report the microfabrication and characterization of concentric gold nanoring electrodes (Au NREs), which were fabricated by patterning two gold nanoelectrodes on the same silicon (Si) micropillar tip. Au NREs of 165 ± 10 nm in width were micropatterned on a 6.5 ± 0.2 µm diameter 80 ± 0.5 µm height Si micropillar with an intervening ~ 100 nm thick hafnium oxide insulating layer between the two nanoelectrodes. Excellent cylindricality of the micropillar with vertical sidewalls as well as a completely intact layer of a concentric Au NRE including the entire micropillar perimeter has been achieved as observed via scanning electron microscopy and energy dispersive spectroscopy data. The electrochemical behavior of the Au NREs was characterized by steady-state cyclic voltammetry and electrochemical impedance spectroscopy. The applicability of Au NREs to electrochemical sensing was demonstrated by redox cycling with the ferro/ferricyanide redox couple. The redox cycling amplified the currents by 1.63-fold with a collection efficiency of > 90% on a single collection cycle. The proposed micro-nanofabrication approach with further optimization studies shows great promise for the creation and expansion of concentric 3D NRE arrays with controllable width and nanometer spacing for electroanalytical research and applications such as single-cell analysis and advanced biological and neurochemical sensing. Full article

Silicon structures with ultra-high aspect ratios have great potential applications in the fields of optoelectronics and biomedicine. However, the slope and increased roughness of the sidewalls inevitably introduced during the use of conventional etching processes (e.g., Bosch and DRIE) remain an obstacle to their application. In this paper, 4-inch wafer-scale, ultra-high aspect ratio (>140:1) microscale silicon structures with smooth sidewalls are successfully prepared using metal-assisted chemical etching (MacEtch). Here, we clarify the impact of the size from the metal catalytic structure on the sidewall roughness. By optimizing the etchant ratio to accelerate the etch rate of the metal-catalyzed structure and employing thermal oxidation, the sidewall roughness can be significantly reduced (average root mean square (RMS) from 42.3 nm to 15.8 nm). Simulations show that a maximum exciton production rate (G_max) of 1.21 × 10²⁶ and a maximum theoretical short-circuit current density (J_sc) of 39.78 mA/cm² can be obtained for the micropillar array with smooth sidewalls, which have potential applications in high-performance microscale photovoltaic devices. Full article

Silicon carbide (SiC) has a variety of applications because of its favorable chemical stability and outstanding physical characteristics, such as high hardness and high rigidity. In this study, a femtosecond laser with a spiral scanning radial offset of 5 μm and a spot radius of 6 μm is utilized to process micropillars on a SiC plate. The influence of pulsed laser beam energies and laser translation velocities on the micropillar profiles, dimensions, surface roughness Ra, and material removal capability (MRC) of micropillars was investigated. The processing results indicate that the micropillar has the best perpendicularity, with a micropillar bottom angle of 75.59° under a pulsed beam energy of 50 μJ in the range of 10–70 μJ, with a pulsed repetition rate of 600 kHz and a translation velocity of 0.1 m/s. As the laser translation velocity increases between 0.2 m/s and 1.0 m/s under a fixed pulsed beam energy of 50 μJ and a constant pulsed repetition rate of 600 kHz, the micropillar height decreases from 119.88 μm to 81.79 μm, with the MRC value increasing from 1.998 μm³/μJ to 6.816 μm³/μJ, while the micropillar bottom angle increases from 68.87° to 75.59°, and the Ra value diminishes from 0.836 μm to 0.341 μm. It is suggested that a combination of a higher pulsed laser beam energy with a faster laser translation speed is recommended to achieve micropillars with the same height, as well as an improved processing efficiency and surface finish. Full article

Lung cancer is one of the world’s lethal diseases and detecting it at an early stage is crucial and difficult. This paper proposes a computer-aided lung cancer diagnosis system using volatile organic compounds (VOCs) data. A silicon microreactor, which consists of thousands of micropillars coated with an ammonium aminooxy salt, is used to capture the volatile organic compounds (VOCs) in the patients’ exhaled breath by means of oximation reactions. The proposed system ranks the features using the Pearson correlation coefficient and maximum relevance–minimum redundancy (mRMR) techniques. The selected features are fed to nine different classifiers to determine if the lung nodule is malignant or benign. The system is validated using a locally acquired dataset that has 504 patients’ data. The dataset is balanced and has 27 features of volatile organic compounds (VOCs). Multiple experiments were completed, and the best accuracy result is 87%, which was achieved using random forest (RF) either by using all 27 features without selection or by using the first 17 features obtained using maximum relevance–minimum redundancy (mRMR) while using an 80–20 train-test split. The correlation coefficient, maximum relevance–minimum redundancy (mRMR), and random forest (RF) importance agreed that ${\mathrm{C}}_4{\mathrm{H}}_8\mathrm{O}$ (2-Butanone) ranks as the best feature. Using only ${\mathrm{C}}_4{\mathrm{H}}_8\mathrm{O}$ (2-Butanone) for training, the accuracy results using the support vector machine, logistic regression, bagging and neural network classifiers are 86%, which approaches the best result. This shows the potential for these volatile organic compounds (VOCs) to serve as a significant screening tests for the diagnosis of lung cancer. Full article

We report a cost-effective and scalable methodology for producing a hierarchical micro-/nanostructured silicon surface solely by metal-assisted chemical etching. It involves two major processing steps of fabricating micropillars and nanowires separately. The process of producing micro-scale structures by masked metal-assisted chemical etching was optimized. Silicon nanowires were created on the micropillar’s surface via maskless metal-assisted chemical etching. The hierarchical micro-/nanostructured surface exhibits superhydrophobic properties with a high contact angle of ~156° and a low sliding angle of <2.5° for deionized water. Furthermore, due to the existence of microscale and nanoscale air trapped at the liquid/solid interface, it exhibits a long ice delay time of 2876 s at −5 °C, more than 5 times longer than that of smooth surfaces. Compared to conventional dry etching methods, the metal-assisted chemical etching approach excludes vacuum environments and high-temperature processes and can be applied for applications requiring hierarchical micro-/nanostructured surfaces or structures. Full article

The 3D battery concept applied on silicon–graphite electrodes (Si/C) has revealed a significant improvement of battery performances, including high-rate capability, cycle stability, and cell lifetime. 3D architectures provide free spaces for volume expansion as well as additional lithium diffusion pathways into the electrodes. Therefore, the cell degradation induced by the volume change of silicon as active material can be significantly reduced, and the high-rate capability can be achieved. In order to better understand the impact of 3D electrode architectures on rate capability and degradation process of the thick film silicon–graphite electrodes, we applied laser-induced breakdown spectroscopy (LIBS). A calibration curve was established that enables the quantitative determination of the elemental concentrations in the electrodes. The structured silicon–graphite electrode, which was lithiated by 1C, revealed a homogeneous lithium distribution within the entire electrode. In contrast, a lithium concentration gradient was observed on the unstructured electrode. The lithium concentration was reduced gradually from the top to the button of the electrode, which indicated an inhibited diffusion kinetic at high C-rates. In addition, the LIBS applied on a model electrode with micropillars revealed that the lithium-ions principally diffused along the contour of laser-generated structures into the electrodes at elevated C-rates. The rate capability and electrochemical degradation observed in lithium-ion cells can be correlated to lithium concentration profiles in the electrodes measured by LIBS. Full article

Over the past decades, pool boiling on various wetting surfaces has been intensively investigated to enhance boiling heat transfer and critical heat flux. In this study, to enhance the two thermal performances simultaneously, we developed hydrophilic micro/nanotextured surfaces with hydrophobic patterns. Using a silicon substrate, well-arrayed microtextures and randomly arrayed nanotextures were fabricated hierarchically using micro/nanoelectromechanical system processes. The top of the microtextures was coated locally with hydrophobic characteristics using specific self-assembled monolayer coating methods. Based on experimental data, we postulate that the critical heat flux was enhanced by the capillary-induced flow between microtextures and that nanotextures with superhydrophilicity contribute to the delay of the critical heat flux by better wetting the dried area. Owing to the hydrophobicity at the top of the micropillars, the nucleate site density and boiling heat transfer increased. Full article

Bio-inspired surfaces with superamphiphobic properties are well known as effective candidates for antifouling technology. However, the limitation of large-area mastering, patterning and pattern collapsing upon physical contact are the bottleneck for practical utilization in marine and medical applications. In this study, a roll-to-plate nanoimprint lithography (R2P NIL) process using Morphotonics’ automated Portis NIL600 tool was used to replicate high aspect ratio (5.0) micro-structures via reusable intermediate flexible stamps that were fabricated from silicon master molds. Two types of Morphotonics’ in-house UV-curable resins were used to replicate a micro-pillar (PIL) and circular rings with eight stripe supporters (C-RESS) micro-structure onto polycarbonate (PC) and polyethylene terephthalate (PET) foil substrates. The pattern quality and surface wettability was compared to a conventional polydimethylsiloxane (PDMS) soft lithography process. It was found that the heights of the R2P NIL replicated PIL and C-RESS patterns deviated less than 6% and 5% from the pattern design, respectively. Moreover, the surface wettability of the imprinted PIL and C-RESS patterns was found to be superhydro- and oleophobic and hydro- and oleophobic, respectively, with good robustness for the C-RESS micro-structure. Therefore, the R2P NIL process is expected to be a promising method to fabricate robust C-RESS micro-structures for large-scale anti-biofouling application. Full article

Micropillar arrays with radial p–n junctions are attractive for photovoltaic applications, because the light absorption and carrier collection become decoupled. The main challenge in manufacturing radial p–n junctions is achieving shallow (dopant depth <200 nm) and heavy doping (>10²⁰ cm⁻³) that will allow the formation of a quasi-neutral region (QNR) and space charge region (SCR) in its tiny geometry. This experimental study investigates an approach that allows shallow and heavy doping in silicon micropillars. It aims to demonstrate that silicon dioxide (SiO₂) can be used to control the dopant penetration depth in silicon micropillars. Full article

Silicon is a promising material for tissue engineering since it allows to produce micropatterned scaffolding structures resembling biological tissues. Using specific fabrication methods, it is possible to build aligned 3D network-like structures. In the present study, we exploited vertically-aligned silicon micropillar arrays as culture systems for human iPSC-derived cortical progenitors. In particular, our aim was to mimic the radially-oriented cortical radial glia fibres that during embryonic development play key roles in controlling the expansion, radial migration and differentiation of cortical progenitors, which are, in turn, pivotal to the establishment of the correct multilayered cerebral cortex structure. Here we show that silicon vertical micropillar arrays efficiently promote expansion and stemness preservation of human cortical progenitors when compared to standard monolayer growth conditions. Furthermore, the vertically-oriented micropillars allow the radial migration distinctive of cortical progenitors in vivo. These results indicate that vertical silicon micropillar arrays can offer an optimal system for human cortical progenitors’ growth and migration. Furthermore, similar structures present an attractive platform for cortical tissue engineering. Full article

Silicon micropillars with tunable sizes are successfully fabricated on copper foils by using nanosecond-pulsed laser irradiation and then used as anodes for lithium-ion batteries. The size of the silicon micropillars is manipulated by using different slurry layer thicknesses ranging from a few microns to tens of microns. The effects of the pillar size on electrochemical properties are thoroughly investigated. The smaller the pillars, the better the electrochemical performance. A capacity of 1647 mAh g⁻¹ at 0.1 C current rate is achieved in the anode with the smallest pillars, with 1215, 892, and 582 mAh g⁻¹ at 0.2, 0.5, and 1.0 C, respectively. Although a significant difference in discharge capacity is observed in the early period of cycling among micropillars of different sizes, this discrepancy becomes smaller as a function of the cycle number. Morphological studies reveal that the expansion of micropillars occurred during long-term cycling, which finally led to the formation of island-like structures. Also, the formation of a solid electrolyte interphase film obstructs Li⁺ diffusion into Si for lithiation, resulting in capacity decay. This study demonstrates the importance of minimizing the pillar size and optimizing the pillar density during anode fabrication. Full article