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Keywords = self-sensing microcantilevers

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12 pages, 2431 KB  
Article
Photothermal Self-Excitation of a Phase-Controlled Microcantilever for Viscosity or Viscoelasticity Sensing
by João Mouro, Paolo Paoletti, Marco Sartore, Massimo Vassalli and Bruno Tiribilli
Sensors 2022, 22(21), 8421; https://doi.org/10.3390/s22218421 - 2 Nov 2022
Cited by 6 | Viewed by 2646
Abstract
This work presents a feedback closed-loop platform to be used for viscosity or viscoelasticity sensing of Newtonian or non-Newtonian fluids. The system consists of a photothermally excited microcantilever working in a digital Phase-Locked Loop, in which the phase between the excitation signal to [...] Read more.
This work presents a feedback closed-loop platform to be used for viscosity or viscoelasticity sensing of Newtonian or non-Newtonian fluids. The system consists of a photothermally excited microcantilever working in a digital Phase-Locked Loop, in which the phase between the excitation signal to the cantilever and the reference demodulating signals is chosen and imposed in the loop. General analytical models to describe the frequency and amplitude of oscillation of the cantilever immersed in viscous and viscoelastic fluids are derived and validated against experiments. In particular, the sensitivity of the sensor to variations of viscosity of Newtonian fluids, or to variations of elastic/viscous modulus of non-Newtonian fluids, are studied. Interestingly, it is demonstrated the possibility of controlling the sensitivity of the system to variations of these parameters by choosing the appropriate imposed phase in the loop. A working point with maximum sensitivity can be used for real-time detection of small changes of rheological parameters with low-noise and fast-transient response. Conversely, a working point with zero sensitivity to variations of rheological parameters can be potentially used to decouple the effect of simultaneous external factors acting on the resonator. Full article
(This article belongs to the Special Issue Cantilever Sensors for Industrial Applications: 2nd Edition)
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13 pages, 2125 KB  
Article
Measuring Viscosity Using the Hysteresis of the Non-Linear Response of a Self-Excited Cantilever
by João Mouro, Paolo Paoletti, Michele Basso and Bruno Tiribilli
Sensors 2021, 21(16), 5592; https://doi.org/10.3390/s21165592 - 19 Aug 2021
Cited by 6 | Viewed by 2664
Abstract
A self-oscillating microcantilever in a feedback loop comprised of a gain, a saturator, and an adjustable phase-shifter is used to measure the viscosity of Newtonian fluids. Shifting the signal of the loop with the adjustable phase-shifter causes sudden jumps in the oscillation frequency [...] Read more.
A self-oscillating microcantilever in a feedback loop comprised of a gain, a saturator, and an adjustable phase-shifter is used to measure the viscosity of Newtonian fluids. Shifting the signal of the loop with the adjustable phase-shifter causes sudden jumps in the oscillation frequency of the cantilever. The exact position of these jumps depends on whether the shift imposed by the phase-shifter is increasing or decreasing and, therefore, the self-excited cantilever exhibits a hysteretic non-linear response. This response was studied and the system modeled by a delay differential equation of motion where frequency-dependent added mass and damping terms accounted for the density and the viscosity of the medium. Experimental data were obtained for solutions with different concentrations of glycerol in water and used to validate the model. Two distinct sensing modalities were proposed for this system: the sweeping mode, where the width of the observed hysteresis depends on the viscosity of the medium, and the threshold mode, where a sudden jump of the oscillation frequency is triggered by an arbitrarily small change in the viscosity of the medium. Full article
(This article belongs to the Section Physical Sensors)
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14 pages, 5569 KB  
Article
Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure
by Andi Setiono, Michael Fahrbach, Alexander Deutschinger, Ernest J. Fantner, Christian H. Schwalb, Iqbal Syamsu, Hutomo Suryo Wasisto and Erwin Peiner
Sensors 2021, 21(12), 4088; https://doi.org/10.3390/s21124088 - 14 Jun 2021
Cited by 11 | Viewed by 4400
Abstract
An electrothermal piezoresistive cantilever (EPC) sensor is a low-cost MEMS resonance sensor that provides self-actuating and self-sensing capabilities. In the platform, which is of MEMS-cantilever shape, the EPC sensor offers several advantages in terms of physical, chemical, and biological sensing, e.g., high sensitivity, [...] Read more.
An electrothermal piezoresistive cantilever (EPC) sensor is a low-cost MEMS resonance sensor that provides self-actuating and self-sensing capabilities. In the platform, which is of MEMS-cantilever shape, the EPC sensor offers several advantages in terms of physical, chemical, and biological sensing, e.g., high sensitivity, low cost, simple procedure, and quick response. However, a crosstalk effect is generated by the coupling of parasitic elements from the actuation part to the sensing part. This study presents a parasitic feedthrough subtraction (PFS) method to mitigate a crosstalk effect in an electrothermal piezoresistive cantilever (EPC) resonance sensor. The PFS method is employed to identify a resonance phase that is, furthermore, deployed to a phase-locked loop (PLL)-based system to track and lock the resonance frequency of the EPC sensor under cigarette smoke exposure. The performance of the EPC sensor is further evaluated and compared to an AFM-microcantilever sensor and a commercial particle counter (DC1100-PRO). The particle mass–concentration measurement result generated from cigarette-smoke puffs shows a good agreement between these three detectors. Full article
(This article belongs to the Special Issue Cantilever Sensors for Industrial Applications)
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3 pages, 528 KB  
Proceeding Paper
Investigations on Long-Range AFM Scans Using a Nanofabrication Machine (NFM-100)
by Jaqueline Stauffenberg, Ingo Ortlepp, Christoph Reuter, Mathias Holz, Denis Dontsov, Christoph Schäffel, Steffen Strehle, Jens-Peter Zöllner, Ivo W. Rangelow and Eberhard Manske
Proceedings 2020, 56(1), 34; https://doi.org/10.3390/proceedings2020056034 - 30 Dec 2020
Cited by 1 | Viewed by 1767
Abstract
The focus of this work lies on investigations on a new Nano Fabrication Machine (NFM-100) with a mounted atomic force microscope (AFM). This installed tip-based measuring system uses self-sensing and self-actuated microcantilevers, which can be used especially for field-emission scanning probe lithography (FESPL). [...] Read more.
The focus of this work lies on investigations on a new Nano Fabrication Machine (NFM-100) with a mounted atomic force microscope (AFM). This installed tip-based measuring system uses self-sensing and self-actuated microcantilevers, which can be used especially for field-emission scanning probe lithography (FESPL). The NFM-100 has a positioning range of Ø 100 mm, which offers, in combination with the tip-based measuring system, the possibility to analyse structures over long ranges. Using different gratings, the accuracy and the reproducibility of the NFM-100 and the AFM-system will be shown. Full article
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15 pages, 7649 KB  
Article
γ-Nanofluid Thermal Transport between Parallel Plates Suspended by Micro-Cantilever Sensor by Incorporating the Effective Prandtl Model: Applications to Biological and Medical Sciences
by Umar Khan, Adnan, Naveed Ahmed, Syed Tauseef Mohyud-Din, Yu-Ming Chu, Ilyas Khan and Kottakkaran Sooppy Nisar
Molecules 2020, 25(8), 1777; https://doi.org/10.3390/molecules25081777 - 13 Apr 2020
Cited by 24 | Viewed by 3066
Abstract
The flow of nanofluid between infinite parallel plates suspended by micro-cantilever sensors is significant. The analysis of such flows is a rich research area due to the variety of applications it has in chemical, biological and medical sciences. Micro-cantilever sensors play a significant [...] Read more.
The flow of nanofluid between infinite parallel plates suspended by micro-cantilever sensors is significant. The analysis of such flows is a rich research area due to the variety of applications it has in chemical, biological and medical sciences. Micro-cantilever sensors play a significant role in accurately sensing different diseases, and they can be used to detect many hazardous and bio-warfare agents. Therefore, flow water and ethylene glycol (EG) composed by γ-nanoparticles is used. Firstly, the governing nanofluid model is transformed into two self-similar nanofluid models on the basis of their effective models. Then, a numerical method is adopted for solution purposes, and both the nanofluid models are solved. To enhance the heat transfer characteristics of the models, the effective Prandtl model is ingrained in the energy equation. The velocity F’(η) decreases with respect to the suction of the fluid, because more fluid particles drags on the surface for suction, leading to an abrupt decrement in F’(η). The velocity F’(η) increases for injection of the fluid from the upper end, and therefore the momentum boundary layer region is prolonged. A high volume fraction factor is responsible for the denser characteristics of the nanofluids, due to which the fluids become more viscous, and the velocity F’(η) drops abruptly, with the magnetic parameters favoring velocity F’(η). An increase in temperature β ( η ) of Al2O3-H2O and γAl2O3-C2H6O2 nanofluids was reported at higher fraction factors with permeable parameter effects. Finally, a comparative analysis is presented by restricting the flow parameters, which shows the reliability of the study. Full article
(This article belongs to the Special Issue Nanoparticles and Their Biological and Biomedical Applications)
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5 pages, 1114 KB  
Proceeding Paper
Silicon Microcantilevers with ZnO Nanorods/Chitosan-SAMs Hybrids on Its Back Surface for Humidity Sensing
by Jiushuai Xu, Maik Bertke, Xuejing Li, Andi Setiono, Michael Fahrbach, Angelika Schmidt and Erwin Peiner
Proceedings 2018, 2(13), 838; https://doi.org/10.3390/proceedings2130838 - 21 Dec 2018
Cited by 7 | Viewed by 2218
Abstract
This paper reports a piezoresistive silicon microcantilever-based gravimetric humidity sensor, where a ZnO nanofilm (200 nm) and ZnO nanorods (NRs) with different lengths (1.5 µm and 6 µm) modified with chitosan self-assembled monolayers (SAMs) are coated on the microcantilevers’ back surface as the [...] Read more.
This paper reports a piezoresistive silicon microcantilever-based gravimetric humidity sensor, where a ZnO nanofilm (200 nm) and ZnO nanorods (NRs) with different lengths (1.5 µm and 6 µm) modified with chitosan self-assembled monolayers (SAMs) are coated on the microcantilevers’ back surface as the sensing material. Thanks to the new sensor design, the resonant frequency (RF) shifts induced by the mass adsorption on the high surface-area-to-volume ratio, hybrid-sensing nanostructure can be tracked directly by monitoring the output of the p-diffused full Wheatstone bridge. By depositing ZnO NRs and Chitosan SAMs, direct-reading microcantilevers with high repeatability, reliability and high sensitivity (15 Hz/%RH) can be achieved. Full article
(This article belongs to the Proceedings of EUROSENSORS 2018)
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20 pages, 815 KB  
Article
A Self-Sensing Piezoelectric MicroCantilever Biosensor for Detection of Ultrasmall Adsorbed Masses: Theory and Experiments
by Samira Faegh, Nader Jalili and Srinivas Sridhar
Sensors 2013, 13(5), 6089-6108; https://doi.org/10.3390/s130506089 - 10 May 2013
Cited by 43 | Viewed by 10816
Abstract
Detection of ultrasmall masses such as proteins and pathogens has been made possible as a result of advancements in nanotechnology. Development of label-free and highly sensitive biosensors has enabled the transduction of molecular recognition into detectable physical quantities. Microcantilever (MC)-based systems have played [...] Read more.
Detection of ultrasmall masses such as proteins and pathogens has been made possible as a result of advancements in nanotechnology. Development of label-free and highly sensitive biosensors has enabled the transduction of molecular recognition into detectable physical quantities. Microcantilever (MC)-based systems have played a widespread role in developing such biosensors. One of the most important drawbacks of all of the available biosensors is that they all come at a very high cost. Moreover, there are certain limitations in the measurement equipments attached to the biosensors which are mostly optical measurement systems. A unique self-sensing detection technique is proposed in this paper in order to address most of the limitations of the current measurement systems. A self-sensing bridge is used to excite piezoelectric MC-based sensor functioning in dynamic mode, which simultaneously measures the system’s response through the self-induced voltage generated in the piezoelectric material. As a result, the need for bulky, expensive read-out equipment is eliminated. A comprehensive mathematical model is presented for the proposed self-sensing detection platform using distributed-parameters system modeling. An adaptation strategy is then implemented in the second part in order to compensate for the time-variation of piezoelectric properties which dynamically improves the behavior of the system. Finally, results are reported from an extensive experimental investigation carried out to prove the capability of the proposed platform. Experimental results verified the proposed mathematical modeling presented in the first part of the study with accuracy of 97.48%. Implementing the adaptation strategy increased the accuracy to 99.82%. These results proved the measurement capability of the proposed self-sensing strategy. It enables development of a cost-effective, sensitive and miniaturized mass sensing platform. Full article
(This article belongs to the Special Issue Piezoelectric Sensors and Actuators)
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13 pages, 426 KB  
Article
Investigation of the Frequency Shift of a SAD Circuit Loop and the Internal Micro-Cantilever in a Gas Sensor
by Liu Guan, Jiahao Zhao, Shijie Yu, Peng Li and Zheng You
Sensors 2010, 10(7), 7044-7056; https://doi.org/10.3390/s100707044 - 23 Jul 2010
Cited by 4 | Viewed by 10402
Abstract
Micro-cantilever sensors for mass detection using resonance frequency have attracted considerable attention over the last decade in the field of gas sensing. For such a sensing system, an oscillator circuit loop is conventionally used to actuate the micro-cantilever, and trace the frequency shifts. [...] Read more.
Micro-cantilever sensors for mass detection using resonance frequency have attracted considerable attention over the last decade in the field of gas sensing. For such a sensing system, an oscillator circuit loop is conventionally used to actuate the micro-cantilever, and trace the frequency shifts. In this paper, gas experiments are introduced to investigate the mechanical resonance frequency shifts of the micro-cantilever within the circuit loop(mechanical resonance frequency, MRF) and resonating frequency shifts of the electric signal in the oscillator circuit (system working frequency, SWF). A silicon beam with a piezoelectric zinc oxide layer is employed in the experiment, and a Self-Actuating-Detecting (SAD) circuit loop is built to drive the micro-cantilever and to follow the frequency shifts. The differences between the two resonating frequencies and their shifts are discussed and analyzed, and a coefficientrelated to the two frequency shifts is confirmed.Micro-cantilever sensors for mass detection using resonance frequency have attracted considerable attention over the last decade in the field of gas sensing. For such a sensing system, an oscillator circuit loop is conventionally used to actuate the micro-cantilever, and trace the frequency shifts. In this paper, gas experiments are introduced to investigate the mechanical resonance frequency shifts of the micro-cantilever within the circuit loop(mechanical resonance frequency, MRF) and resonating frequency shifts of the electric signal in the oscillator circuit (system working frequency, SWF). A silicon beam with a piezoelectric zinc oxide layer is employed in the experiment, and a Self-Actuating-Detecting (SAD) circuit loop is built to drive the micro-cantilever and to follow the frequency shifts. The differences between the two resonating frequencies and their shifts are discussed and analyzed, and a coefficientrelated to the two frequency shifts is confirmed. Full article
(This article belongs to the Special Issue Intelligent Sensors - 2010)
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