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Article

Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure

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Institute of Semiconductor Technology (IHT), Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany
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Research Center for Physics, Indonesian Institute of Sciences (LIPI), Tangerang Selatan 15314, Indonesia
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SCL-Sensor.Tech. Fabrication GmbH, 1220 Vienna, Austria
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GETec Microscopy GmbH, 1220 Vienna, Austria
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Research Center for Electronics and Telecommunication, Indonesian Institute of Sciences (LIPI), Jl. Sangkuriang-Komplek LIPI Gedung 20, Bandung 40135, Indonesia
*
Author to whom correspondence should be addressed.
Academic Editor: James Covington
Sensors 2021, 21(12), 4088; https://doi.org/10.3390/s21124088
Received: 19 May 2021 / Revised: 8 June 2021 / Accepted: 9 June 2021 / Published: 14 June 2021
(This article belongs to the Special Issue Cantilever Sensors for Industrial Applications)
An electrothermal piezoresistive cantilever (EPC) sensor is a low-cost MEMS resonance sensor that provides self-actuating and self-sensing capabilities. In the platform, which is of MEMS-cantilever shape, the EPC sensor offers several advantages in terms of physical, chemical, and biological sensing, e.g., high sensitivity, low cost, simple procedure, and quick response. However, a crosstalk effect is generated by the coupling of parasitic elements from the actuation part to the sensing part. This study presents a parasitic feedthrough subtraction (PFS) method to mitigate a crosstalk effect in an electrothermal piezoresistive cantilever (EPC) resonance sensor. The PFS method is employed to identify a resonance phase that is, furthermore, deployed to a phase-locked loop (PLL)-based system to track and lock the resonance frequency of the EPC sensor under cigarette smoke exposure. The performance of the EPC sensor is further evaluated and compared to an AFM-microcantilever sensor and a commercial particle counter (DC1100-PRO). The particle mass–concentration measurement result generated from cigarette-smoke puffs shows a good agreement between these three detectors. View Full-Text
Keywords: electrothermal piezoresistive cantilever sensors; parasitic feedthrough subtraction; particle mass concentration measurement; cigarette smoke exposure electrothermal piezoresistive cantilever sensors; parasitic feedthrough subtraction; particle mass concentration measurement; cigarette smoke exposure
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MDPI and ACS Style

Setiono, A.; Fahrbach, M.; Deutschinger, A.; Fantner, E.J.; Schwalb, C.H.; Syamsu, I.; Wasisto, H.S.; Peiner, E. Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure. Sensors 2021, 21, 4088. https://doi.org/10.3390/s21124088

AMA Style

Setiono A, Fahrbach M, Deutschinger A, Fantner EJ, Schwalb CH, Syamsu I, Wasisto HS, Peiner E. Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure. Sensors. 2021; 21(12):4088. https://doi.org/10.3390/s21124088

Chicago/Turabian Style

Setiono, Andi, Michael Fahrbach, Alexander Deutschinger, Ernest J. Fantner, Christian H. Schwalb, Iqbal Syamsu, Hutomo S. Wasisto, and Erwin Peiner. 2021. "Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure" Sensors 21, no. 12: 4088. https://doi.org/10.3390/s21124088

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