Search Results (79)

Continuous monitoring of environmental and physiological parameters is essential for early diagnostics, real-time decision making, and intelligent system adaptation. Recent advancements in bio-microelectromechanical systems (BioMEMS) sensors have significantly enhanced our ability to track key metrics in real time. However, continuous monitoring demands sustainable energy supply solutions, especially for on-site energy replenishment in areas with limited resources. Artificial intelligence (AI), particularly large language models, offers new avenues for interpreting the vast amounts of data generated by these sensors. Despite this potential, fully integrated systems that combine self-powered BioMEMS sensing with AI-based analytics remain in the early stages of development. This review first examines the evolution of BioMEMS sensors, focusing on advances in sensing materials, micro/nano-scale architectures, and fabrication techniques that enable high sensitivity, flexibility, and biocompatibility for continuous monitoring applications. We then examine recent advances in energy harvesting technologies, such as piezoelectric nanogenerators, triboelectric nanogenerators and moisture electricity generators, which enable self-powered BioMEMS sensors to operate continuously and reducereliance on traditional batteries. Finally, we discuss the role of AI in BioMEMS sensing, particularly in predictive analytics, to analyze continuous monitoring data, identify patterns, trends, and anomalies, and transform this data into actionable insights. This comprehensive analysis aims to provide a roadmap for future continuous BioMEMS sensing, revealing the potential unlocked by combining materials science, energy harvesting, and artificial intelligence. Full article

Polyvinylidene fluoride (PVDF) polymer films, renowned for their exceptional piezoelectric, pyroelectric, and ferroelectric properties, offer a versatile platform for the development of cutting-edge micro-scale functional devices, enabling innovative applications ranging from energy harvesting and sensing to medical diagnostics and actuation. This paper presents an in-depth review of the material properties, fabrication methodologies, and characterization of PVDF films. Initially, a comprehensive description of the physical, mechanical, chemical, thermal, electrical, and electromechanical properties is provided. The unique combination of piezoelectric, pyroelectric, and ferroelectric properties, coupled with its excellent chemical resistance and mechanical strength, makes PVDF a highly valuable material for a wide range of applications. Subsequently, the fabrication techniques, phase transitions and their achievement methods, and copolymerization and composites employed to improve and optimize the PVDF properties were elaborated. Enhancing the phase transition in PVDF films, especially promoting the high-performance β-phase, can be achieved through various processing techniques, leading to significantly enhanced piezoelectric and pyroelectric properties, which are essential for diverse applications. This concludes the discussion of PVDF material characterization and its associated techniques for thermal, crystal structure, mechanical, electrical, ferroelectric, piezoelectric, electromechanical, and pyroelectric properties, which provide crucial insights into the material properties of PVDF films, directly impacting their performance in applications. By understanding these aspects, researchers and engineers can gain valuable insights into optimizing PVDF-based devices for various applications, including energy-harvesting, sensing, and biomedical devices, thereby driving advancements in these fields. Full article

In the process of energy harvesting, vibration energy harvesting still has several disadvantages, including a high-threshold excitation and a narrow working bandwidth. Therefore, a 2-degrees-of-freedom piezoelectric energy harvester is proposed. By introducing a nonlinear magnetic force to the system, the working bandwidth and the energy-harvesting efficiency of three magnetically coupled piezoelectric cantilever beams can be effectively improved. In this paper, a mathematical model consisting of three electrically coupled magnetically coupled piezoelectric cantilever beam systems is established, and the governing equations of electric coupling are solved numerically and verified experimentally. The dynamic characteristics under different excitations and frequencies are studied. The experiment shows that the working bandwidth can be increased by controlling the distance between three pairs of circular magnets and changing the excitation and frequency to induce resonance. Thus, the self-power requirement of micro-power devices can be realized. Overall, this study provides a promising solution for improving the performance of piezoelectric energy harvesters and offers theoretical insights for designing vibrating piezoelectric energy harvesters. Full article

Micro-scale kinetic energy harvesters are in large demand to function as sustainable power sources for wireless sensor networks and the Internet of Things. However, one of the challenges associated with them is their inability to easily tune the frequency during the manufacturing process, requiring devices to be custom-made for each application. Previous attempts have either used active tuning, which consumes power, or passive devices that increase their energy footprint, thus decreasing power density. This study involved developing a novel passive method that does not alter the device footprint or power density. It involved creating a proof mass with an array of chambers or cavities that can be individually filled with liquid to alter the overall proof mass as well as center of gravity. The resonant frequency of a rectangular cantilever can then be altered by changing the location, density, and volume of the liquid-filled mass. The resolution can be enhanced by increasing the number of chambers, whereas the frequency tuning range can be increased by increasing the amount of liquid or density of the liquids used to fill the cavities. A piezoelectric cantilever with a 340 Hz initial resonant frequency was used as the testing device. Liquids with varying density (silicone oil, liquid sodium polytungstate, and Galinstan) were investigated. The resonant frequencies were measured experimentally by filling various cavities with these liquids to determine the tuning frequency range and resolution. The tuning ranges of the first resonant frequency mode for the device were 142–217 Hz, 108–217 Hz, and 78.4–217 Hz for silicone oil, liquid sodium polytungstate, and Galinstan, respectively, with a sub Hz resolution. Full article

Piezoelectric material structures with an excellent mechatronic coupling property effectively promote self-power energy harvesting in micro-/nano-electro-mechanical systems (MEMS/NEMS). Therein, the characteristics of the microscale and multi-physical aspects effect significant influence on performance, such as attaining a fast response and high power density. It is difficult to use the classical mechanical and heat conduction models to effectively explain and analyze microscale physical field coupling behaviors. The purpose of this study is to develop the piezoelectric thermoelastic theoretical model, firstly considering the non-uniform physical field. The generalized equations governing thermo-electro-elastic vibration energy harvesting in a microbeam model were obtained based on Hamilton’s principle and the generalized thermoelastic theory was developed by considering thermopolarization and thermal hysteresis behavior. After that, the explicit expressions for voltage and output power were derived using the assumed-modes method; meanwhile, effects such as the piezo-flexoelectric aspect, size dependence, etc. are discussed in detail. It was found that thermal and microscale effects significantly promote the voltage and output power. The research is also helpful for the design and optimization of self-powered and high-performance micro/nano devices and systems. Full article

Marine wave energy exhibits significant potential as a renewable resource due to its substantial energy storage capacity and high energy density. However, conventional wave power generation technologies often suffer from drawbacks such as high maintenance costs, cumbersome structures, and suboptimal conversion efficiencies, thereby limiting their potential. The wave power generation technologies based on micro-energy technology have emerged as promising new approaches in recent years, owing to their inherent advantages of cost-effectiveness, simplistic structure, and ease of manufacturing. This paper provides a comprehensive overview of the current research status in wave energy harvesting through micro-energy technologies, including detailed descriptions of piezoelectric nanogenerators, electromagnetic generators, triboelectric nanogenerators, dielectric elastomer generators, hydrovoltaic generators, and hybrid nanogenerators. Finally, we provide a comprehensive overview of the prevailing issues and challenges associated with these technologies, while also offering insights into the future development trajectory of wave energy harvesting technology. Full article

Polyimides (PIs) have been extensively used in thin film and micro-electromechanical system (MEMS) processes based on their excellent thermal and mechanical stability and high glass transition temperature. This research explores the development of a novel multilayer and multifunctional polymer composite electro-piezomagnetic device that can function as an energy harvester or sensor for current-carrying wires or magnetic field sensing. The devices consist of four layers of composite materials with a polyimide matrix. The composites have various nanoparticles to alter the functionality of each layer. Nanoparticles of Ag were used to increase the electrical conductivity of polyimide and act as electrodes; lead zirconate titanate was used to make the piezoelectric composite layer; and either neodymium iron boron (NdFeB) or Terfenol-D was used to make the magnetic and magnetostrictive composite layer, which was used as the proof mass. A novel all-polymer multifunctional polyimide composite cantilever was developed to operate at low frequencies. This paper compares the performance of the different magnetic masses, shapes, and concentrations, as well as the development of an all-magnetostrictive device to detect voltage or current changes when coupled to the magnetic field from a current-carrying wire. The PI/PZT cantilever with the PI/NdFeB proof mass demonstrated higher voltage output compared to the PI/Terfenol-D proof mass device. However, the magnetostrictive composite film could be operated without a piezoelectric film based on the Villari effect, which consisted of a single PI-Terfenol-D film. The paper illustrates the potential to develop an all-polymer composite MEMS device capable of acting as a magnetic field or current sensor. Full article

The continuous worsening of the natural surroundings requires accelerating the exploration of green energy technology. Utilising ambient vibration to power electronic equipment constitutes an important measure to address the power crisis. Vibration power is widely dispersed in the surroundings, such as mechanical vibration, acoustic vibration, wind vibration, and water wave vibration. Collecting vibration energy is one of the research hotspots in the field of energy. Meanwhile, it is also an important way to solve the energy crisis. This paper illustrates the working principles and recent research progress of five known methods of vibrational energy harvesting, namely, electromagnetic, piezoelectric, friction electric, electrostatic, and magnetostrictive vibrational energy harvesters. The strengths and weaknesses of each method are summarised. At the end of the article, the future trends of micro-nano vibrational energy collectors are envisioned. Full article

Nanogenerators possess the capability to harvest faint energy from the environment. Among them, thermoelectric (TE), triboelectric, piezoelectric (PE), and moisture-enabled nanogenerators represent promising approaches to micro–nano energy collection. These nanogenerators have seen considerable progress in material optimization and structural design. Printing technology has facilitated the large-scale manufacturing of nanogenerators. Although inks can be compatible with most traditional functional materials, this inevitably leads to a decrease in the electrical performance of the materials, necessitating control over the rheological properties of the inks. Furthermore, printing technology offers increased structural design flexibility. This review provides a comprehensive framework for ink-based nanogenerators, encompassing ink material optimization and device structural design, including improvements in ink performance, control of rheological properties, and efficient energy harvesting structures. Additionally, it highlights ink-based nanogenerators that incorporate textile technology and hybrid energy technologies, reviewing their latest advancements in energy collection and self-powered sensing. The discussion also addresses the main challenges faced and future directions for development. Full article

We introduce a micro-electromechanical system (MEMS) energy harvester, designed for capturing flow energy. Moving beyond traditional vibration-based energy harvesting, our approach incorporates a cylindrical oscillator mounted on an MEMS chip, effectively harnessing wind energy through flow-induced vibration (FIV). A highlight of our research is the development of a comprehensive fabrication process, utilizing a 5.00 µm thick cantilever beam and piezoelectric film, optimized through advanced micromachining techniques. This process ensures the harvester’s alignment with theoretical predictions and enhances its operational efficiency. Our wind tunnel experiments confirmed the harvester’s capability to generate a notable electrical output, with a peak voltage of 2.56 mV at an 8.00 m/s wind speed. Furthermore, we observed a strong correlation between the experimentally measured voltage frequencies and the lift force frequency observed by CFD analysis, with dominant frequencies identified in the range of 830 Hz to 867 Hz, demonstrating the potential application in actual flow environments. By demonstrating the feasibility of efficient energy conversion from ambient wind, our research contributes to the development of sustainable energy solutions and low-power wireless electron devices. Full article

Additive manufacturing (AM) technology has recently seen increased utilization due to its versatility in using functional materials, offering a new pathway for next-generation conformal electronics in the smart sensor field. However, the limited availability of polymer-based ultraviolet (UV)-curable materials with enhanced piezoelectric properties necessitates the development of a tailorable process suitable for 3D printing. This paper investigates the structural, thermal, rheological, mechanical, and piezoelectric properties of a newly developed sensor resin material. The polymer resin is based on polyvinylidene fluoride (PVDF) as a matrix, mixed with constituents enabling UV curability, and boron nitride nanotubes (BNNTs) are added to form a nanocomposite resin. The results demonstrate the successful micro-scale printability of the developed polymer and nanocomposite resins using a liquid crystal display (LCD)-based 3D printer. Additionally, incorporating BNNTs into the polymer matrix enhanced the piezoelectric properties, with an increase in the voltage response by up to 50.13%. This work provides new insights for the development of 3D printable flexible sensor devices and energy harvesting systems. Full article

The reliability and efficiency of components are key aspects in the automotive industry. Electric machines become the focus of development. Thus, improvements in efficiency and reliability have gained significance. While it is established to attach sensors to the fixed parts of machines, such as stators, moving parts like rotors pose a major challenge due to the power supply. Piezoelectric generators can operate as energy harvesters on rotors and thus enable the rotor-based integration of sensors. The research in this article proposes the first approach to the design of a piezoelectric energy harvester (PEH) for an electric machine rotor dedicated to powering a wireless sensor system. After introducing the field of PEHs, the integration of the proposed device on a rotor shaft is presented. Further, a gap between the provided and needed data for the design of a PEH is identified. To overcome this gap, a method is presented, starting with the definition of the rotor shaft dimensions and the applied mechanical loads, including a method for the calculation of the imbalance of the rotor. With the first set of dimensions of the shaft and PEH, a co-simulation is performed to calculate the power output of this rotor and PEH set. The results of the simulation indicate the feasible implementation of the PEH on the rotor, providing enough energy to power a temperature sensor. Full article

In the current era, energy resources from the environment via piezoelectric materials are not only used for self-powered electronic devices, but also play a significant role in creating a pleasant living environment. Piezoelectric materials have the potential to produce energy from micro to milliwatts of power depending on the ambient conditions. The energy obtained from these materials is used for powering small electronic devices such as sensors, health monitoring devices, and various smart electronic gadgets like watches, personal computers, and cameras. These reviews explain the comprehensive concepts related to piezoelectric (classical and non-classical) materials, energy harvesting from the mechanical vibration of piezoelectric materials, structural modelling, and their optimization. Non-conventional smart materials, such as polyceramics, polymers, or composite piezoelectric materials, stand out due to their slender actuator and sensor profiles, offering superior performance, flexibility, and reliability at competitive costs despite their susceptibility to performance fluctuations caused by temperature variations. Accurate modeling and performance optimization, employing analytical, numerical, and experimental methodologies are imperative. This review also furthers research and development in optimizing piezoelectric energy utilization, suggesting the need for continued experimentation to select optimal materials and structures for various energy applications. Full article

In this paper, a theoretical model of the propagation of a shear horizontal wave in a piezoelectric semiconductor semi-infinite medium is established using the optimized spectral method. First, the basic equations of the piezoelectric semiconductor semi-infinite medium are derived with the consideration of biased electric fields. Then, considering the propagation of a shear horizontal wave in the piezoelectric semiconductor semi-infinite medium, two equivalent mathematical models are established. In the first mathematical model, the Schottky junction is theoretically treated as an electrically imperfect interface, and an interface characteristic length is utilized to describe the interface effect of the Schottky junction. To legitimately confirm the interface characteristic length, a second mathematical model is established, in which the Schottky junction is theoretically treated as an electrical gradient layer. Finally, the dispersion and attenuation curves of shear horizontal waves are numerically calculated using these two mathematical models to discuss the influence of the Schottky junction on the dispersion and attenuation characteristics of shear horizontal waves. Utilizing the equivalence of these two mathematical models and the above numerical results, the numerical value of the interface characteristic length is reliably legitimately confirmed; this value is independent of the thickness of the upper metal layer, the doping concentration of the lower n-type piezoelectric semiconductor substrate, and biasing electric fields. Only the biasing electric field parallel to the Schottky junction can provide an evident influence on the attenuation characteristics of shear horizontal waves and enhance the interface effect of the Schottky junction. Since the second mathematical model is also a validation of our previous mathematical model established through the state transfer equation method, some numerical results calculated using these two mathematical models are compared with those obtained using the previous method to verify the correctness and superiority of the research work presented in this paper. Since these two mathematical models can better calculate the dispersion and attenuation curves of high-frequency waves in micro- and nano-scale piezoelectric semiconductor materials, the establishment of mathematical models and the revelation of physical mechanisms are fundamental to the analysis and optimization of micro-scale resonators, energy harvesters, and amplifications. Full article

In recent years, portable and wearable personal electronic devices have rapidly developed with increasing mass production and rising energy consumption, creating an energy crisis. Using batteries and supercapacitors with limited lifespans and environmental hazards drives the need to find new, environmentally friendly, and renewable sources. One idea is to harness the energy of human motion and convert it into electrical energy using energy harvesting devices—piezoelectric nanogenerators (PENGs), triboelectric nanogenerators (TENGs) and hybrids. They are characterized by a wide variety of features, such as lightness, flexibility, low cost, richness of materials, and many more. These devices offer the opportunity to use new technologies such as IoT, AI or HMI and create smart self-powered sensors, actuators, and self-powered implantable/wearable devices. This review focuses on recent examples of PENGs, TENGs and hybrid devices for wearable and implantable self-powered systems. The basic mechanisms of operation, micro/nano-scale material selection and manufacturing processes of selected examples are discussed. Current challenges and the outlook for the future of the nanogenerators are also discussed. Full article