Search Results (135)

MEMS switches offer great advantages over solid-state and conventional electromechanical switches, including a compact size and high isolation. This paper presents a novel silicon-to-silicon (Si-to-Si) MEMS switch featuring two suspended actuated platforms for DC power switching applications. The proposed design uniquely incorporates dual suspended chevron actuators, enabling bidirectional actuation, enhancing force generation, and improving overall switching performance. Leveraging the robustness of silicon, this Si-to-Si contact switch aims to enhance the reliability of MEMS-based DC power switches. Testing of a fabricated device in the PiezoMUMPs process demonstrated that a 2 μm initial contact gap closes at 1.1 V_DC, with a total actuation power of 246 mW. The switch exhibits a linear voltage–current response up to 5 mA of switching current and achieves a minimum contact resistance of ~294 ± 2 Ω, one of the lowest reported for Si-to-Si contacts. This low contact resistance is attributed to the suspended contact platforms, which mitigate misalignment. The measured response time was 4 ms for turn-on and 2.5 ms for turn-off. This switch withstood a breakdown voltage of up to 376 V across the 2 µm contact gap. Moreover, the 200 nm thick oxide layer separating the actuation and signal lines exhibited breakdown at 183 V. These findings highlight the potential of the switch for high-voltage applications and pave the way for further enhancements to improve its reliability in harsh environments. Full article

Soft electrothermal actuators have attracted increasing attention in soft robotics and wearable systems due to their simple structure, low driving voltage, and ease of integration. However, traditional designs based on homogeneous or layered composites often suffer from interfacial failure and limited deformation modes, restricting their long-term stability and actuation versatility. In this study, we present a programmable soft electrothermal actuator based on a functionally graded structure composed of polydimethylsiloxane (PDMS)/multiwalled carbon nanotube (MWCNTs) composite material and an embedded EGaIn conductive circuit. Rheological and mechanical characterization confirms the enhancement of viscosity, modulus, and tensile strength with increasing MWCNTs content, confirming that the gradient structure improves mechanical performance. The device shows excellent actuation performance (bending angle up to 117°), fast response (8 s), and durability (100 cycles). The actuator achieves L-shaped, U-shaped, and V-shaped bending deformations through circuit pattern design, demonstrating precise programmability and reconfigurability. This work provides a new strategy for realizing programmable, multimodal deformation in soft systems and offers promising applications in adaptive robotics, smart devices, and human–machine interfaces. Full article

Under low-temperature conditions, the load-bearing capacity of piezoelectric stacks arises from coupled thermo-electro-mechanical interactions, with temperature fluctuations, compressive prestress, and excitation voltage critically modulating performance. This study introduces an integrated measurement platform to systematically quantify these interdependencies, employing a cantilever-based sensing mechanism where bending strain serves as a direct metric of load-bearing capacity. A particle swarm-optimized theoretical framework guides the spatial configuration of actuators and sensors, maximizing strain signal fidelity while suppressing noise interference. Experimental characterization reveals three key findings: 1. Voltage-dependent linear enhancement of load-bearing capacity across all operational regimes, unaffected by thermal or mechanical variations; 2. Prestress-induced amplification (79–90% increase from 0 to 6 MPa) and thermally driven attenuation (15–30% reduction from 20 to −70 °C) of static performance; 3. Frequency-dependent degradation (1–6 Hz) in dynamic load-bearing capacity. The methodology establishes a robust foundation for designing multiphysics-compatible instrumentation systems, enabling precise evaluation of smart material behavior under extreme coupled-field conditions. Full article

In the rapidly advancing digital era, the demand for miniaturized and high-performance electronic devices is increasing, particularly in applications such as wireless communication, unmanned aerial vehicles, and healthcare devices. Radio-frequency microelectromechanical systems (RF MEMS), particularly RF MEMS switches, play a crucial role in enhancing RF performance by providing low-loss, high-isolation switching and precise signal path control in reconfigurable RF front-end systems. Among different configurations, electrothermally actuated bistable lateral RF MEMS switches are preferred for their energy efficiency, requiring power only during transitions. This paper presents a novel approach to improve the RF performance of such a switch through structural modifications and machine learning (ML)-driven optimization. To enable efficient high-frequency operation, the H-clamp structure was re-engineered into various lateral configurations, among which the I-clamp exhibited superior RF characteristics. The proposed I-clamp switch was optimized using an eXtreme Gradient Boost (XGBoost) ML model to predict optimal design parameters while significantly reducing the computational overhead of conventional EM simulations. Activation functions were employed within the ML model to improve the accuracy of predicting optimal design parameters by capturing complex nonlinear relationships. The proposed methodology reduced design time by 87.7%, with the optimized I-clamp switch achieving −0.8 dB insertion loss and −70 dB isolation at 10 GHz. Full article

Electrothermal actuators, with their simple structure, small size, strong anti-interference ability, and easy integration, have emerged as a promising solution for micro-drive technology. However, deploying them in extreme environments, such as the fuze systems—which demand exceptional reliability under high mechanical overloads. In this study, a device based on multi-electrothermal co-actuation is designed for the fuze system of loitering munition. The overall structure and work principle of the multi-electrothermal co-actuation device is discussed. Considering application environments, the effect factors of V-beam numbers, air gap, type of contact surface, external load force, periodic voltage and gas damping on the output performance of the multi-electrothermal co-actuation device are systematically addressed via simulation and experimental method. Furthermore, the high overload resistance performance of the co-actuation device applied in loitering munition is studied. The results show that the proposed multi-electrothermal co-actuation device could operate stably under a high overload (12,000 g/73.79 μs) environment, fully meeting the demanding requirements of fuze system for loitering munition. In addition, this study identifies laser processing-induced thermal gradients and mechanical stresses as critical fabrication challenges. This study provides significant insights into the design and optimization of multi-electrothermal actuation systems for next-generation fuze applications, establishing a valuable framework for future development in this field. Full article

This study presents a pneumatic proportional pressure valve employing a silicon microfluidic chip (SMC) integrated with a V-shaped electrothermal microactuator, aiming to address the limitations of traditional solenoid-based valves in miniaturization and high-precision control. The SMC, fabricated via MEMS technology, leverages the thermal expansion of microactuator ribs to regulate pressure through adjustable orifices. A first-order transfer function between input voltage and displacement of the microactuator was derived through theoretical modeling and validated via COMSOL Multiphysics 5.2a simulations. Key geometric parameters of the actuator ribs—cross-section, number, inclination angle, width, span length and thickness—were analyzed for their influence on lever mechanism displacement, actuator displacement, static gain and time constant. AMESim 16.0-based simulations of single- and dual-chip valve structures revealed that increasing ζ shortens step-response rise time, while reducing τ improves hysteresis. Experimental validation confirmed the valve’s static and dynamic performance, achieving a step-response rise time of <40 ms, linearity within the 30–60% input voltage range, and effective tracking of sinusoidal control signals up to 8 Hz with a maximum pressure deviation of 0.015 MPa. The work underscores the potential of MEMS-based actuators in advancing compact pneumatic systems, offering a viable alternative to conventional solenoids. Key innovations include geometry-driven actuator optimization and dual-chip integration, providing insights into high-precision, low-cost pneumatic control solutions. Full article

Compared with traditional immunoassay methods, microfluidic immunoassay restricts the immune response in confined microchannels, significantly reducing sample consumption and improving reaction efficiency, making it worthy of widespread application. This paper proposes an exciting multi-frequency electrothermal flow (MET) technique by applying combined standing-wave and traveling-wave voltage signals with different oscillation frequencies to a three-period quadra-phase discrete electrode array, achieving rapid immunoreaction on functionalized electrode surfaces within straight microchannels, by virtue of horizontal pumping streamlines and transverse stirring vortices induced by nonlinear electrothermal convection. Under the approximation of a small temperature rise, a linear model describing the phenomenon of MET is derived. Although the time-averaged electrothermal volume force is a simple superposition of the electrostatic body force components at the two frequencies, the electro-thermal-flow field undergoes strong mutual coupling through the dual-component time-averaged Joule heat source term, further enhancing the intensity of Maxwell–Wagner smeared structural polarization and leading to mutual influence between the standing-wave electrothermal (SWET) and traveling-wave electrothermal (TWET) effects. Through thorough numerical simulation, the optimal working frequencies for SWET and TWET are determined, and the resulting synthetic MET flow field is directly utilized for microfluidic immunoassay. MET significantly promotes the binding kinetics on functionalized electrode surface by simultaneous global electrokinetic transport along channel length direction and local chaotic stirring of antigen samples near the reaction site, compared to the situation without flow activation. The MET investigated herein satisfies the requirements for early, rapid, and precise immunoassay of test samples on-site, showing great application prospects in remote areas with limited resources. Full article

In this paper, a bidirectional micro-device based on multi-electrothermal co-actuation is proposed for a fuze safety system, combining the advantages of the simple structure, small size, low input voltage, large output, and absence of electromagnetic interference in electrothermal actuators. Based on the working principle of the multi-electrothermal co-actuation device and the mathematical model of the single V-shaped electrothermal actuator established in this paper, the temperature distribution of the V-shaped electrothermal actuator is simulated. In addition, the dynamic response and the effect of geometric factors on the output performance of the multi-electrothermal co-actuation device are analyzed in detail. Furthermore, driving characteristics tests of the electrothermal micro-device are carried out. The experimental findings indicate that a displacement of approximately 258.95 μm with a response time of about 156.51 ms can be achieved by the V-shaped electrothermal actuator when the applied voltage is 1.2 V. In a single cycle, a total displacement of 340 μm is obtained by the co-actuation device in around 1.28 s. Full article

Flexible actuators hold significant promise for applications in intelligent robotics, wearable devices, and biomimetic systems. However, conventional actuators face challenges such as high driving voltages, inadequate deformation control, and limited deformation modes, which hinder complex programmable dynamic deformations. This study presents an electrothermal actuator based on a conductive silver paste/Kapton/PDMS composite structure, enabling precise and adjustable deformation through programmable thermal control. Experimental results show that the actuator achieves a large-angle bending (∼203°) within 12 s under a low driving voltage of 2.0 V. Compared to the PTFE/MXene/PI structure, the proposed actuator achieves a 64% increase in bending angle, a 70% reduction in response time, and a 67% decrease in driving voltage. By independently controlling multiple heating elements, the actuator exhibits programmable deformation modes, including local, symmetric, and sinusoidal bending. The relationship between input voltage and deformation amplitude is described using a sinusoidal function model, experimentally validated for accuracy. Compared to traditional actuators, the proposed design offers significant improvements in bending angle, response speed, and voltage requirements. By optimizing the conductive silver paste pattern and voltage input strategy, this work develops a low-voltage, highly controllable, multi-mode programmable actuator with potential for applications in flexible robotics and space-deformable antennas. Full article

This paper comprehensively reviews the latest advances in hydrogel-based continuum soft robots. Hydrogels exhibit exceptional flexibility and adaptability compared to traditional robots reliant on rigid structures, making them ideal as biomimetic robotic skins and platforms for constructing highly accurate, real-time responsive sensory interfaces. The article systematically summarizes recent research developments across several key dimensions, including application domains, fabrication methods, actuator technologies, and sensing mechanisms. From an application perspective, developments span healthcare, manufacturing, and agriculture. Regarding fabrication techniques, the paper extensively explores crosslinking methods, additive manufacturing, microfluidics, and other related processes. Additionally, the article categorizes and thoroughly discusses various hydrogel-based actuators responsive to solute/solvent variations, pH, chemical reactions, temperature, light, magnetic fields, electric fields, hydraulic/electro-osmotic stimuli, and humidity. It also details the strategies for designing and implementing diverse sensors, including strain, pressure, humidity, conductive, magnetic, thermal, gas, optical, and multimodal sensors. Finally, the paper offers an in-depth discussion of the prospective applications of hydrogel-based continuum soft robots, particularly emphasizing their potential in medical and industrial fields. Concluding remarks include a forward-looking outlook highlighting future challenges and promising research directions. Full article

Piezoelectric materials have garnered significant attention due to their diverse applications in technologies such as sensors, actuators, and energy-harvesting systems. This study focuses on the growth and characterization of Tb³⁺-doped La₃Ga₅SiO₁₄ (LGS) crystals. A novel 10% Tb³⁺-doped single LGS crystal was successfully grown using the Czochralski method. The crystal structure and fluorescence properties were determined, and the electro-elastic properties were evaluated by the impedance method, which assessed dielectric, piezoelectric, and elastic constants. The Tb³⁺-doped crystal was observed to crystallize in the trigonal system, with the concentration of the Tb³⁺ ion in the crystal determined to be 2.50 wt%. The piezoelectric coefficients were measured as d₁₁ = 5.41 pC/N and d₁₄ = −5.52 pC/N, and the dielectric constants were found to be 19.60 and 52.75, respectively. The temperature-dependent behavior of Tb:LGS crystals was investigated, particularly concerning their elastic constants, demonstrating favorable thermal stability. This study provides valuable insights into the relationship between the crystals’ structural characteristics and performance. Additionally, the fluorescence properties were measured; a long lifetime (τ = 1.655 ms) indicated the potential applications of Tb:LGS crystals in laser technology. Full article

In this work, the generalized finite difference method (GFDM), a popular meshless numerical method, is employed for predicting the thermal and mechanical behavior of an electrothermal micro-actuator. Based on the concept of GFDM and discretization on the computational domain, the discrete forms of the thermal and mechanical governing equations are derived, respectively. With the help of the incremental load method, the discrete form from the electrothermal analysis is solved precisely and the temperature distribution is obtained. Meanwhile, combining this approach with the discrete control equation derived from the natural boundary condition, its displacement is also evaluated. The convergence of the temperature by different iterative methods is tested and compared. The computational stability and efficiency (CPU time) in these two analyses are also given in this study. To further investigate the accuracy of the solutions, experiments to capture temperature and FEM analysis are conducted. Regardless of the imperfect boundary condition, the temperature distribution calculated by the GFDM shows great agreement with that obtained by experiment and FEM. A similar phenomenon can be also found in the comparison between the displacements evaluated by the GFDM and FEM, respectively. Full article

The reliance of feedback mechanisms in conventional light-fueled self-oscillating systems on spatially distributed light and intricately designed structures impedes their application and development in micro-robots, miniature actuators, and other small-scale devices. This paper presents a straightforward rheostat feedback mechanism to create an electrically driven liquid crystal elastomer (LCE) self-oscillator which comprises an LCE fiber, a rheostat, a spring, and a mass. Based on the electrothermally responsive LCE model, we first derive the governing equation for the system’s dynamics and subsequently formulate the asymptotic equation. Numerical calculations reveal two motion phases, i.e., static and self-oscillating, and elucidate the mechanism behind self-oscillation. By employing the multi-scale method, we identify the Hopf bifurcation and establish the analytical solutions for amplitude and frequency. The influence of various system parameters on the amplitude and frequency of self-oscillation was analyzed, with numerical solutions being validated against analytical results to ensure consistency. The proposed rheostat feedback mechanism can be extended to cases with rheostats that have more general resistance properties and offers advantages such as simple design, adjustable dimensions, and rapid operation. The findings are expected to inspire broader design concepts for applications in soft robotics, sensors, and adaptive structures. Full article

High-strength polymer fibers such as nylon 6, nylon 6,6, and polyethylene are utilized to produce Twisted and Coiled Artificial Muscles (TCAMs) through the twisting of low-cost fibers. These artificial muscles exhibit high displacement and specific power, particularly under electrothermal actuation, which requires conductive elements. An experimental setup was developed to produce, thermally treat, and characterize commercially available nylon 6,6 fibers coated with silver. The results demonstrate that TCAMs can contract by over 15% and generate forces up to 2.5 N with minimal energy input. Key factors such as motor speed, applied load, and fiber geometry affect the overall performance. Full article

This paper presents a study on the thermal behavior of an electro-hydrostatic servo actuator designed to actuate the ailerons of an airliner. The considered servo actuator was designed using existing commercial off-the-shelf components (electric motor, pump, hydraulic cylinder, valves, hydro-accumulator), and the control part was tuned using numerical simulations performed in SIMCENTER/AMESIM. This study begins with the functional parameters of the components used in the design and uses numerical simulations to test the thermal behavior of the components. A continuous stress spectrum of the servo actuator is considered, with the servo actuator located in a compartment inside the wing. Different external conditions are also considered, such as situations where component wear occurs and component efficiencies deteriorate, thus producing more heat in the system. Based on the energy losses identified, the average efficiency of the studied servo actuator is also evaluated. Full article