Search Results (160)

This article presents an investigation into the use of nanoscale phononic crystals (PnCs) as reflectors for surface acoustic wave (SAW) resonators, with a focus on pillar-based PnCs. Finite element analysis was employed to simulate the phononic dispersion characteristics and to study the effects of the pillar shape, material and geometric dimensions on achievable acoustic bandgap. To validate our concept, we fabricated SAW resonators and filters incorporating the proposed pillar-based PnC reflectors. The PnC-based reflector shows promising performance, even with smaller number of PnC arrays. In this regard, with a PnC array reflector consisting of 20 lattice periods, the SAW resonator exhibits a maximum bode-Q of about 1600, which can be considered to be a reasonably high value for SAW resonators on bulk 42° Y-X lithium tantalate (42° Y-X LiTaO₃) substrate. Furthermore, we implemented SAW filters using pillar-based PnC reflectors, resulting in a minimum insertion loss of less than 3 dB and out-of-band attenuation exceeding 35 dB. The authors believe that there is still a long way to go in making it fit for mass production, especially due to issues related with the accuracy of fabrication. But, upon its successful implementation, this approach of using PnCs as SAW reflectors could lead to reducing the foot-print of SAW devices, particularly for SAW-based sensors and filters. Full article

BAW filters have been widely used in RF circuits, and their combination with integrated passive inductors is one of the most common forms of BAW filters. However, the large size of passive inductors increases the area of the filter, making it unable to meet packaging requirements. At the same time, their low quality factor (Q) severely degrades the performance of the BAW filter. This paper presents a miniaturized wide band BAW filter with small-size high-Q active inductor. The active inductor is implemented by a circuit topology with three common-source amplifiers constructed with N-type transistors. The three-stage topology uses a small-size transistor in the middle stage to reduce the parasitic capacitance at the input node, achieving a large inductive bandwidth. The simulation results show that the active inductor has variable inductance from 1 nH to 10 nH, and a quality factor of up to 4 K from 2 to 7 GHz. The 30 × 30 μm² active inductor is embedded in a 4.55–5.05 GHz BAW filter ladder so as to substantially decrease filter size. Simulation results indicate that the BAW filter based on the active inductor achieves a low insertion loss of −1.1 dB, out-of-band rejection of −35 dB on the left side, and out-of-band rejection of −53 dB on the right side. Compared to the traditional passive inductor, this active inductor significantly improves the performance of the BAW filter while occupying a much smaller chip size of 0.83 × 0.75 mm². Full article

For relaxor ferroelectric single crystal (1 − x)Pb(Mg_1/3Nb_2/3)O₃ − xPbTiO₃ (PMN-PT), through reasonable component regulation and electric field polarization, an orthogonal mm² point group structure can be obtained, which has high piezoelectric constants and is, therefore, a desired substrate material for lateral-field-excited (LFE) bulk acoustic wave (BAW) devices. In this work, acoustic wave resonance characteristics of (zxt) 45° PMN-PT BAW devices with LFE are investigated. Firstly, Mindlin first-order plate theory is used to obtain vibration governing equations of orthorhombic crystals excited by a lateral electric field. By analyzing the electrically forced vibrations of the finite plate, the basic vibration characteristics, such as motional capacitance, resonant frequency, and mode shape are obtained, and influences of different electrode parameters on resonance characteristics of the device are investigated. In addition, the effects of the structure parameters on the mass sensitivity of the devices are analyzed and further verified by FEM simulations. The model presented in this study can be conveniently used to optimize the structural parameters of LFE bulk acoustic wave devices based on orthorhombic crystals, which is crucial to obtain good resonance characteristics. The results provide an important basis for the design of LFE bulk acoustic wave resonators and sensors by using PMN-PT orthorhombic crystals. Full article

This study addresses the critical challenge of lateral acoustic wave energy leakage in high-frequency film bulk acoustic resonators (FBARs) and elucidates the reflection mechanism of acoustic waves at acoustic reflection boundaries. Based on the theory of acoustic impedance mismatch, a novel Mo/SiC composite microstructure is designed to strategically establish multiple acoustic reflection boundaries along the lateral acoustic wave leakage paths. Finite element simulations reveal that SiC microstructures effectively suppress vibration amplitudes in non-resonant regions, thereby preventing acoustic wave leakage. By integrating Mo and SiC microstructures, the proposed composite structure significantly enhances the resonator’s acoustic confinement and energy retention capabilities. A resonator incorporating this Mo/SiC composite microstructure is fabricated, achieving a series resonance frequency of 6.488 GHz and a remarkable quality factor (Q) of 310. This represents a substantial 51.2% improvement in Q compared to the basic FBAR, confirming the effectiveness of the proposed design in mitigating lateral acoustic wave leakage and enhancing resonator performance for high-frequency, low-loss applications. This work offers valuable insights into the design of next-generation RF resonators for advanced wireless communication systems. Full article

Bulk Acoustic Wave (BAW) resonators are essential components in modern RF communication systems due to their high selectivity and quality factor. However, spurious resonances caused by Lamb wave mode propagation along the in-plane directions degrade the filter performance. Traditional Finite Element Method (FEM) simulations provide accurate modeling but are computationally expensive, especially for arbitrarily shaped resonators and solidly mounted resonators (SMRs), whose stack of materials is composed of many thin layers of different materials. To address this, we extend a previously published model (named the Quasi-3D model), which employs the Transmission Line Matrix (TLM) method, enabling efficient simulations of complex geometries with more precise meshing. The new approach allows us to simulate different geometries, and we will show several apodized geometries with the aim of minimizing the lateral modes. In addition, the proposed approach significantly reduces the computational cost while maintaining high accuracy, as validated by FEM comparisons and experimental measurements. Full article

The process of ultrasonic atomization involves a series of dynamic/topological deformations of free surface, though not always, of a bulk liquid (initially) below the air. This study focuses on such dynamic interfacial alterations realized by changing some acousto-related operating conditions, including ultrasound excitation frequency, acoustic strength or input power density, and the presence/absence of a “stabilizing” nozzle. High-speed, high-resolution imaging made it possible to qualitatively identify four representative transitions/demarcations: (1) the onset of a protrusion on otherwise flat free surface; (2) the appearance of undulation along the growing protuberance; (3) the triggering of emanating beads fountain out of this foundation-like region; and (4) the induction of droplets bursting and/or mist spreading. Quantitatively examined were the two-parameters specifications—on the degrees as well as induction—of the periodicity in the protrusion-surface and beads-fountain oscillations, detected over wider ranges of driving/excitation frequency (0.43–3.0 MHz) and input power density (0.5–10 W/${\mathrm{c}\mathrm{m}}^2$) applied to the ultrasound transducer of flat surface on which the nozzle was either mounted or not. The resulting time sequence of images processed for the extended operating ranges, regarding the fountain structure pertaining, in particular, to recurring beads, confirms the wave-associated nature, i.e., their size “scalability” to the ultrasound wavelength, predictable from the traveling wave relationship. The thresholds in acoustic conditions for each of the four transition states of the fountain structure have been identified—notably, the onset of plausible “bifurcation” in the chain-beads’ diameter below a critical excitation frequency. Full article

With the development of piezoelectric-on-insulator (POI) substrates, X-cut LiNbO₃ thin-film resonators with interdigital transducers are widely investigated due to their adjustable resonant frequency (f_s) and effective electromechanical coupling coefficient ($K_{eff}^2$). This paper presents an in-depth study of simulations and measurements of laterally excited bulk acoustic wave resonators based on an X-cut LiNbO₃/SiO₂/Si substrate and a LiNbO₃ thin film to analyze the effects of electrode angle rotation ($\theta$) on the modes, f_s, and $K_{eff}^2$. The rotated $\theta$ leads to different electric field directions, causing mode changes, where the resonators without cavities are longitudinal leaky SAWs (LLSAWs, $\theta$ = 0$°$) and zero-order shear horizontal SAWs (SH₀-SAWs, $\theta$ = 90$°$) and the resonators with cavities are zero-order-symmetry (S₀) lateral vibrating resonators (LVRs, $\theta$ = 0$°$) and SH₀ plate wave resonators (PAW, $\theta$ = 90$°$). The resonators are fabricated based on a 400 nm X-cut LiNbO₃ thin-film substrate, and the measured results are consistent with those from the simulation. The fabricated LLSAW and SH₀-SAW without cavities show a $K_{eff}^2$ of 1.62% and 26.6% and a Bode-Q_max of 1309 and 228, respectively. Meanwhile, an S₀ LVR and an SH₀-PAW with cavities present a $K_{eff}^2$ of 4.82% and 27.66% and a Bode-Q_max of 3289 and 289, respectively. In addition, the TCF with a different rotated $\theta$ is also measured and analyzed. This paper systematically analyzes resonators on X-cut LiNbO₃ thin-film substrates and provides potential strategies for multi-band and multi-bandwidth filters. Full article

This paper presents a comprehensive review of advancements in wafer-level packaging (WLP) technology, with a particular focus on its application in surface acoustic wave (SAW) and bulk acoustic wave (BAW) filters. As wireless communication systems continue to evolve, there is an increasing demand for higher performance and miniaturization, which has made acoustic wave devices—especially SAW and BAW filters—crucial components in the Radio Frequency (RF) front-end systems of mobile devices. This review explores key developments in WLP technology, emphasizing novel materials, innovative structures, and advanced modeling techniques that have enabled the miniaturization and enhanced functionality of these filters. Additionally, the paper discusses the role of WLP in addressing challenges related to size reduction and integration, facilitating the creation of multi-functional devices with low manufacturing costs and high precision. Finally, it highlights the opportunities and future directions of WLP technology in the context of next-generation wireless communication standards. Full article

Compared to conventional materials, underwater metamaterials possess numerous advantages in the manipulation of sound waves, which have garnered increasing attention. In terms of composition, commonly studied underwater wideband metamaterials can be classified into solid-phase pentamode metafluid and water–solid coupling metafluid. The concept of multiphase design in pentamode metafluid allows for decoupling the regulation of equivalent density from that of the equivalent bulk modulus, facilitating more convenient structural design. In typical auxetic metamaterial structure designs, the “re-entrant” mechanism is commonly employed; the skeleton is inwardly bent to a certain extent, enabling the design of a low volume-modulus for each cell. Consequently, a novel type of water–solid coupling metafluid is devised by combining the concepts of “multiphase” and “re-entrant”. Firstly, a straight-sided skeleton (referred to as “ss” skeletal) unit cell is designed, and its compression wave frequency band is determined through analysis of its band characteristics and related vibration modes. Subsequently, the “re-entrant” (referred to as “re”) mechanism is introduced into a unit cell, revealing an increase in equivalent density while decreasing the equivalent volume modulus due to this feature. The bent skeleton provides lower bulk modulus, while multiphase (referred to as “mp”) counterweighting offers higher equivalent density; their combination enables designing more impedance-matched metafluid. Then, a unit cell is designed utilizing both “re” and “mp” characteristics. Finally, acoustic performance simulations and analyses verify that both types exhibit excellent broadband water-like properties within the frequency range of 5000–27,000 Hz. In order to further validate the reliability of the design concept, two pairs of underwater metafluid cells with an impedance-matching effect were subsequently developed, demonstrating sound speeds that are half and one-third that of water, respectively. The skeleton thickness of the “re” cell was moderately enhanced compared to that of the straight side cell, thereby presenting an innovative approach for designing robust underwater metafluid cells. Full article

AlN-based bulk acoustic wave (BAW) filters have emerged as crucial components in 5G communication due to their high frequency, wide bandwidth, high power capacity, and compact size. This paper mainly reviews the basic principles and recent research advances of AlN-based BAW resonators, which are the backbone of BAW filters. We begin by summarizing the epitaxial growth of single-crystal, polycrystalline, and doped AlN films, with a focus on single-crystal AlN and ScAlN, which are currently the most popular. The discussion then extends to the structure and fabrication of BAW resonators, including the basic solidly mounted resonator (SMR) and the film bulk acoustic resonator (FBAR). The new Xtended Bulk Acoustic Wave (XBAW) technology is highlighted as an effective method to enhance filter bandwidth. Hybrid SAW/BAW resonators (HSBRs) combine the benefits of BAW and SAW resonators to significantly reduce temperature drift. The paper further explores the application of BAW resonators in ladder and lattice BAW filters, highlighting advancements in their design improvements. The frequency-reconfigurable BAW filter, which broadens the filter’s application range, has garnered substantial attention from researchers. Additionally, optimization algorithms for designing AlN-based BAW filters are outlined to reduce design time and improve efficiency. This work aims to serve as a reference for future research on AlN-based BAW filters and to provide insight for similar device studies. Full article

Strontium-barium niobate (Sr_xBa_(1−x)Nb₂O₆) films can be considered as a promising material for microwave applications due to high dielectric nonlinearity and relatively low losses. Since strontium-barium niobate has a disordered structure that determines its unique electrical properties, the identification of structural features of the Sr_xBa_(1−x)Nb₂O₆ films is the key to their successful use. The Sr_xBa_(1−x)Nb₂O₆ films were synthesized on a sapphire substrate by magnetron sputtering. The structure of the films was studied by both traditional methods of electron microscopy, X-ray diffraction, and the rarely used for thin films investigation Brillouin light scattering method, which was the focus of our study. We show that Brillouin light scattering is an excellent nondestructive method for studying the structural features of thin ferroelectric strontium-barium niobate films. An analysis of the features of the Brillouin light scattering spectra in thin-film structures and their comparison with the spectra of bulk crystals allowed us to determine with high accuracy the thickness of the films under study and their structural features determined by the resonant scattering of acoustic waves. Full article

Magnetoelectric (ME) devices combining piezoelectric and magnetostrictive materials have emerged as powerful tools to miniaturize and enhance sensing and communication technologies. This paper examines recent developments in bulk acoustic wave (BAW) and surface acoustic wave (SAW) ME devices, which demonstrate unique capabilities in ultra-sensitive magnetic sensing, compact antennas, and quantum applications. Leveraging the mechanical resonance of BAW and SAW modes, ME sensors achieve the femto- to pico-Tesla sensitivity ideal for biomedical applications, while ME antennas, operating at acoustic resonance, allow significant size reduction, with high radiation gain and efficiency, which is suited for bandwidth-restricted applications. In addition, ME non-reciprocal magnetoacoustic devices using hybrid magnetoacoustic waves present novel solutions for RF isolation, which have also shown potential for the efficient control of quantum defects, such as negatively charged nitrogen-vacancy (NV⁻) centers. Continued advancements in materials and device structures are expected to further enhance ME device performance, positioning them as key components in future bio-sensing, wireless communication, and quantum information technologies. Full article

High-performance acoustic resonators based on single-crystalline piezoelectric thin films have great potential in wireless communication applications. This paper presents the modeling, fabrication, and characterization of laterally excited bulk resonators (XBARs) utilizing the suspended ultra-thin (~420 nm) LiTaO₃ (LT, with 42° YX-cut) film. The finite element analysis (FEA) was performed to model the LT-based XBARs precisely and to gain further insight into the physical behaviors of the acoustic waves and the loss mechanisms. In addition, the temperature response of the devices was numerically calculated, showing relatively low temperature coefficients of frequency (TCF) of ~−38 ppm/K for the primary resonant mode. The LT-based XBARs were fabricated and characterized, which presents a multi-resonant mode over a wide frequency range (0.1~10 GHz). For the primary resonance around 4.1 GHz, the fabricated devices exhibited a high-quality factor (Bode-Q) ~ 600 and piezoelectric coupling (k_t²) ~ 2.84%, while the higher-harmonic showed a greater value of k_t² ~ 3.49%. To lower the resonant frequency of the resonator, the thin SiO₂ film (~20 nm) was sputtered on the suspended device, which created a frequency offset between the series and shunt resonators. Finally, a ladder-type narrow band filter employing five XBARs was developed and characterized. This work effectively demonstrates the performance and application potential of micro-acoustic resonators employing high-quality LT films. Full article

High frequency and large bandwidth are growing trends in communication radio-frequency devices. The LiNbO₃ thin film material is expected to become the preferred piezoelectric material for high coupling resonators in the 5G frequency band due to its ultra-high piezoelectric coefficient and low loss characteristics. The main mode of laterally excited bulk acoustic wave resonators (XBAR) have an ultra-high sound velocity, which enables high-frequency applications. However, the interference of spurious modes is one of the main reasons hindering the widespread application of XBAR. In this paper, a Z-cut LiNbO₃ thin film-based XBAR with arc-shaped electrodes is presented. We investigate the electric field distribution of the XBAR, while the irregular boundary of the arc-shaped electrodes affects the electric field between the existing interdigital transducers (IDTs). The mode shapes and impedance response of the XBAR with arc-shaped electrodes and the XBARs with traditional IDTs are compared in this work. The fabricated XBAR on a 350 nm Z-cut LiNbO₃ thin film with arc-shaped electrodes operating at over 5 GHz achieves a high effective electromechanical coupling coefficient of 29.8% and the spurious modes are well suppressed. This work promotes an XBAR with an optimized electrode design to further achieve the desired performance. Full article

This paper reports on a gas sensor based on two bulk acoustic wave (BAW) resonators electrically coupled with a tuneable capacitor. The weak coupling strength was tuned to its optimal value (achieving maximum sensitivity) by varying the capacitance (without complex filtering, a control circuit as required in the state of the art). A gas sensor was developed based on the electrically coupled BAW resonators by functionalizing one of the resonators with zeolitic imidazolate framework-8 (ZIF-8). It featured a quality (Q) factor of ~2.2 k in air and a resonance frequency of ~6.32 MHz. Such a simple coupling mechanism can be tuned and further extended to coupled resonators in other domains. Full article