Search Results (10)

Flow sensing is essential in biomedical engineering, industrial process control, and environmental monitoring. Conventional sensors, while accurate, are often constrained by high fabrication costs, complex processes, and limited design flexibility, restricting their use in disposable or rapidly customizable applications. This paper presents a novel ultra-low-cost airflow sensor fabricated entirely through fused deposition modeling 3D printing. The device employs a cantilever-based structure printed with PETg filament, followed by the deposition of a conductive ABS piezoresistive layer in a two-step process requiring no curing or post-processing. Experimental characterization reveals that the sensor operates in an ultra-low pressure range of 0.88–26.68 Pa, corresponding to flow velocities of 1.2–6.6 m/s. The sensor achieves a sensitivity of 967 Ω/Pa, a resolution of 9.27 Pa, and a detection limit of 83.27 Pa, with a total resistance change of approximately 51.5 kΩ. This kilo-ohm-scale response enables direct readout via a digital multimeter without requiring Wheatstone bridges or instrumentation amplifiers. The minimalist design, combined with sub-5 min fabrication time and material cost below $0.05, positions this sensor as an accessible platform for disposable, scalable, and resource-constrained flow monitoring applications in both biomedical and industrial contexts. Full article

MEMS acoustic sensors are a type of physical quantity sensor based on MEMS manufacturing technology for detecting sound waves. They utilize various sensitive structures such as thin films, cantilever beams, or cilia to collect acoustic energy, and use certain transduction principles to read out the generated strain, thereby obtaining the targeted acoustic signal’s information, such as its intensity, direction, and distribution. Due to their advantages in miniaturization, low power consumption, high precision, high consistency, high repeatability, high reliability, and ease of integration, MEMS acoustic sensors are widely applied in many areas, such as consumer electronics, industrial perception, military equipment, and health monitoring. Through different sensing mechanisms, they can be used to detect sound energy density, acoustic pressure distribution, and sound wave direction. This article focuses on piezoelectric, piezoresistive, capacitive, and optical MEMS acoustic sensors, showcasing their development in recent years, as well as innovations in their structure, process, and design methods. Then, this review compares the performance of devices with similar working principles. MEMS acoustic sensors have been increasingly widely applied in various fields, including traditional advantage areas such as microphones, stethoscopes, hydrophones, and ultrasound imaging, and cutting-edge fields such as biomedical wearable and implantable devices. Full article

A new type of self-oscillating system has been developed with the potential to expand its applications in fields such as biomedical engineering, advanced robotics, rescue operations, and military industries. This system is capable of sustaining its own motion by absorbing energy from the stable external environment without the need for an additional controller. The existing self-sustained oscillatory systems are relatively complex in structure and difficult to fabricate and control, thus limited in their implementation in practical and complex scenarios. In this paper, we creatively propose a novel light-powered liquid crystal elastomer (LCE) fiber-cantilever system that can perform self-sustained oscillation under steady illumination. Considering the well-established LCE dynamic model, beam theory, and deflection formula, the control equations for the self-oscillating system are derived to theoretically study the dynamics of self-vibration. The LCE fiber-cantilever system under steady illumination is found to exhibit two motion regimes, namely, the static and self-vibration regimes. The positive work done by the tension of the light-powered LCE fiber provides some compensation against the structural resistance from cantilever and the air damping. In addition, the influences of system parameters on self-vibration amplitude and frequency are also studied. The newly constructed light-powered LCE fiber-cantilever system in this paper has a simple structure, easy assembly/disassembly, easy preparation, and strong expandability as a one-dimensional fiber-based system. It is expected to meet the application requirements of practical complex scenarios and has important application value in fields such as autonomous robots, energy harvesters, autonomous separators, sensors, mechanical logic devices, and biomimetic design. Full article

Magnetoelectric thin-film cantilevers consisting of strain-coupled magnetostrictive and piezoelectric layers are promising candidates for magnetic field measurements in biomedical applications. In this study, we investigate magnetoelectric cantilevers that are electrically excited and operated in a special mechanical mode with resonance frequencies above 500 kHz. In this particular mode, the cantilever bends in the short axis, forming a distinctive U-shape and exhibiting high-quality factors and a promising limit of detection of 70$\mathrm{p}$$\mathrm{T}$/$\mathrm{Hz}$^1/2 at 10 $\mathrm{Hz}$. Despite this U mode, the sensors show a superimposed mechanical oscillation along the long axis. The induced local mechanical strain in the magnetostrictive layer results in magnetic domain activity. Due to this, the mechanical oscillation may cause additional magnetic noise, deteriorating the limit of detection of such sensors. We compare finite element method simulations with measurements of magnetoelectric cantilevers in order to understand the presence of oscillations. From this, we identify strategies for eliminating the external effects that affect sensor operation. Furthermore, we investigate the influence of different design parameters, in particular the cantilever length, material parameters and the type of clamping, on the amplitude of the undesired superimposed oscillations. We propose design guidelines to minimize the unwanted oscillations. Full article

The swallowing process involves complex muscle coordination mechanisms. When alterations in such mechanisms are produced by neurological conditions or diseases, a swallowing disorder known as dysphagia occurs. The instrumental evaluation of dysphagia is currently performed by invasive and experience-dependent techniques. Otherwise, non-invasive magnetic methods have proven to be suitable for various biomedical applications and might also be applicable for an objective swallowing assessment. In this pilot study, we performed a novel approach for deglutition evaluation based on active magnetic motion sensing with permanent magnet cantilever actuators. During the intake of liquids with different consistency, we recorded magnetic signals of relative movements between a stationary sensor and a body-worn actuator on the cricoid cartilage. Our results indicate the detection capability of swallowing-related movements in terms of a characteristic pattern. Consequently, the proposed technique offers the potential for dysphagia screening and biofeedback-based therapies. Full article

Non-contact mapping of magnetic fields produced by the human heart muscle requires the application of arrays of miniature and highly sensitive magnetic field sensors. In this article, we describe a MEMS technology of laminated magnetoelectric heterostructures comprising a thin piezoelectric lithium niobate single crystal and a film of magnetostrictive metglas. In the former, a ferroelectric bidomain structure is created using a technique developed by the authors. A cantilever is formed by microblasting inside the lithium niobate crystal. Metglas layers are deposited by magnetron sputtering. The quality of the metglas layers was assessed by XPS depth profiling and TEM. Detailed measurements of the magnetoelectric effect in the quasistatic and dynamic modes were performed. The magnetoelectric coefficient |α₃₂| reaches a value of 492 V/(cm·Oe) at bending resonance. The quality factor of the structure was Q = 520. The average phase amounted to 93.4° ± 2.7° for the magnetic field amplitude ranging from 12 to 100 pT. An AC magnetic field detection limit of 12 pT at a resonance frequency of 3065 Hz was achieved which exceeds by a factor of 5 the best value for magnetoelectric MEMS lead-free composites reported in the literature. The noise level of the magnetoelectric signal was 0.47 µV/Hz^1/2. Ways to improve the sensitivity of the developed sensors to the magnetic field for biomedical applications are indicated. Full article

In conventional piezoelectric ceramics, their brittle nature and containing lead are two crucial issues that significantly restrict their uses in many applications such as biomedical devices. In this work, we suggest the use of an eco-friendly piezoelectric nanocomposite material to piezoelectrically activate a cantilever meta-structure plate to be used as a novel actuator/sensor or even energy harvester; this cantilever plate is formed of several polymeric links to create an auxetic core plate that structurally shows a negative Poisson’s ratio. Moreover, the active nanocomposite materials are used as the face sheets on the auxetic plate; these active layers are made of nanowires of zinc oxide (ZnO) that are placed into an epoxy matrix in different forms of functionally graded (FG) patterns. For such active sandwich plates (ASPs) with potential electromechanical applications, a coupled electromechanical analysis has been performed to numerically investigate their natural frequencies as a crucial design parameter in such electromechanical devices. By developing a meshless method based on a higher plate theory, the effects of nanowire volume fraction, nanowire distribution, auxetic parameters, layer dimensions, and electrical terminal set-up have been studied; this in-depth study reveals that ASPs with an auxetic core have much lower natural frequencies than ASPs with honeycomb cores which would be very helpful in designing actuators or energy harvesters using the proposed cantilever sandwich plates. Full article

Smart deformable structures that integrate designing, sensing, and controlling technology have been widely applied in the fields of aerospace, robotics, and biomedical engineering due to their multi-functional requirements. The deformation reconstruction method essential for security monitoring and shape controlling, especially for the large deflection deformation, remains a challenge on accuracy and efficiency. This paper takes a wind tunnel’s fixed-flexible nozzle (FFN) plate as the research object to develop a highly accurate deformation reconstruction method based on sensing information from flexible strain sensors. The mechanical behaviors of the FFN plate with large deflection deformation, which is modeled as a cantilever beam, are studied to analyze the relationship of the strain and moment. Furthermore, the large deflection factor and shell bending theory are creatively utilized to derive and modify the strain–moment based reconstruction method (SMRM), where the contour of the FFN plate is solved by particular elliptic integrals. As a result, structural simulation based on ABAQUS further demonstrates that the reconstruction error of SMRM is 21.13% less than that of the classic Ko-based reconstruction method (KORM). An FFN prototype accompanied by customized flexible sensors is developed to evaluate the accuracy and efficiency of the SMRM, resulting in a maximum relative error of 3.97% that is acceptable for practical applications in smart deformable structures, not limited to the FFN plate. Full article

Heart related ailments are some of the most common causes for death in the world, and some of the causes are cardiac toxicity due to drugs. Several platforms have been developed in this regard over the years that can measure electrical or mechanical behavior of cardiomyocytes. In this study, we have demonstrated a biomedical device that can simultaneously measure electrophysiology and contraction force of cardiomyocytes. This dual-function device is composed of a photosensitive polymer-based cantilever, with a pair of metal-based interdigitated electrodes on its surface, such that the cantilever can measure the contraction force of cardiomyocytes and the electrodes can measure the impedance between cells and substrate. The cantilever is patterned with microgrooves so that the cardiomyocytes can align to the cantilever in order to make a higher cantilever deflection in response to contraction force. Preliminary experimental results have identified the potential for use in the drug-induced cardiac toxicity tests, and further optimization is desirable to extend the technique to various bio-sensor areas. Full article

We present and analyze a method to improve the morphology and mechanical properties of gold thin films for use in optical sensors or other settings where good adhesion of gold to a substrate is of importance and where controlled topography/roughness is key. To improve the adhesion of thermally evaporated gold thin films, we introduce a gold deposition step on SU-8 photoresist prior to UV exposure but after the pre-bake step of SU-8 processing. Shrinkage and distribution of residual stresses, which occur during cross-linking of the SU-8 polymer layer in the post-exposure baking step, are responsible for the higher adhesion of the top gold film to the post-deposition cured SU-8 sublayer. The SU-8 underlayer can also be used to tune the resulting gold film morphology. Our promoter-free protocol is easily integrated with existing sensor microfabrication processes. Full article