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Search Results (401)

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Keywords = antireflective

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21 pages, 5782 KB  
Article
Constraint-Aware Robustness and Multi-Objective Synthesis of Multi-Layer DUV Interference Coatings
by Haoran Song and Lipu Zhang
Modelling 2026, 7(3), 117; https://doi.org/10.3390/modelling7030117 (registering DOI) - 15 Jun 2026
Abstract
The evolution of 193 nm deep-ultraviolet (DUV) lithography toward high numerical aperture (NA > 1.35) presents challenges approaching physical limits for antireflective (AR) coatings on strongly curved lens elements. In this study, a full-stack multi-objective optimization framework is developed by coupling the Non-dominated [...] Read more.
The evolution of 193 nm deep-ultraviolet (DUV) lithography toward high numerical aperture (NA > 1.35) presents challenges approaching physical limits for antireflective (AR) coatings on strongly curved lens elements. In this study, a full-stack multi-objective optimization framework is developed by coupling the Non-dominated Sorting Genetic Algorithm II (NSGA-II) with the Transfer Matrix Method (TMM) to optimize a 7-layer LaF3/MgF2 system on strongly curved substrates (R=150 mm). The model integrates material dispersion, thermo-optic effects, deposition flux deviations, and manufacturing thickness constraints. Following 1500 generations of optimization and TOPSIS-based decision-making, the selected Pareto optimal solution achieves a full-aperture average reflectance of 1.3633% and a radial uniformity of 9.5037%. The design further exhibits high environmental robustness with a thermal drift of 0.0019% and a residual stress of 39.23 MPa. These results demonstrate that the proposed method overcomes the critical process bottleneck of achieving full-aperture uniformity below 10% on strongly curved optics. This framework provides a general paradigm for the robust design of next-generation ultra-precision DUV optical systems, effectively balancing theoretical depth with engineering feasibility. Full article
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23 pages, 5478 KB  
Article
Development of a Synthetic Optical Coating for Efficient UV Light Conversion and Enhanced Transmittance
by Daolong Xu, Daruo Cao, Zihan Shan and Liang Fang
Coatings 2026, 16(6), 692; https://doi.org/10.3390/coatings16060692 - 10 Jun 2026
Viewed by 145
Abstract
Photovoltaic modules require efficient sunlight modulation, including enhanced visible transmittance and conversion of unused ultraviolet light. This study develops a synthetic optical coating that achieves both functions by integrating down-conversion BAM (BaMgAl10O17:Eu2+, Mn2+) nanophosphors into [...] Read more.
Photovoltaic modules require efficient sunlight modulation, including enhanced visible transmittance and conversion of unused ultraviolet light. This study develops a synthetic optical coating that achieves both functions by integrating down-conversion BAM (BaMgAl10O17:Eu2+, Mn2+) nanophosphors into a silica anti-reflection sol. The key novelty lies in a synergistic surface engineering strategy that decouples dispersion stabilization from luminescence protection. Five dispersants are systematically compared under combined ball and sand milling. The polyester-modified acrylic long-chain dispersant (DK062) yields a stable nanodispersion with an average particle size of 228 nm and a Zeta potential of −7.61 mV, effectively suppressing re-agglomeration while retaining high photoluminescence. Subsequent surface modification with KH570 grafts a dense silane passivation layer via Si–O–M covalent bonds, further increasing the photoluminescence intensity by 1.39-fold. The optimized nanophosphors are incorporated into a commercial anti-reflection sol and dip-coated onto photovoltaic glass. At a doping concentration of 2‰ and a withdrawal speed of 8 mm/s, the resulting DCSAR coating exhibits an average transmittance of 91.16%—slightly higher than that of the pure anti-reflection coating (90.96%)—while showing strong green emission at 515 nm. Industrial on-site testing further demonstrates an average transmittance of 94.20%–94.31% with uniform green emission. This work provides a scalable route to fabricate highly transparent, light-converting anti-reflection coatings by combining dispersant-assisted milling and silane passivation. Full article
(This article belongs to the Section Composite Coatings)
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15 pages, 9720 KB  
Article
Mechanism-Guided Enhancement of Laser Damage Resistance in Sol–Gel SiO2 Coatings via CO2 Laser Conditioning
by Changtao He, Kai Liu, Zhenyu Liu, Yongkang Wu and Jinghua Han
Photonics 2026, 13(6), 562; https://doi.org/10.3390/photonics13060562 - 8 Jun 2026
Viewed by 192
Abstract
Laser-induced damage of sol–gel SiO2 antireflection coatings remains a key reliability issue in high-power laser systems because porous networks, residual hydroxyl groups, and defect-related absorption centers can trigger localized heating and stress concentration under nanosecond irradiation. In this work, continuous-wave CO2 [...] Read more.
Laser-induced damage of sol–gel SiO2 antireflection coatings remains a key reliability issue in high-power laser systems because porous networks, residual hydroxyl groups, and defect-related absorption centers can trigger localized heating and stress concentration under nanosecond irradiation. In this work, continuous-wave CO2 laser conditioning was used as a localized post-treatment method to regulate the microstructure of sol–gel SiO2 coatings on fused silica substrates. The revised manuscript clarifies the processing window, scanning parameters, laser damage testing protocol, and the sample-specific nature of the reported LIDT values. Laser conditioning induces partial densification of the porous coating, dehydration of Si-OH groups, relaxation of the Si-O-Si network, and enhancement of mechanical properties. Under the optimized conditioning condition, the surface roughness decreases from 14.08 nm to 9.76 nm, and the LIDT at 1064 nm increases from 4.8 J/cm2 to 7.0 J/cm2. The LIDT values are discussed as a relative microstructure–property comparison for the present coating system rather than as the upper technological limit of sol–gel silica coatings. Combined FTIR analysis, thermal simulation, morphology observation, and damage probability analysis indicate that the improvement originates from the combined effects of reduced defect absorption, moderated porosity, improved heat dissipation, and enhanced resistance to thermally induced cracking. The results provide a mechanism-guided strategy for using CO2 laser conditioning to tune sol–gel silica coatings while also identifying the need for further validation on higher-LIDT coatings and at application-relevant wavelengths. Full article
(This article belongs to the Special Issue Optical Thin Films: From Materials to Applications)
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16 pages, 1045 KB  
Article
Measures to Improve Wide-Bandgap Cu(In,Ga)Se2 Solar Cells by Industry-Relevant In-Line Co-Evaporation
by Wolfram Witte, Rico Gutzler, Stefan Paetel and Dimitrios Hariskos
Solar 2026, 6(3), 27; https://doi.org/10.3390/solar6030027 - 18 May 2026
Viewed by 260
Abstract
Chalcopyrite-based thin-film solar cells have great potential for various applications, such as top or bottom cells in tandem devices, in addition to their use as standard single-junction modules due to their tuneable bandgap energy. A bandgap energy Eg > 1.5 eV should [...] Read more.
Chalcopyrite-based thin-film solar cells have great potential for various applications, such as top or bottom cells in tandem devices, in addition to their use as standard single-junction modules due to their tuneable bandgap energy. A bandgap energy Eg > 1.5 eV should be targeted to realize a wide-bandgap top cell, e.g., by increasing the [Ga]/([Ga] + [In]) (GGI) ratio in Cu(In,Ga)Se2 (CIGS) cells to the range of 0.7–1. A second approach is targeting the second theoretical efficiency maximum at a little lower Eg = 1.34 eV with a GGI around 0.6 for high-efficiency single-junction applications with reduced electrical losses. An industry-relevant (Ag,Cu)(In,Ga)Se2 (ACIGS) co-evaporation process for wide-bandgap cells fabricated with GGI ratios above 0.6, with moderate [Ag]/([Ag] + [Cu]) (AAC) ratios < 0.1 and in-line RbF-PDT, was established on molybdenum-coated soda-lime glass substrates. Both measures, Ag alloying and RbF-PDT, can increase power conversion efficiency (PCE) mainly due to improved open-circuit voltage (VOC). In addition, Ag addition can increase fill factor (FF), leading to an increase in the PCE for cells with GGI > 0.6 compared to Ag-free reference cells. (Zn,Mg)O, either with a [Mg]/([Mg] + [Zn]) ratio of 0.15 or 0.25, is a good option as high-resistive layer replacing the commonly used i-ZnO in combination with a CdS buffer. Our best ACIGS wide-bandgap solar cells with RbF-PDT and Zn0.85Mg0.15O (without anti-reflective coating (ARC)) from various experimental campaigns show a PCE of 12.7% (Eg = 1.50 eV), and with a slightly reduced Eg of 1.45 eV a PCE of 15.5%, with VOC of 933 mV (VOC deficit of 517 mV), and a good FF of 73.2%. In the case when the bandgap is significantly lowered to 1.34 eV (GGI = 0.61), to the second theoretical efficiency maximum, we achieved a PCE of 18.2% with ARC for an Ag-free CIGS cell with RbF-PDT. For this cell with a CdS/i-ZnO buffer system the VOC deficit is 480 mV, and the FF is 78.1%. Full article
(This article belongs to the Section Photovoltaics)
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19 pages, 7474 KB  
Article
Effect of Picosecond Laser Diverse Scanning Strategies in Fabrication of Broadband AntiReflection Structures on Copper
by Jie Zhao, Zehao Cao, Yilongrui Chen and Zongtai He
Crystals 2026, 16(5), 296; https://doi.org/10.3390/cryst16050296 - 30 Apr 2026
Viewed by 359
Abstract
Broadband antireflective surface technology constitutes a crucial technique in optoelectronic devices, playing a key role in reducing optical losses. Ultrafast laser processing provides a flexible route for fabricating micro-nano structures on metallic surfaces because it enables efficient fabrication, high spatial resolution, and minimal [...] Read more.
Broadband antireflective surface technology constitutes a crucial technique in optoelectronic devices, playing a key role in reducing optical losses. Ultrafast laser processing provides a flexible route for fabricating micro-nano structures on metallic surfaces because it enables efficient fabrication, high spatial resolution, and minimal chemical consumption. This study uses a variable-angle scanning strategy to texture the copper surface, produce a series of antireflection arrayed micro-nano structures, and study the spectral reflectance characteristics of the copper surface. The results exhibit that 90° orthogonal scanning favors the formation of an arrayed microcone structure, which shows lower reflectance than the non-orthogonal scanning strategies in the 200–1300 nm band, with a minimum reflectance of 0.94%. The 60° and 45° cross-scanning based on the non-orthogonal strategy favors the formation of microcavity structures, and shows low reflectance in the 1300–2500 nm band, with the maximum reflectance remaining below 5%. Laser-induced periodic surface structures (LIPSS) are observed on the structures fabricated by all strategies. This work demonstrates that the scanning angle itself can be used to switch the dominant surface morphology and thereby tailor the spectral antireflection response, and lies in establishing a clear processing–structure–spectral response relationship for copper surfaces, which provides a designable route for wavelength-selective optical absorption in photothermal conversion, infrared detection, and sensing applications. Full article
(This article belongs to the Section Crystalline Metals and Alloys)
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14 pages, 2763 KB  
Article
Sol-Gel Derived Dual-Functional Organosilicone Coating for Enhanced Solar Panel Performance
by Jianping Huang, Xinyue Liu, Junjie Liu, Ling Yang, Jiang Li, Ziya Bai, Qingfei Zhao, Jinzhi Tong and Tiezheng Lv
Gels 2026, 12(4), 316; https://doi.org/10.3390/gels12040316 - 8 Apr 2026
Viewed by 550
Abstract
In this study, a non-typical luminescent organosilicone was synthesized through a click reaction and used as a cross-linker to cure hydroxyl-terminated dimethylsilicone oil at room temperature via the sol–gel process, followed by application as a coating on a glass surface. This organosilicone film [...] Read more.
In this study, a non-typical luminescent organosilicone was synthesized through a click reaction and used as a cross-linker to cure hydroxyl-terminated dimethylsilicone oil at room temperature via the sol–gel process, followed by application as a coating on a glass surface. This organosilicone film functions effectively as a luminescent down-shifting (LDS) material. Additionally, the presence of methyl groups and voids in the structure imparts a low refractive index, allowing it to serve as an anti-reflective (AR) layer. Optical and structural analyses on organosilicone-coated glass samples were conducted, and the dual-functional layer was applied to the glass cover of a perovskite solar panel to evaluate its performance. The coating not only enhanced light transmission as an AR layer but also converted UV light into blue light, which was absorbed by the solar cell. The results indicated improved solar panel performance, particularly in short-circuit current (Isc), external quantum efficiency (EQE) in the UV wavelength range, and overall efficiency. Overall, this material is a promising candidate for solar panel applications owing to maximized UV absorption for LDS, preserved transparency of the top cover glass, and room-temperature gelation, which facilitates repair of the dual-functional coating. Full article
(This article belongs to the Section Gel Analysis and Characterization)
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11 pages, 7856 KB  
Article
Compact Monolithic Star Tracker System
by Kamil Zuber, Duncan Wright, Jebum Choi, Joni Sytsma and Colin Hall
Optics 2026, 7(2), 25; https://doi.org/10.3390/opt7020025 - 30 Mar 2026
Viewed by 858
Abstract
A compact, low-cost star tracker system tailored for small satellite applications was designed and prototyped. The system was designed with a fast f/1.2 aperture, a 20 × 13° field of view, and a theoretical angular resolution of 10 arcs—sufficient for the determination of [...] Read more.
A compact, low-cost star tracker system tailored for small satellite applications was designed and prototyped. The system was designed with a fast f/1.2 aperture, a 20 × 13° field of view, and a theoretical angular resolution of 10 arcs—sufficient for the determination of attitude and orbit of a satellite. The optical design is based on a monolithic Maksutov–Cassegrain architecture, with lens assemblies fabricated from CR39 or PMMA to eliminate collimation requirements and improve vibration resistance. The lens was machined using Single-Point Diamond Turning to a precision better than λ/14. It was coated with a multilayer antireflective and highly reflective coatings applied via magnetron sputtering to reduce stray reflections and improve light throughput. The housing was produced using electron beam powder-bed fusion with Ti-64 alloy, while the use of commercial imaging sensors minimizes overall cost. Prototype testing confirmed to plate-solve star patterns with precision better than 27 arcs at 100 ms imaging time across all analysed images. Full article
(This article belongs to the Section Engineering Optics)
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11 pages, 2728 KB  
Article
Broadband Antireflective Microstructures on Diamond Fabricated by Femtosecond Laser and Selective Wet Etching
by Linbo He, Jing Cao, Wenhai Gao, Yang Liao, Yan Xue, Cong Chen, Ke Liu, Xupeng Yuan, Jijun Feng, Huiyu Chen and Yuxin Leng
Optics 2026, 7(2), 24; https://doi.org/10.3390/opt7020024 - 27 Mar 2026
Viewed by 1051
Abstract
Diamond antireflection techniques are of high interest for optical windows operating at extreme conditions. Herein, diamond antireflective microstructures in mid-infrared (MIR) spectral range were theoretically designed and experimentally fabricated. Finite difference time domain (FDTD) simulations were used to optimize the transmission performance of [...] Read more.
Diamond antireflection techniques are of high interest for optical windows operating at extreme conditions. Herein, diamond antireflective microstructures in mid-infrared (MIR) spectral range were theoretically designed and experimentally fabricated. Finite difference time domain (FDTD) simulations were used to optimize the transmission performance of the diamond microstructures. Based on the simulation results, the optimized microstructures were fabricated by femtosecond (fs) laser direct writing (1030 nm, 300 fs, 25 kHz) followed by wet etching. After wet etching, the laser-modified zones and the accumulated graphitized clusters were effectively removed, thereby achieving the desired depth. The influences of laser power and scanning strategy on the morphology evolution of diamond microstructures were investigated. It was found that at the optimal conditions, the transmittance of the diamond increased from 70.9% to 81.4% (single-side) over a broad spectrum from 8 to 22 μm. This work demonstrates a promising hybrid fs laser/wet etching technique for diamond antireflective microstructures in MIR spectral range. Full article
(This article belongs to the Section Laser Sciences and Technology)
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17 pages, 9582 KB  
Article
Fabrication of Wear-Resistant and Anti-Reflection Surfaces Based on Armor-Protected Nanocone Structures
by Haoyu Tian, Jianxun Chen, Jiaheng Bi, Haotian Guo, Cheng Lei and Ruirui Li
Micromachines 2026, 17(3), 360; https://doi.org/10.3390/mi17030360 - 15 Mar 2026
Viewed by 585
Abstract
Antireflection surfaces play an indispensable role in modern optics, with extensive applications covering optical windows and other precision optical components. The fabrication of anti-reflection surfaces frequently relies on micro/nano-structuring technologies. However, the fabricated micro/nanostructures typically experience performance degradation in transmission enhancement caused by [...] Read more.
Antireflection surfaces play an indispensable role in modern optics, with extensive applications covering optical windows and other precision optical components. The fabrication of anti-reflection surfaces frequently relies on micro/nano-structuring technologies. However, the fabricated micro/nanostructures typically experience performance degradation in transmission enhancement caused by abrasion during operation. To address this problem, we designed and fabricated a double-sided nanocone structure shielded by a protective armor layer. This armor layer efficiently prevents surface mechanical wear and preserves the nanocone structures, leading to almost constant transmittance of the anti-reflection surface even after abrasion. The anti-reflection surface was fabricated by first patterning a square grid armor on one side of fused silica via photolithography, followed by the preparation of an etching mask and nanocone structures using reactive ion etching (RIE). Nanocones were then fabricated on the opposite side of the substrate, finally forming the double-sided nanocone structure. The fabricated armor-protected double-sided nanocone structure exhibited an increase in the average transmittance from 93.43% to 98.31% within the wavelength range of 800–1200 nm. After abrasion testing under 10 MPa pressure, the nanocones under the protective armor showed almost no damage, and the average transmittance remained at approximately 97.85%, demonstrating the outstanding mechanical robustness of the proposed design. Full article
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16 pages, 16666 KB  
Article
Study on Optical and Mechanical Properties of SiOxNy Films
by Boyang Wei, Zhiying Liu, Xiuhua Fu, Ben Wang and Suotao Dong
Coatings 2026, 16(3), 360; https://doi.org/10.3390/coatings16030360 - 13 Mar 2026
Viewed by 508
Abstract
The suppression of residual reflectivity in optical elements has become a hot research topic as it addresses the degradation of optical system imaging quality caused by stray light. Antireflective coatings on the outer surface of window glasses require low reflectivity, high hardness, and [...] Read more.
The suppression of residual reflectivity in optical elements has become a hot research topic as it addresses the degradation of optical system imaging quality caused by stray light. Antireflective coatings on the outer surface of window glasses require low reflectivity, high hardness, and resistance to mechanical wear. This study investigates the role of reactive gas stoichiometry in tailoring the structure and performance of SiOxNy antireflection (AR) coatings deposited on GG7i glass via capacitively coupled radio-frequency magnetron sputtering. First, the influence of three N2/O2 flow ratios on the optical and mechanical properties of SiOxNy films discussed under identical process parameters. Results show that the refractive index, hardness, and surface roughness of the SiOxNy films increase with increasing N2/O2 ratio and that the stress of the SiOxNy films increases according to the Stoney formula. The wear resistance of the SiOxNy films combined with an antifingerprint (AF) coating is tested using steel wool. Experimental results show that the water contact angle of the AF decreases with increasing surface roughness of the film. Finally, on the basis of a comprehensive evaluation of optical and mechanical properties, the antireflection coating on the outer surface of the window glass was prepared by optimizing the process parameters. At 0° incidence, the average reflectivity from 420 to 680 nm is <1%, the maximum value is <1.2%, the surface hardness is 17.2 GPa, and the water contact angle is 100° after the steel wool wear test, showing its suitability for durable antifingerprint applications. This work provides a strategic pathway for designing high-performance optical coatings with tailored mechanical robustness. Full article
(This article belongs to the Section Thin Films)
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14 pages, 793 KB  
Article
Printing Hybrid, Interdigitated Back-Contact Solar Cells
by Guancheng Li, David Angel Trujillo and Robert L. Opila
Materials 2026, 19(5), 985; https://doi.org/10.3390/ma19050985 - 4 Mar 2026
Viewed by 660
Abstract
Interdigitated back-contact solar cells were fabricated entirely with inkjet printing. poly(3,4-ethylenedioxythiophene):polystyrene sulfonate (PEDOT:PSS), TiO2, and metal lines were printed on a textured silicon substrate with only one inkjet printer. No vacuum deposition or diffusion of a back surface field is needed [...] Read more.
Interdigitated back-contact solar cells were fabricated entirely with inkjet printing. poly(3,4-ethylenedioxythiophene):polystyrene sulfonate (PEDOT:PSS), TiO2, and metal lines were printed on a textured silicon substrate with only one inkjet printer. No vacuum deposition or diffusion of a back surface field is needed for the printed IBC solar cell. Adding co-solvent to the PEDOT:PSS and passivation of the Si surface significantly reduced the losses and enhanced the short-circuit current, Jsc, and, as a result, improved the fill factor and efficiency of the devices. The thickness of the PEDOT:PSS layer is approximately half a micrometer measured by profilometer, which is thicker than the optimal range typically reported; there is still a best short-circuit current, Jsc, of 19.2 mA/cm2. To further improve the performance of the devices, an anti-reflective coating on the front side is required. Also, an improved metal contact ink is needed to improve the contact resistance between the PEDOT:PSS layer and the metal contact. The initial performance of all printed cells are compared to conventionally fabricated devices. Full article
(This article belongs to the Special Issue Microstructures and Coatings for Advanced Optoelectronic Materials)
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14 pages, 6083 KB  
Article
Accurate Inverse Design of Broadband Solar Metamaterial Absorbers via Joint Forward–Inverse Deep Learning
by Qihang Wu, Zhiming Deng, Cong Zeng and Haoyuan Cai
Nanomaterials 2026, 16(5), 297; https://doi.org/10.3390/nano16050297 - 26 Feb 2026
Viewed by 731
Abstract
The design of broadband, high-efficiency solar absorbers remains challenging due to the complex and ill-posed inverse mapping from the target optical responses to the physical structures in inverse design optimization. To address this, we propose a joint forward–inverse deep learning framework that enables [...] Read more.
The design of broadband, high-efficiency solar absorbers remains challenging due to the complex and ill-posed inverse mapping from the target optical responses to the physical structures in inverse design optimization. To address this, we propose a joint forward–inverse deep learning framework that enables the rapid and accurate optimization of multilayer metamaterial absorbers. This method integrates an inverse network based on a Modified Swin Transformer with a Multilayer Perceptron forward proxy and performs end-to-end training in a consistency-driven cycle. This strategy reduces the one-to-many ambiguity in inverse design and improves the prediction accuracy, with normalized test mean squared errors of 7.2 × 10−5 (inverse) and 6.8 × 10−5 (forward). Using this framework, we optimized an absorber comprising W/SiO2 hyperbolic metamaterial stacks and TiO2/SiO2 anti-reflection coatings, achieving 97.4% average absorptivity across the 400–1750 nm solar spectrum, along with polarization insensitivity and robust wide-angle performance up to 60° incidence. The outdoor solar heating tests showed that the fabricated absorber reaches a peak temperature of 86.3 °C under natural sunlight, with an irradiance peak of about 850 W/m2 at noon. This work shows that combining forward and reverse deep learning provides a powerful and scalable paradigm for accelerating the intelligent design of high-performance solar thermal metamaterials. Full article
(This article belongs to the Section Nanoelectronics, Nanosensors and Devices)
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10 pages, 2511 KB  
Article
Interfacial Characteristics of HgCdTe Infrared Detectors Grown on Alternative Substrates
by Yuanyuan Li, Qingjun Liao, Huihao Li, Jindong Wang, Hao Wu, Zhenhua Ye, Xiaoning Hu and Chun Lin
Sensors 2026, 26(4), 1132; https://doi.org/10.3390/s26041132 - 10 Feb 2026
Viewed by 530
Abstract
To overcome the limitations of CdZnTe substrates for large-format, low-cost HgCdTe infrared focal plane arrays (IRFPAs), the epitaxial growth of HgCdTe films on alternative substrates (e.g., GaAs and Si) has become an important research focus. The lattice mismatch of approximately 14% between the [...] Read more.
To overcome the limitations of CdZnTe substrates for large-format, low-cost HgCdTe infrared focal plane arrays (IRFPAs), the epitaxial growth of HgCdTe films on alternative substrates (e.g., GaAs and Si) has become an important research focus. The lattice mismatch of approximately 14% between the GaAs alternative substrate and the HgCdTe material generates a high density of interfacial defects, such as dislocations and twins. These defects induce a high density of interface states within the near-interface bandgap, resulting in interfacial recombination and consequently limiting device performance. This paper proposes an optimization method for the HgCdTe/GaAs interface that involves substrate removal and surface passivation after the fabrication of GaAs-based HgCdTe infrared (IR) detectors. The GaAs substrate was removed without damage through chemical mechanical polishing (CMP) and selective wet chemical etching. A bromine-based solution (Br2–HBr) was employed to eliminate the surface damage layer for interfacial optimization, and a composite dielectric film was deposited to achieve simultaneous surface passivation and optical antireflection. Experimental results on n-on-p devices operating at 80 K demonstrate that after interfacial optimization, the average quantum efficiency across the 3.5–6.1 μm wavelength range increased from 58% to 84% and the blackbody responsivity improved from 8.7 × 106 V/W to 1.6 × 107 V/W. Both quantum efficiency and blackbody responsivity reached levels comparable to those of CdZnTe-based detectors. Numerical fitting based on the carrier diffusion model indicated that interfacial optimization reduced the surface potential by approximately two orders of magnitude, effectively suppressing interfacial recombination. Full article
(This article belongs to the Section Electronic Sensors)
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15 pages, 2380 KB  
Article
Zernike Correction and Multi-Objective Optimization of Multi-Layer Dual-Scale Nano-Coupled Anti-Reflective Coatings
by Liang Hong, Haoran Song, Lipu Zhang and Xinyu Wang
Modelling 2026, 7(1), 29; https://doi.org/10.3390/modelling7010029 - 30 Jan 2026
Viewed by 619
Abstract
In high-precision optical systems such as laser optics, astronomical observation, and semiconductor lithography, anti-reflection coatings are crucial for light transmittance, imaging quality, and stability, but traditional designs face modeling challenges in balancing ultralow reflectivity, high wavefront quality, and manufacturability amid multi-dimensional parameter coupling [...] Read more.
In high-precision optical systems such as laser optics, astronomical observation, and semiconductor lithography, anti-reflection coatings are crucial for light transmittance, imaging quality, and stability, but traditional designs face modeling challenges in balancing ultralow reflectivity, high wavefront quality, and manufacturability amid multi-dimensional parameter coupling and multi-objective constraints. This study addresses these by proposing a unified mathematical modeling framework integrating a Symmetric five-layer high-low refractive index alternating structure (V-H-V-H-V) with dual-scale nanostructures, employing a constrained quasi-Newton optimization algorithm (L-BFGS-B) to minimize reflectivity, wavefront root-mean-square (RMS) error, and surface roughness root-mean-square (RMS) in a six-dimensional parameter space. The Sellmeier equation is adopted to calculate wavelength-dependent material refractive indices, the model uses the transfer matrix method for the Symmetric five-layer high-low refractive index alternating structure’s reflectivity, incorporates nano-surface height function gradient correction, sub-wavelength modulation, and radial optimization, applies Zernike polynomials for low-order aberration correction, quantifies surface roughness via curvature proxies, and optimizes via a weighted objective function prioritizing low reflectivity. Numerical results show the spatial average reflectivity at 632.8 nm reduced to 0.13%, the weighted average reflectivity across five representative wavelengths in the 550–720 nm range to 0.037%, the reflectivity uniformity to 10.7%, the post-correction wavefront RMS to 11.6 milliwavelengths, and the surface height standard deviation to 7.7 nm. This framework enhances design accuracy and efficiency, suits UV nanoimprinting and electron beam evaporation, and offers significant value for high-power lasers, lithography, and space-borne radars. Full article
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20 pages, 4040 KB  
Article
Broadband Sub-Micron Moth-Eye Anti-Reflection Coatings on Silicon for Wafer-Level CMOS–SOI–MEMS Thermal Infrared Sensors
by Moshe Avraham and Yael Nemirovsky
Micromachines 2026, 17(2), 170; https://doi.org/10.3390/mi17020170 - 28 Jan 2026
Viewed by 1488
Abstract
Silicon windows in wafer-level packaged LWIR sensors suffer ~30% Fresnel reflection per interface, limiting optical throughput and detector sensitivity. We present an end-to-end design, fabrication, and validation framework for CMOS-compatible moth-eye anti-reflection coatings patterned directly on silicon wafers. Our approach integrates the effective [...] Read more.
Silicon windows in wafer-level packaged LWIR sensors suffer ~30% Fresnel reflection per interface, limiting optical throughput and detector sensitivity. We present an end-to-end design, fabrication, and validation framework for CMOS-compatible moth-eye anti-reflection coatings patterned directly on silicon wafers. Our approach integrates the effective medium theory, a transfer matrix analysis, full-wave FDTD simulations, and experimental Fourier-transform infrared (FTIR) measurements to optimize subwavelength pillar arrays for broadband (8–14 μm) and angle-tolerant performance. Fabricated structures demonstrate a 46.7% responsivity boost in CMOS–SOI–MEMS thermal sensors compared to bare silicon windows, while simulations predict up to 85.1% transmission and 57.1% responsivity enhancement for double-sided patterning. These results establish moth-eye metasurfaces as a scalable, CMOS-compatible solution for next-generation wafer-level processing and packaging infrared sensing platforms, transforming optical improvements into measurable electrical performance gains. The contribution of this work is the end-to-end framework for designing moth-eye wafer level processing and packaging for “real-life” CMOS-compatible infrared sensors manufacturing. Full article
(This article belongs to the Section D1: Semiconductor Devices)
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