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Keywords = GaN-on-diamond

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15 pages, 2521 KiB  
Article
Interface-Driven Electrothermal Degradation in GaN-on-Diamond High Electron Mobility Transistors
by Huanran Wang, Yifan Liu, Xiangming Dong, Abid Ullah, Jisheng Sun, Chuang Zhang, Yucheng Xiong, Peng Gu, Ge Chen and Xiangjun Liu
Nanomaterials 2025, 15(14), 1114; https://doi.org/10.3390/nano15141114 - 18 Jul 2025
Viewed by 315
Abstract
Diamond is an attractive substrate candidate for GaN high-electron-mobility transistors (HEMT) to enhance heat dissipation due to its exceptional thermal conductivity. However, the thermal boundary resistance (TBR) at the GaN–diamond interface poses a significant bottleneck to heat transport, exacerbating self-heating and limiting device [...] Read more.
Diamond is an attractive substrate candidate for GaN high-electron-mobility transistors (HEMT) to enhance heat dissipation due to its exceptional thermal conductivity. However, the thermal boundary resistance (TBR) at the GaN–diamond interface poses a significant bottleneck to heat transport, exacerbating self-heating and limiting device performance. In this work, TCAD simulations were employed to systematically investigate the effects of thermal boundary layer (TBL) thickness (dTBL) and thermal conductivity (κTBL) on the electrothermal behavior of GaN-on-diamond HEMTs. Results show that increasing the TBL thickness (5–20 nm) or decreasing its thermal conductivity (0.1–1.0 W/(m·K)) leads to elevated hotspot temperatures and degraded electron mobility, resulting in a notable deterioration of IV characteristics. The nonlinear dependence of device performance on κTBL is attributed to Fourier’s law, where heat flux is inversely proportional to thermal resistance. Furthermore, the co-analysis of substrate thermal conductivity and interfacial quality reveals that interface TBR has a more dominant impact on device behavior than substrate conductivity. Remarkably, devices with low thermal conductivity substrates and optimized interfaces can outperform those with high-conductivity substrates but poor interfacial conditions. These findings underscore the critical importance of interface engineering in thermal management of GaN–diamond HEMTs and provide a theoretical foundation for future work on phonon transport and defect-controlled thermal interfaces. Full article
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16 pages, 10738 KiB  
Article
Field Emission Current Stability and Noise Generation Mechanism of Large Aspect Ratio Diamond Nanowires
by Yang Wang and Jinwen Zhang
Sensors 2025, 25(9), 2925; https://doi.org/10.3390/s25092925 - 6 May 2025
Viewed by 633
Abstract
This paper reports the field emission (FE) current stability of a diamond nanowire (DNW) array. Assembled with a silicon anode with a 1.03 μm gap, the FE properties, as well as the current stability of the DNW cathode, were systematically evaluated in a [...] Read more.
This paper reports the field emission (FE) current stability of a diamond nanowire (DNW) array. Assembled with a silicon anode with a 1.03 μm gap, the FE properties, as well as the current stability of the DNW cathode, were systematically evaluated in a vacuum test system under different vacuum degrees, current densities, and atmospheres. Experiments demonstrate that lower pressure and current density can improve FE properties and current stability. In addition, compared to air and compressed air, DNWs exhibit higher FE properties and current stability in N2. DNWs achieve a remarkably low turn-on field of 1.65 V/μm and a high current density of 265.38 mA/cm2. Notably, they demonstrate merely 0.70% current fluctuation under test conditions of 1.2 × 10−4 Pa and 0.1 mA/cm2. Additionally, based on the Fowler–Nordheim theory, the change in work function after gas adsorption was analyzed, and the noise generation mechanism was derived from the noise power spectrum. The current exponent is determined as 1.94, while the frequency exponent ranges from 0.92 to 1.32, confirming that the dominant noise mechanism in DNWs arises from surface work function fluctuations due to the adsorption and desorption of residual gas. Full article
(This article belongs to the Section Physical Sensors)
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17 pages, 20014 KiB  
Article
Molecular Dynamics Study of Nanoscratching Behavior of Water-Film-Covered GaN (0001) Surface Using Spherical Diamond Abrasive
by Jiaqin Yin, Shuaicheng Feng, Yang Liu and Jian Guo
Crystals 2025, 15(5), 428; https://doi.org/10.3390/cryst15050428 - 30 Apr 2025
Viewed by 345
Abstract
Molecular dynamics (MD) simulation of nanoscratching with a spherical diamond abrasive was performed to investigate the role of water molecular film on the surface nanotribological characteristics and subsurface lattice damage of GaN (0001) at the atomic level. The simulation results indicate that the [...] Read more.
Molecular dynamics (MD) simulation of nanoscratching with a spherical diamond abrasive was performed to investigate the role of water molecular film on the surface nanotribological characteristics and subsurface lattice damage of GaN (0001) at the atomic level. The simulation results indicate that the tangential and normal forces exhibited no significant variation trend with the increase in water film thickness. Inducing a water film can alleviate the material pile-up during scratching, and the GaN surface obtained the lowest friction coefficient and wear volume when the water film thickness reached 3 nm, primarily due to the enhanced lubrication and the heat absorption by the water film in this case. Water-film-covered GaN exhibited a thinner subsurface damage layer than the bare GaN, and the damage layer thickness decreased with the increase in water film thickness for various scratching depths of 1 to 4 nm. For each scratching depth, there was an optimal water film thickness causing the minimum number of amorphization atoms. Nevertheless, the water film failed to inhibit the formation and propagation of dislocations in the scratching process, and water-film-covered GaN exhibited more dislocations than the bare one. This research has the potential to expand the comprehension of water-mediated nanotribology and the ultra-precision machining procedures of GaN. Full article
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16 pages, 2854 KiB  
Article
Optimal Selection and Experimental Verification of Wide-Bandgap Semiconductor for Betavoltaic Battery
by Jiachen Zhang, Kunlun Lv, Yuan Yin, Yuqian Gao, Ye Tian, Yuncheng Han and Jun Tang
Nanomaterials 2025, 15(9), 635; https://doi.org/10.3390/nano15090635 - 22 Apr 2025
Cited by 1 | Viewed by 2545
Abstract
Wide-bandgap semiconductor betavoltaic batteries have a promising prospect in Micro-Electro-Mechanical Systems for high power density and long working life, but their material selection is still controversial. Specifically, the silicon carbide (SiC) betavoltaic battery was reported to have higher efficiency, although its bandgap is [...] Read more.
Wide-bandgap semiconductor betavoltaic batteries have a promising prospect in Micro-Electro-Mechanical Systems for high power density and long working life, but their material selection is still controversial. Specifically, the silicon carbide (SiC) betavoltaic battery was reported to have higher efficiency, although its bandgap is lower than that of gallium nitride (GaN) or diamond, which is inconsistent with general assumptions. In this work, the effects of different semiconductor characteristics on the battery energy conversion process are systematically analyzed to explain this phenomenon, including beta particle energy deposition, electron–hole pair (EHP) creation energy and EHPs collection efficiency. Device efficiencies of the betavoltaic battery using SiC, GaN, diamond, gallium oxide (Ga2O3), aluminum nitride (AlN) and boron nitride (BN) are compared to determine the optimum semiconductor. Results show that SiC for the betavoltaic battery has higher efficiency than GaN, Ga2O3 and AlN because of higher EHPs collection efficiency, less energy loss and fewer material defects, which is the optimal selection currently. SiC betavoltaic batteries were prepared, with the device efficiency having reached 14.88% under an electron beam, and the device efficiency recorded as 7.31% under an isotope source, which are consistent with the predicted results. This work provides a theoretical and experimental foundation for the material selection of betavoltaic batteries. Full article
(This article belongs to the Section Theory and Simulation of Nanostructures)
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11 pages, 4995 KiB  
Article
Numerical Investigation on Electrothermal Performance of AlGaN/GaN HEMTs with Nanocrystalline Diamond/SiNx Trench Dual-Passivation Layers
by Peiran Wang, Chenkai Deng, Chuying Tang, Xinyi Tang, Wenchuan Tao, Ziyang Wang, Nick Tao, Qi Wang, Qing Wang and Hongyu Yu
Nanomaterials 2025, 15(8), 574; https://doi.org/10.3390/nano15080574 - 10 Apr 2025
Viewed by 419
Abstract
In this work, AlGaN/GaN high-electron-mobility transistors (HEMTs) with a nanocrystalline diamond (NCD)/SiNx trench dual-passivated (TDP) structure were promoted, which demonstrated superior performance with a higher saturation output current (Idss) of 1.266 A/mm, a higher maximum transconductance (Gmmax [...] Read more.
In this work, AlGaN/GaN high-electron-mobility transistors (HEMTs) with a nanocrystalline diamond (NCD)/SiNx trench dual-passivated (TDP) structure were promoted, which demonstrated superior performance with a higher saturation output current (Idss) of 1.266 A/mm, a higher maximum transconductance (Gmmax) of 0.329 S/mm, and a lower resistance (Ron) of 2.64 Ω·mm. Thermal simulations revealed a peak junction temperature of 386.36 K for TDP devices under Vds/Vgs = 30 V/0 V, representing 13.7% and 4.5% reductions versus SiNx single-passivated (SP, 447.59 K) and dual-passivated (DP, 404.58 K) devices, respectively. The results suggested that compared to conventional SP and DP devices, TDP devices can effectively suppress the self-heating effect, thereby improving output characteristics while maintaining superior RF small-signal characteristics. Moreover, the results of numerical simulations indicated that the enhanced electrothermal performance of TDP devices was predominantly attributed to the mitigation of temperature-induced degradation in electron mobility and drift velocity, thereby preserving their high power and high frequency capabilities. These results highlighted the significant potential of TDP devices to improve the performance of GaN HEMTs in high-power and high-frequency applications. Full article
(This article belongs to the Section Nanoelectronics, Nanosensors and Devices)
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12 pages, 5489 KiB  
Article
Preparation and Characterization of GaN-on-Si HEMTs with Nanocrystalline Diamond Passivation
by Yu Fu, Songyuan Song, Zeyang Ren, Liaoliang Zhu, Jinfeng Zhang, Kai Su, Junfei Chen, Tao Zhang, Weidong Zhu, Junpeng Li, Weidong Man, Yue Hao and Jincheng Zhang
Crystals 2025, 15(3), 242; https://doi.org/10.3390/cryst15030242 - 28 Feb 2025
Viewed by 915
Abstract
Thermal accumulation under high output power densities is one of the most significant challenges for GaN power devices. Diamond, with its ultra-high thermal conductivity, offers great potential for improving heat dissipation in high-power GaN devices. In this study, nanocrystalline diamond (NCD) passivated high-electron [...] Read more.
Thermal accumulation under high output power densities is one of the most significant challenges for GaN power devices. Diamond, with its ultra-high thermal conductivity, offers great potential for improving heat dissipation in high-power GaN devices. In this study, nanocrystalline diamond (NCD) passivated high-electron mobility transistors (HEMTs) based on AlGaN/GaN-on-Si heterostructures were fabricated with a gate length of 2 μm. The NCD film has a thickness of 250–383 nm and a uniform morphology with a grain size of mostly ~240 nm. Compared to the devices without NCD passivation, those devices with the NCD passivation layer show an increase in current density from 447 mA/mm to 555 mA/mm, a reduction in on-resistance from 20 Ω·mm to 13 Ω·mm, and a noticeable suppression of current degradation at high-drain voltages. Junction temperature measurements under varied output power densities reveal a 36% improvement in heat dissipation efficiency with the NCD passivation. These results fully demonstrate the promising potential of NCD for enhancing heat dissipation in high-power GaN devices. Full article
(This article belongs to the Special Issue Advances in Diamond Crystals and Devices)
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24 pages, 6808 KiB  
Article
Single-Particle Radiation Sensitivity of Ultrawide-Bandgap Semiconductors to Terrestrial Atmospheric Neutrons
by Daniela Munteanu and Jean-Luc Autran
Crystals 2025, 15(2), 186; https://doi.org/10.3390/cryst15020186 - 15 Feb 2025
Viewed by 558
Abstract
Semiconductors characterized by ultrawide bandgaps (UWBGs), exceeding the SiC bandgap of 3.2 eV and the GaN bandgap of 3.4 eV, are currently under focus for applications in high-power and radio-frequency (RF) electronics, as well as in deep-ultraviolet optoelectronics and extreme environmental conditions. These [...] Read more.
Semiconductors characterized by ultrawide bandgaps (UWBGs), exceeding the SiC bandgap of 3.2 eV and the GaN bandgap of 3.4 eV, are currently under focus for applications in high-power and radio-frequency (RF) electronics, as well as in deep-ultraviolet optoelectronics and extreme environmental conditions. These semiconductors offer numerous advantages, such as a high breakdown field, exceptional thermal stability, and minimized power losses. This study used numerical simulation to investigate, at the material level, the single-particle radiation response of various UWBG semiconductors, such as aluminum gallium nitride alloys (AlxGa1−xN), diamond, and β-phase gallium oxide (β-Ga2O3), when exposed to ground-level neutrons. Through comprehensive Geant4 simulations covering the entire spectrum of atmospheric neutrons at sea level, this study provides an accurate comparison of the neutron radiation responses of these UWBG semiconductors focusing on the interaction processes, the number and nature of secondary ionizing products, their energy distributions, and the production of electron–hole pairs at the origin of single-event effects (SEEs) in microelectronics devices. Full article
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23 pages, 14056 KiB  
Communication
Study on the Electro-Fenton Chemomechanical Removal Behavior in Single-Crystal GaN Pin–Disk Friction Wear Experiments
by Yangting Ou, Zhuoshan Shen, Juze Xie and Jisheng Pan
Micromachines 2025, 16(2), 210; https://doi.org/10.3390/mi16020210 - 12 Feb 2025
Viewed by 776
Abstract
Electro-Fenton chemical mechanical polishing primarily regulates the generation of hydroxyl radicals (·OH) via the Fenton reaction through an applied electric field, which subsequently influences the formation and removal of the oxide layer on the workpiece surface, thereby impacting the overall polishing quality and [...] Read more.
Electro-Fenton chemical mechanical polishing primarily regulates the generation of hydroxyl radicals (·OH) via the Fenton reaction through an applied electric field, which subsequently influences the formation and removal of the oxide layer on the workpiece surface, thereby impacting the overall polishing quality and rate. This study employs Pin–Disk friction and wear experiments to investigate the material removal behavior of single-crystal GaN during electro-Fenton chemical mechanical polishing. Utilizing a range of analytical techniques, including coefficient of friction (COF) curves, surface morphology assessments, cross-sectional analysis, and power spectral density (PSD) measurements on the workpiece surface, we examine the influence of abrasives, polishing pads, polishing pressure, and other parameters on the electro-Fenton chemical–mechanical material removal process. Furthermore, this research provides preliminary insights into the synergistic removal mechanisms associated with the electro-Fenton chemical–mechanical action in single-crystal GaN. The experimental results indicate that optimal mechanical removal occurs when using a W0.5 diamond at a concentration of 1.5 wt% combined with a urethane pad (SH-Q13K-600) under a pressure of 0.2242 MPa. Full article
(This article belongs to the Special Issue MEMS Nano/Micro Fabrication, 2nd Edition)
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31 pages, 9339 KiB  
Review
Photoconductive Semiconductor Switches: Materials, Physics, and Applications
by Vincent Meyers, Lars Voss, Jack D. Flicker, Luciano Garcia Rodriguez, Harold P. Hjalmarson, Jane Lehr, Nicolas Gonzalez, Gregory Pickrell, Soroush Ghandiparsi and Robert Kaplar
Appl. Sci. 2025, 15(2), 645; https://doi.org/10.3390/app15020645 - 10 Jan 2025
Cited by 2 | Viewed by 2499
Abstract
Photoconductive semiconductor switching (PCSS) devices have unique characteristics to address the growing need for electrically isolated, optically gated, picosecond-scale jitter devices capable of operating at high voltage, current, and frequency. The state of the art in material selection, doping, triggering, and system integration [...] Read more.
Photoconductive semiconductor switching (PCSS) devices have unique characteristics to address the growing need for electrically isolated, optically gated, picosecond-scale jitter devices capable of operating at high voltage, current, and frequency. The state of the art in material selection, doping, triggering, and system integration in PCSSs is presented. The material properties and doping considerations of GaN, GaAs, SiC, diamond, and β-Ga2O3 in the fabrication of PCSS devices are discussed. A review of the current understanding of the physics of the high-gain mode known as lock-on is presented. Full article
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9 pages, 2296 KiB  
Article
Improvement of the Thermal Performance of the GaN-on-Si Microwave High-Electron-Mobility Transistors by Introducing a GaN-on-Insulator Structure
by Lu Hao, Zhihong Liu, Hanghai Du, Shenglei Zhao, Han Wang, Jincheng Zhang and Yue Hao
Micromachines 2024, 15(12), 1525; https://doi.org/10.3390/mi15121525 - 21 Dec 2024
Viewed by 1702
Abstract
GaN-on-Si high-electron-mobility transistors have emerged as the next generation of high-powered and cost-effective microwave devices; however, the limited thermal conductivity of the Si substrate prevents the realization of their potential. In this paper, a GaN-on-insulator (GNOI) structure is proposed to enhance the heat [...] Read more.
GaN-on-Si high-electron-mobility transistors have emerged as the next generation of high-powered and cost-effective microwave devices; however, the limited thermal conductivity of the Si substrate prevents the realization of their potential. In this paper, a GaN-on-insulator (GNOI) structure is proposed to enhance the heat dissipation ability of a GaN-on-Si HEMT. Electrothermal simulation was carried out to analyze the thermal performance of the GNOI-on-Si HEMTs with different insulator dielectrics, including SiO2, SiC, AlN, and diamond. The thermal resistance of the HEMTs was found to be able to be obviously reduced and the DC performance of the device can be obviously improved by removing the low-thermal-conductivity III-nitride transition layer and forming a GNOI-on-Si structure with SiC, AlN, or diamond as the bonding insulator dielectrics. Full article
(This article belongs to the Section D1: Semiconductor Devices)
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15 pages, 3034 KiB  
Article
Polycrystalline Diamond Film Growth on Gallium Nitride with Low Boundary Thermal Resistance
by Ying Wang, Jiahao Yao, Yong Yang, Qian Fan, Xianfeng Ni and Xing Gu
Coatings 2024, 14(11), 1457; https://doi.org/10.3390/coatings14111457 - 15 Nov 2024
Cited by 1 | Viewed by 1519
Abstract
As the demand for high-frequency and high-power electronic devices has increased, gallium nitride (GaN), particularly in the context of high-electron mobility transistors (HEMTs), has attracted considerable attention. However, the ‘self-heating effect’ of GaN HEMTs represents a significant limitation regarding both performance and reliability. [...] Read more.
As the demand for high-frequency and high-power electronic devices has increased, gallium nitride (GaN), particularly in the context of high-electron mobility transistors (HEMTs), has attracted considerable attention. However, the ‘self-heating effect’ of GaN HEMTs represents a significant limitation regarding both performance and reliability. Diamond, renowned for its exceptional thermal conductivity, represents an optimal material for thermal management in HEMTs. This paper proposes a novel method for directly depositing diamond films onto N-polar GaN (NP-GaN) epitaxial layers. This eliminates the complexities of the traditional diamond growth process and the need for temporary substrate steps. Given the relative lag in the development of N-polar material growth technologies, which are marked by surface roughness issues, and the recognition that the thermal boundary resistance (TBRGaN/diamond) represents a critical factor constraining efficient heat transfer, our study has introduced a series of optimizations to enhance the quality of the diamond nucleation layer while ensuring that the integrity of the GaN buffer layer remains intact. Moreover, chemical mechanical polishing (CMP) technology was employed to effectively reduce the surface roughness of the NP-GaN base, thereby providing a more favorable foundation for diamond growth. The optimization trends observed in the thermal performance test results are encouraging. Integrating diamond films onto highly smooth NP-GaN epitaxial layers demonstrates a reduction in TBRGaN/diamond compared to that of diamond layers deposited onto NP-GaN with higher surface roughness that had undergone no prior process treatment. Full article
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14 pages, 9087 KiB  
Article
The Influence of Annealing Temperature on the Interfacial Heat Transfer in Pulsed Laser Deposition-Grown Ga2O3 on Diamond Composite Substrates
by Lin Gu, Yi Shen, Wenjie Chen, Yuanhui Zuo, Hongping Ma and Qingchun Zhang
C 2024, 10(3), 80; https://doi.org/10.3390/c10030080 - 4 Sep 2024
Cited by 4 | Viewed by 2195
Abstract
As devices become more miniaturized and integrated, the heat flux density has increased, highlighting the issue of heat concentration, especially for low thermal conductivity gallium oxide (Ga2O3). This study utilizes diamond composite substrates with an AlN transition layer to [...] Read more.
As devices become more miniaturized and integrated, the heat flux density has increased, highlighting the issue of heat concentration, especially for low thermal conductivity gallium oxide (Ga2O3). This study utilizes diamond composite substrates with an AlN transition layer to assist Ga2O3 in rapid thermal dissipation. All samples were prepared using pulsed laser deposition (PLD) and annealed at 600–1000 °C. The microstructure, surface morphology, vacancy defects, and thermal characteristics of post-annealed Ga2O3 were then thoroughly investigated to determine the mechanism by which annealing temperature influences the heat transfer of heterostructures. The results demonstrate that increasing the annealing temperature can improve the crystallinity of Ga2O3 while also reducing oxygen vacancy defects from 20.6% to 9.9%. As the temperature rises to 1000 °C, the thermal conductivity of Ga2O3 reaches a maximum of 12.25 W/(m·K). However, the interface microstructure has no direct correlation with annealing temperature. At 700 °C, Ga2O3/diamond exhibits a maximum thermal boundary conductance of 127.06 MW/(m2·K). Higher temperatures (>800 °C) cause irregular mixtures to form near the heterointerface, intensifying phonon interface scattering and sharply deteriorating interfacial heat transfer. These findings contribute to a better understanding of the heterointerface thermal transfer influence mechanism and provide theoretical guidance for the thermal management design and physical analysis of Ga2O3-based power devices. Full article
(This article belongs to the Special Issue Micro/Nanofabrication of Carbon-Based Devices and Their Applications)
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11 pages, 6649 KiB  
Article
Thermal Analysis of THz Schottky Diode Chips with Single and Double-Row Anode Arrangement
by Zenghui Liu, Xiaobo Zhang, Zhiwen Liang, Fengge Wang, Yanyan Xu, Xien Yang, Xin Li, Yisheng Liang, Lizhang Lin, Xiaodong Li, Wenbo Zhao, Xin Cao, Xinqiang Wang and Baijun Zhang
Micromachines 2024, 15(8), 959; https://doi.org/10.3390/mi15080959 - 27 Jul 2024
Viewed by 1241
Abstract
GaN Schottky diodes show great potential in high-power terahertz frequency multipliers. The thermal characteristics of GaN Schottky diodes with single and double-row anode arrangements are described in this paper. The temperature distribution inside the Schottky diode is discussed in detail under the coupling [...] Read more.
GaN Schottky diodes show great potential in high-power terahertz frequency multipliers. The thermal characteristics of GaN Schottky diodes with single and double-row anode arrangements are described in this paper. The temperature distribution inside the Schottky diode is discussed in detail under the coupling condition of Joule heat and solid heat transfer. The effects of different substrates and substrate geometric parameters on the thermal characteristics of the Schottky diode chips with single and double-row anode arrangements are systematically analyzed. Compared with that of the chip with single-row anode arrangement, the maximum temperature of the chip with double-row anode arrangement can be reduced by 40 K at the same conditions. For chips with different substrates, chips with diamond substrates can withstand greater power dissipation when reaching the same temperature. The simulation results are instructive for the design and optimization of Schottky diodes in the terahertz field. Full article
(This article belongs to the Special Issue GaN Heterostructure Devices: From Materials to Application)
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13 pages, 6471 KiB  
Article
Fabrication and Tribological Properties of Diamond-like Carbon Film with Cr Doping by High-Power Impulse Magnetron Sputtering
by Shuai Liu, Wenjian Zhuang, Jicheng Ding, Yuan Liu, Weibo Yu, Ying Yang, Xingguang Liu, Jing Yuan and Jun Zheng
Coatings 2024, 14(7), 916; https://doi.org/10.3390/coatings14070916 - 22 Jul 2024
Cited by 4 | Viewed by 1333
Abstract
The present study aims to investigate the advantages of diamond-like carbon (DLC) films in reducing friction and lubrication to address issues such as the low surface hardness, high friction coefficients, and poor wear resistance of titanium alloys. Cr-doped DLC films were deposited by [...] Read more.
The present study aims to investigate the advantages of diamond-like carbon (DLC) films in reducing friction and lubrication to address issues such as the low surface hardness, high friction coefficients, and poor wear resistance of titanium alloys. Cr-doped DLC films were deposited by high-power impulse magnetron sputtering (HiPIMS) in an atmosphere of a gas mixture of Ar and C2H2. The energy of the deposited particles was controlled by adjusting the target powers, and four sets of film samples with different powers (4 kW, 8 kW, 12 kW, and 16 kW) were fabricated. The results showed that with an increase in target power, the Cr content increased from 3.73 at. % to 22.65 at. %; meanwhile, the microstructure of the film evolved from an amorphous feature to a nanocomposite structure, with carbide embedded in an amorphous carbon matrix. The sp2-C bond content was also increased in films, suggesting an intensification of the film’s graphitization. The hardness of films exhibited a trend of initially increasing and then decreasing, reaching the maximum value at 12 kW. The friction coefficient and wear rate of films showed a reverse trend compared to hardness variation, namely initially decreasing and then increasing. The friction coefficient reached a minimum value of 0.14, and the wear rate was 2.50 × 10−7 (mm3)/(N·m), at 8 kW. The abrasive wear was the primary wear mechanism for films deposited at a higher target power. Therefore, by adjusting the target power parameter, it is possible to control the content of the metal and sp2/sp3 bonds in metal-doped DLC films, thereby regulating the mechanical and tribological properties of the films and providing an effective approach for addressing surface issues in titanium alloys. Full article
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17 pages, 3860 KiB  
Article
Fast, Efficient Tailoring Growth of Nanocrystalline Diamond Films by Fine-Tuning of Gas-Phase Composition Using Microwave Plasma Chemical Vapor Deposition
by Chunjiu Tang, Antonio J. S. Fernandes, Margarida Facao, Alexandre F. Carvalho, Weixia Chen, Haihong Hou and Florinda M. Costa
Materials 2024, 17(12), 2976; https://doi.org/10.3390/ma17122976 - 18 Jun 2024
Cited by 2 | Viewed by 1331
Abstract
Nanocrystalline diamond (NCD) films are attractive for many applications due to their smooth surfaces while holding the properties of diamond. However, their growth rate is generally low using common Ar/CH4 with or without H2 chemistry and strongly dependent on the overall [...] Read more.
Nanocrystalline diamond (NCD) films are attractive for many applications due to their smooth surfaces while holding the properties of diamond. However, their growth rate is generally low using common Ar/CH4 with or without H2 chemistry and strongly dependent on the overall growth conditions using microwave plasma chemical vapor deposition (MPCVD). In this work, incorporating a small amount of N2 and O2 additives into CH4/H2 chemistry offered a much higher growth rate of NCD films, which is promising for some applications. Several novel series of experiments were designed and conducted to tailor the growth features of NCD films by fine-tuning of the gas-phase compositions with different amounts of nitrogen and oxygen addition into CH4/H2 gas mixtures. The influence of growth parameters, such as the absolute amount and their relative ratios of O2 and N2 additives; substrate temperature, which was adjusted by two ways and inferred by simulation; and microwave power on NCD formation, was investigated. Short and long deposition runs were carried out to study surface structural evolution with time under identical growth conditions. The morphology, crystalline and optical quality, orientation, and texture of the NCD samples were characterized and analyzed. A variety of NCD films of high average growth rates ranging from 2.1 μm/h up to 6.7 μm/h were successfully achieved by slightly adjusting the O2/CH4 amounts from 6.25% to 18.75%, while that of N2 was kept constant. The results clearly show that the beneficial use of fine-tuning of gas-phase compositions offers a simple and effective way to tailor the growth characteristics and physical properties of NCD films for optimizing the growth conditions to envisage some specific applications. Full article
(This article belongs to the Special Issue Advanced Nanomaterials: Synthesis, Characterization and Applications)
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