Search Results (17)

Extreme ultraviolet lithography (EUVL) is a leading technology in semiconductor manufacturing, enabling the creation of high-resolution patterns essential for advanced microelectronics. This review highlights recent progress in inorganic metal-oxide-based photoresists, with a focus on their applications in EUVL. The unique properties of zinc-based, tin–oxygen, and IVB group inorganic photoresists are examined, showcasing their enhanced chemical reactivity and precise patterning capabilities. Key advancements include the development of zinc oxide and tin oxide nanoparticles, which demonstrate significant improvements in photon absorption and solubility under extreme ultraviolet exposure. Additionally, the review delves into the photochemical reactions of tin–oxygen clusters and the influence of various ligands on film density and cross-linking. The findings suggest that these inorganic photoresists not only improve photolithographic performance but also hold potential for broader applications, such as pyroelectric infrared sensors and 3D printing. Future research directions are outlined, including the optimization of process parameters, the exploration of new ligand and metal combinations, and the evaluation of the environmental benefits of inorganic photoresists over traditional organic ones. These advancements are poised to further enhance the resolution and patterning capabilities required for next-generation semiconductor devices. Full article

This research aims to use energy harvested from conductive materials to power microelectronic components. The proposed method involves using vibration-based energy harvesting to increase the natural vibration frequency, reduce the need for battery replacement, and minimise chemical waste. Piezoelectric transduction, known for its high-power density and ease of application, has garnered significant attention. Additionally, graphene, a non-piezoelectric material, exhibits good piezoelectric properties. The research explores a novel method of printing graphene material using 3D printing, specifically Direct Ink Writing (DIW) and fused deposition modelling (FDM). Both simulation and experimental techniques were used to analyse energy harvesting. The experimental technique involved using the cantilever beam-based vibration energy harvesting method. The results showed that the DIW-derived 3D-printed prototype achieved a peak power output of 12.2 µW, surpassing the 6.4 µW output of the FDM-derived 3D-printed prototype. Furthermore, the simulation using COMSOL Multiphysics yielded a harvested output of 0.69 µV. Full article

Nowadays, additive manufacturing (AM) is advanced to deliver high-value end-use products rather than individual components. This evolution necessitates integrating multiple manufacturing processes to implement multi-material processing, much more complex structures, and the realization of end-user functionality. One significant product category that benefits from such advanced AM technologies is 3D microelectronics. However, the complexity of the entire manufacturing procedure and the various microstructures of 3D microelectronic products significantly intensified the risk of product failure due to fabrication defects. To respond to this challenge, this work presents a defect detection technology based on deep learning and machine vision for real-time monitoring of the AM fabrication process. We have proposed an enhanced YOLOv8 algorithm to train a defect detection model capable of identifying and evaluating defect images. To assess the feasibility of our approach, we took the extrusion 3D printing process as an application object and tailored a dataset comprising a total of 3550 images across four typical defect categories. Test results demonstrated that the improved YOLOv8 model achieved an impressive mean average precision (mAP50) of 91.7% at a frame rate of 71.9 frames per second. Full article

Microfluidic technology has revolutionized device fabrication by merging principles of fluid dynamics with technologies from chemistry, physics, biology, material science, and microelectronics. Microfluidic systems manipulate small volumes of fluids to perform automated tasks with applications ranging from chemical syntheses to biomedical diagnostics. The advent of low-cost 3D printers has revolutionized the development of microfluidic systems. For measuring molecules, 3D printing offers cost-effective, time, and ease-of-designing benefits. In this paper, we present a comprehensive tutorial for design, optimization, and validation for creating a 3D-printed microfluidic immunoarray for ultrasensitive detection of multiple protein biomarkers. The target is the development of a point of care array to determine five protein biomarkers for aggressive cancers. The design phase involves defining dimensions of microchannels, reagent chambers, detection wells, and optimizing parameters and detection methods. In this study, the physical design of the array underwent multiple iterations to optimize key features, such as developing open detection wells for uniform signal distribution and a flap for covering wells during the assay. Then, full signal optimization for sensitivity and limit of detection (LOD) was performed, and calibration plots were generated to assess linear dynamic ranges and LODs. Varying characteristics among biomarkers highlighted the need for tailored assay conditions. Spike-recovery studies confirmed the assay’s accuracy. Overall, this paper showcases the methodology, rigor, and innovation involved in designing a 3D-printed microfluidic immunoarray. Optimized parameters, calibration equations, and sensitivity and accuracy data contribute valuable metrics for future applications in biomarker analyses. Full article

Advanced micro/nano-flexible sensors, displays, electronic skins, and other related devices provide considerable benefits compared to traditional technologies, aiding in the compactness of devices, enhancing energy efficiency, and improving system reliability. The creation of cost-effective, scalable, and high-resolution fabrication techniques for micro/nanostructures built from optoelectronic materials is crucial for downsizing to enhance overall efficiency and boost integration density. The electrohydrodynamic jet (EHD) printing technology is a novel additive manufacturing process that harnesses the power of electricity to create fluid motion, offering unparalleled benefits and a diverse spectrum of potential uses for microelectronic printing in terms of materials, precision, accuracy, and cost-effectiveness. This article summarizes various applications of EHD printing by categorizing them as zero-dimensional (0D), one-dimensional (1D), two-dimensional (2D), and three-dimensional (3D) printing materials. Zero-dimensional (quantum dot) materials are predominantly utilized in LED applications owing to their superb optoelectronic properties, high color fidelity, adjustable color output, and impressive fluorescence quantum yield. One- and two-dimensional materials are primarily employed in FET and sensor technologies due to their distinctive physical structure and exceptional optoelectronic properties. Three-dimensional materials encompass nanometals, nanopolymers, nanoglass, and nanoporous materials, with nanometals and nanopolymers finding widespread application in EHD printing technology. We hope our work will facilitate the development of small-feature-size, large-scale flexible electronic devices via EHD printing. Full article

Miniaturized energy storage devices with superior performance and compatibility with facile fabrication are highly desired in smart microelectronics. Typical fabrication techniques are generally based on powder printing or active material deposition, which restrict the reaction rate due to the limited optimization of electron transport. Herein, we proposed a new strategy for the construction of high-rate Ni-Zn microbatteries based on a 3D hierarchical porous nickel (Ni) microcathode. With sufficient reaction sites from the hierarchical porous structure as well as excellent electrical conductivity from the superficial Ni-based activated layer, this Ni-based microcathode is featured with fast-reaction capability. By virtue of facile electrochemical treatment, the fabricated microcathode realized an excellent rate performance (over 90% capacity retention when the current density increased from 1 to 20 mA cm⁻²). Furthermore, the assembled Ni-Zn microbattery achieved a rate current of up to 40 mA cm⁻² with a capacity retention of 76.9%. Additionally, the high reactivity of the Ni-Zn microbattery is also durable in 2000 cycles. This 3D hierarchical porous Ni microcathode, as well as the activation strategy, provides a facile route for the construction of microcathodes and enriches high-performance output units for integrated microelectronics. Full article

The efficiency of electronic microchip-based devices increases with advancements in technology, while their size decreases. This miniaturization leads to significant overheating of various electronic components, such as power transistors, processors, and power diodes, leading to a reduction in their lifespan and reliability. To address this issue, researchers are exploring the use of materials that offer efficient heat dissipation. One promising material is a polymer–boron nitride composite. This paper focuses on 3D printing using digital light processing of a model of a composite radiator with different boron nitride fillings. The measured absolute values of the thermal conductivity of such a composite in the temperature range of 3–300 K strongly depend on the concentration of boron nitride. Filling the photopolymer with boron nitride leads to a change in the behavior of the volt–current curves, which may be associated with the occurrence of percolation currents during the deposition of boron nitride. The ab initio calculations show the behavior and spatial orientation of BN flakes under the influence of an external electric field at the atomic level. These results demonstrate the potential use of photopolymer-based composite materials filled with boron nitride, which are manufactured using additive techniques, in modern electronics. Full article

Gait is the information that can reflect the state index of the human body, and at the same time, the leg is the organ with the maximum output power of the human body. Effective collection of maximum mechanical power output and gait information can play an important role in sustainable energy acquisition and human health monitoring. In this paper, a 3D printing triboelectric nanogenerator (3D printed TENG) is fabricated by 3D printing technology, it is composited of Poly tetra fluoroethylene (PTFE) film, Nylon film, and 3D printing substrate. Based on the principle of friction electrification and electrostatic induction, it can be used as the equipment for human sustainable mechanical energy collection and gait monitoring. In order to solve the problems of energy collection, gait monitoring, and immersion experience, we conducted the following experiments. Firstly, the problem of sustainable energy recovery and reuse of the human body was solved. Three-dimensionally printed TENG was used to collect human mechanical energy and convert it into electric energy. The capacitor of 2 μF can be charged to 1.92 V in 20 s. Therefore, 3D printed TENG can be used as a miniature sustainable power supply for microelectronic devices. Then, the gait monitoring software is used to monitor human gait, including the number of steps, the frequency of steps, and the establishment of a personal gait password. This gait password can only identify a specific individual through machine learning. Through remote wireless transmission means, remote real-time information monitoring can be achieved. Finally, we use the Internet of Things to control virtual games through electrical signals and achieve the effect of human–computer interaction. The peak search algorithm is mainly used to detect the extreme points whose amplitude is greater than a certain threshold and the distance is more than 0.1 s. Therefore, this study proposed a 3D printed TENG method to collect human mechanical energy, monitor gait information, and then conduct human–computer interaction, which opened up a multi-dimensional channel for human energy and information interaction. Full article

In response to the fact that most of the current research on silicone 3D printing suffers from structure collapse and dimensional mismatch, this paper proposes a heating-assisted direct writing printing method for commercial silicone rubber materials for preparing silicone foam with enhanced fidelity. In the experimental processes, the effects of substrate temperature, printing pressure, and printing speed on the filament width were investigated using a controlled variable method. The results showed the following: (1) the diameter of silicone rubber filaments was positively correlated with the printing pressure and substrate temperature, but negatively correlated with the printing speed; (2) the filament collapse of the large filament spaced foams was significantly improved by the addition of the thermal field, which, in turn, improved the mechanical properties and manufacturing stability of the silicon foams. The heating-assisted direct writing process in this paper can facilitate the development of the field of microelectronics and the direct printing of biomaterials. Full article

Compliant mechanisms are widely used in cutting-edge scientific and technological fields such as precision engineering, micro-/nano-manipulation, or microelectronics. Hence, the demand for multi-degree-of-freedom compliant mechanisms has increased sharply. The structure of compliant mechanisms becomes increasingly complex with the increase of degrees of freedom. Here, a compliant mechanism with six degrees of freedom is proposed based on curved beams. The compliant mechanism has the advantages of simple structure and multi-degree-of-freedom. Using the isogeometric analysis method, a model of the mechanism is constructed. Static analysis show that six degrees of freedom can be generated. The prototype of the mechanism is developed by 3D printing. A loading test in six degrees of freedom is carried out. The output and input have high linear relations and the structure has low inter-directional coupling. We trust that this study provides a pioneering step towards the design of compliant mechanisms based on curved beam elements. Full article

Laser-induced forward transfer (LIFT) has been shown to be a useful technique for the manufacturing of micron-scale metal structures. LIFT is a high-resolution, non-contact digital printing method that can support the fabrication of complex shapes and multi-material structures in a single step under ambient conditions. However, LIFT printed metal structures often suffer from inferior mechanical, electrical, and thermal properties when compared to their bulk metal counterparts, and often are prone to enhanced chemical corrosion. This is due mostly to their non-compact structures, which have voids and inter-droplet delamination. In this paper, a theoretical framework together with experimental results of achievable compactness limits is presented for a variety of metals. It is demonstrated that compactness limits depend on material properties and jetting conditions. It is also shown how a specific choice of materials can yield compact structures, for example, when special alloys are chosen along with a suitable donor construct. The example of printed amorphous ZrPd is detailed. This study contributes to a better understanding of the limits of implementing LIFT for the fabrication of metal structures, and how to possibly overcome some of these limitations. Full article

The system designed in this study involves a three-dimensional (3D) microelectronic mechanical system chip structure using DNA printing technology. We employed diverse diameters and cavity thickness for the heater. DNA beads were placed in this rapid array, and the spray flow rate was assessed. Because DNA cannot be obtained easily, rapidly deploying DNA while estimating the total amount of DNA being sprayed is imperative. DNA printings were collected in a multiplexer driver microelectronic mechanical system head, and microflow estimation was conducted. Flow-3D was used to simulate the internal flow field and flow distribution of the 3D spray room. The simulation was used to calculate the time and pressure required to generate heat bubbles as well as the corresponding mean outlet speed of the fluid. The “outlet speed status” function in Flow-3D was used as a power source for simulating the ejection of fluid by the chip nozzle. The actual chip generation process was measured, and the starting voltage curve was analyzed. Finally, experiments on flow rate were conducted, and the results were discussed. The density of the injection nozzle was 50, the size of the heater was 105 μm × 105 μm, and the size of the injection nozzle hole was 80 μm. The maximum flow rate was limited to approximately 3.5 cc. The maximum flow rate per minute required a power between 3.5 W and 4.5 W. The number of injection nozzles was multiplied by 100. On chips with enlarged injection nozzle density, experiments were conducted under a fixed driving voltage of 25 V. The flow curve obtained from various pulse widths and operating frequencies was observed. The operating frequency was 2 KHz, and the pulse width was 4 μs. At a pulse width of 5 μs and within the power range of 4.3–5.7 W, the monomer was injected at a flow rate of 5.5 cc/min. The results of this study may be applied to estimate the flow rate and the total amount of the ejection liquid of a DNA liquid. Full article

Existing 3D printing techniques are still facing the challenge of low resolution for fabricating polymer matrix composites, inhibiting the wide engineering applications for the biomedical engineering (biomimetic scaffolds), micro fuel cells, and micro-electronics. In order to achieve high resolution fabrication of polylactic acid (PLA)/multi-walled carbon nanotube (MWCNT) composites, this paper presents an electric-field-driven (EFD) fusion jetting 3D printing method by combining the mixing effect and material feeding of the micro-screw and the necking effect of Taylor cone by the EFD. The effects of main process parameters (the carbon loading, the voltage, the screw speed, and the printing speed) on the line width and the printing quality were studied and optimized. To demonstrate the printing capability of this proposed method, meshes with line width of 30 µm to 100 μm and 1 wt.% to 5 wt.% MWCNT for the application of conductive biomimetic scaffold and the anisotropic flexible meshes were prepared. The electrical properties were investigated to present the frequency dependence of the alternating current conductivity and the dielectric loss (tanδ), and the microstructures of printed structures demonstrated the uniformly dispersed MWCNT in PLA matrix. Therefore, it provides a new solution to fabricate micro-scale structures of composite materials, especially the 3D conductive biomimetic scaffolds. Full article

Aerosol jet printing of electronic devices is increasingly attracting interest in recent years. However, low capability and high resistance are still limitations of the printed electronic devices. In this paper, we introduce a novel post-treatment method to achieve a high-performance electric circuit. The electric circuit was printed with aerosol jet printing method on an ULTEM substrate. The ULTEM substrate was fabricated by the Fused Deposition Modelling method. After post-treatment, the electrical resistance of the printed electric circuit was changed from 236 mΩ to 47 mΩ and the electric property was enhanced. It was found that the reduction of electric resistance was caused by surface property changes. Different surface analysis methods including scanning electron microscopy (SEM) and x-ray photoelectron spectroscopy (XPS) were used to understand the effectiveness of the proposed method. The results showed that the microsurface structure remained the same original structure before and after treatment. It was found that the surface carbon concentration was significantly increased after treatment. Detailed analysis showed that the C-C bond increased obviously after treatment. The change of electrical resistance was found to be limited to the material’s surface. After polishing, the circuit resistance was changed back to its original value. As the electric circuit is the basic element of electric devices, the proposed method enables the fabrication of high performance devices such as capacitors, strain gauge, and other sensors, which has potential applications in many areas such as industrial, aerospace, and military usage. Full article

Three-dimensional (3D) printing is a powerful tool that enables the printing of almost unlimited geometry in a few hours, from a virtual design to a real structure. In this paper, we present a micro-electromechanical energy harvester that utilized a 3D printed micromechanical structure combined with a miniature permanent magnet and a microelectronic coil towards a hybrid electromagnetic vibrational hybrid energy harvester. Various micromechanical structure geometries were designed, printed, and tested. The characteristic dimensions of the springs were from 200 μm to 400 μm and the total volume of the devices was below 1 cm³. The resonant frequencies (95–340 Hz range), as well as bandwidths (6–23 Hz range), for the developed prototypes were determined. The maximal generated output power was almost 24 μW with a power density up to almost 600 μW/cm³. Full article