NEMS for Precision Sensing: Self-Sensing Transduction, Noise, and Drift Control
A special issue of Sensors (ISSN 1424-8220). This special issue belongs to the section "Physical Sensors".
Deadline for manuscript submissions: 31 July 2026 | Viewed by 121
Special Issue Editor
Special Issue Information
Dear Colleagues,
Nanoelectromechanical systems (NEMSs) are redefining precision sensing by leveraging ultralow mass, exceptional stiffness-to-mass ratios, and scalable, low-power transduction. This Special Issue is dedicated to advances in NEMS sensing principles and implementations, including fully electrical, self-sensing readout schemes (capacitive, down-mixing/lock-in, piezoresistive, piezoelectric), as well as bias- and strain-tunable frequency stabilization. Topics of interest include the exploitation of nonlinear dynamics (Duffing, parametric, internal resonance) for enhanced sensitivity, bandwidth and dynamic range; dissipation, noise, and drift mechanisms (thermoelastic, surface, anchor, adsorption) with strategies for Q-factor engineering; and in situ calibration, standards and reliability under diverse environments.
We particularly welcome contributions spanning theory, modeling, and metrology (e.g., laser Doppler vibrometry, electrical noise spectroscopy), as well as application-driven studies in gas, pressure, temperature, mass/chemical sensing, and RF timing/filtering. Submissions emphasizing CMOS compatibility, low-voltage operation, and on-chip integration are especially encouraged, together with concise reviews and perspectives that map emerging research directions.
Dr. Pengcheng Zhang
Guest Editor
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Keywords
- NEMS sensing
- self-sensing transduction
- capacitive/piezoresistive/piezoelectric readout
- frequency tuning and stabilization
- nonlinear dynamics for sensing
- noise and drift mitigation
- Q-factor engineering
- calibration and metrology
- low-power
- CMOS-compatible integration
- RF timing and filtering
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