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Applied Sciences
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Micro-Opto-Electro-Mechanical Systems (MOEMS)
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Micro-Opto-Electro-Mechanical Systems (MOEMS)

A special issue of Applied Sciences (ISSN 2076-3417). This special issue belongs to the section "Optics and Lasers".

Deadline for manuscript submissions: closed (31 December 2020) | Viewed by 11405

Special Issue Editor

Prof. Dr. Yong-Hwa Park

E-Mail Website
Guest Editor
Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Korea
Interests: optical MEMS and systems; 3D sensors and scene recognition; sound recognition; biometric sensors; structural health monitoring; human–machine interaction

Special Issue Information

Dear Colleagues,

In the pursuit of intelligent machines that recognize human intent and events autonomously, MOEMS (micro-opto-electro-mechanical systems) play one of the most important roles, especially in sensing, actuating, and communicating various types of physical information by means of optic and photonic devices and systems. These include display devices and systems, image sensors, spatial light modulators, laser scanning, LIDAR, time-of-flight sensors, spectrometers, environmental sensors, lithography, bio/medical imaging, health sensors, and emerging wearable sensor and actuators. MOEMS (micro-opto-electro-mechanical systems) are highly miniaturized, highly functional MEMS-based optical systems. Typically fabricated using a microfabrication process, MOEMS combine optical, electrical, and mechanical functionality in robust standalone microsystems. Utilizing a broad range of materials, from silicon to polymers, with a wide spectrum of manufacturing technologies, from nano-lithography to large-area printing, MOEMS represent one of the most interdisciplinary fields in applied sciences.

The Special Issue of the journal Applied Sciences called “Micro-Opto-Electro-Mechanical Systems (MOEMS)” aims to cover recent advances in the development of MOEMS devices and systems from all disciplines, including fabrication techniques, novel devices and components, advanced systems, and the latest applications.

Prof. Yong-Hwa Park
Guest Editor

Manuscript Submission Information

Manuscripts should be submitted online at www.mdpi.com by registering and logging in to this website. Once you are registered, click here to go to the submission form. Manuscripts can be submitted until the deadline. All submissions that pass pre-check are peer-reviewed. Accepted papers will be published continuously in the journal (as soon as accepted) and will be listed together on the special issue website. Research articles, review articles as well as short communications are invited. For planned papers, a title and short abstract (about 100 words) can be sent to the Editorial Office for announcement on this website.

Submitted manuscripts should not have been published previously, nor be under consideration for publication elsewhere (except conference proceedings papers). All manuscripts are thoroughly refereed through a single-blind peer-review process. A guide for authors and other relevant information for submission of manuscripts is available on the Instructions for Authors page. Applied Sciences is an international peer-reviewed open access semimonthly journal published by MDPI.

Please visit the Instructions for Authors page before submitting a manuscript. The Article Processing Charge (APC) for publication in this open access journal is 2400 CHF (Swiss Francs). Submitted papers should be well formatted and use good English. Authors may use MDPI's English editing service prior to publication or during author revisions.

Keywords

  • Photonic cristals and its optical applications
  • Optical components design, fabrication and applications
  • Micro scanning mirror, scanner, beam steering
  • Optical shutters, modulator, switches
  • Image sensors
  • Spatial light modulator (SLM)
  • Bio/medical imaging
  • Endoscopic imaging, OCT imaging
  • LIDAR, time-of-flight sensors
  • New camera
  • Spectrometer, tunable filters
  • Hyper spectral imaging
  • Environmental sensors
  • Wearable, personal sensors and actuators
  • Fabrication of MOEMS
  • Autonomous vehicle, robot, and drone application of MOEMS

Published Papers (2 papers)

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Research

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15 pages, 2364 KiB  
Article
A Parallel-Phase Demodulation-Based Distance-Measurement Method Using Dual-Frequency Modulation
by In-Gyu Jang, Sung-Hyun Lee and Yong-Hwa Park
Appl. Sci. 2020, 10(1), 293; https://doi.org/10.3390/app10010293 - 31 Dec 2019
Cited by 9 | Viewed by 3206
Abstract
Time-of-flight (ToF) measurement technology based on the amplitude-modulated continuous-wave (AMCW) model has emerged as a state-of-the-art distance-measurement method for various engineering applications. However, many of the ToF cameras employing the AMCW process phase demodulation sequentially, which requires time latency for a single distance [...] Read more.
Time-of-flight (ToF) measurement technology based on the amplitude-modulated continuous-wave (AMCW) model has emerged as a state-of-the-art distance-measurement method for various engineering applications. However, many of the ToF cameras employing the AMCW process phase demodulation sequentially, which requires time latency for a single distance measurement. This can result in significant distance errors, especially in non-static environments (e.g., robots and vehicles) such as those containing objects moving relatively to the sensors. To reduce the measurement time required for a distance measurement, this paper proposes a novel, parallel-phase demodulation method. The proposed method processes phase demodulation of signal in parallel rather than sequentially. Based on the parallel phase demodulation, 2π ambiguity problem is also solved in this work by adopting dual frequency modulation to increase the maximum range while maintaining the accuracy. The performance of proposed method was verified through distance measurements under various conditions. The improved distance measurement accuracy was demonstrated throughout an extended measurement range (1–10 m). Full article
(This article belongs to the Special Issue Micro-Opto-Electro-Mechanical Systems (MOEMS))
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Review

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39 pages, 15731 KiB  
Review
Opto-Mechanical Photonic Crystal Cavities for Sensing Application
by Ji Xia, Qifeng Qiao, Guangcan Zhou, Fook Siong Chau and Guangya Zhou
Appl. Sci. 2020, 10(20), 7080; https://doi.org/10.3390/app10207080 - 12 Oct 2020
Cited by 31 | Viewed by 5954
Abstract
A new class of hybrid systems that couple optical and mechanical nanoscale devices is under development. According to their interaction concepts, two groups of opto-mechanical systems are summarized as mechanically tunable and radiation pressure-driven optical resonators. On account of their high-quality factors and [...] Read more.
A new class of hybrid systems that couple optical and mechanical nanoscale devices is under development. According to their interaction concepts, two groups of opto-mechanical systems are summarized as mechanically tunable and radiation pressure-driven optical resonators. On account of their high-quality factors and small mode volumes as well as good on-chip integrability with waveguides/circuits, photonic crystal (PhC) cavities have attracted great attention in sensing applications. Benefitting from the opto-mechanical interaction, a PhC cavity integrated opto-mechanical system provides an attractive platform for ultrasensitive sensors to detect displacement, mass, force, and acceleration. In this review, we introduce basic physical concepts of opto-mechanical PhC system and describe typical experimental systems for sensing applications. Opto-mechanical interaction-based PhC cavities offer unprecedented opportunities to develop lab-on-a-chip devices and witness a promising prospect to further manipulate light propagation in the nanophotonics. Full article
(This article belongs to the Special Issue Micro-Opto-Electro-Mechanical Systems (MOEMS))
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