Identification of MEMS Geometric Uncertainties through Homogenization
Abstract
:1. Introduction
2. Asymptotic Homogenization
3. MEMS Filter
3.1. Mechanical Design
3.2. Homogenization of the Auxetic Core
3.3. Validation of Effective Properties
4. Identification of Geometric Uncertainties
4.1. Experimental Results
4.2. Optimization Procedure
4.3. Results
5. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Data Availability Statement
Acknowledgments
Conflicts of Interest
Abbreviations
FEA | Finite Element Analysis |
MEMS | Micro-Electro-Mechanical Systems |
PCB | Printed Circuit Board |
PLCC68 | 68-Pin Plastic-Leaded-Chip-Carrier |
SEM | Scanning Electron Microscopy |
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Faraci, D.; Zega, V.; Nastro, A.; Comi, C. Identification of MEMS Geometric Uncertainties through Homogenization. Micro 2022, 2, 564-574. https://doi.org/10.3390/micro2040037
Faraci D, Zega V, Nastro A, Comi C. Identification of MEMS Geometric Uncertainties through Homogenization. Micro. 2022; 2(4):564-574. https://doi.org/10.3390/micro2040037
Chicago/Turabian StyleFaraci, David, Valentina Zega, Alessandro Nastro, and Claudia Comi. 2022. "Identification of MEMS Geometric Uncertainties through Homogenization" Micro 2, no. 4: 564-574. https://doi.org/10.3390/micro2040037