- Article
Optical Properties of a-SiC:H Thin Films Deposited by Magnetron Sputtering
- Christina Veneti,
- Lykourgos Magafas and
- Panagiota Papadopoulou
In the present work a-SiC:H thin films were prepared using magnetron sputtering technique for different substrate temperatures from 100 °C to 290 °C. Their optical properties were studied using the ellipsometry technique. The experimental res...

