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Journal: ElectronicsVolume: 7Number: 416
Article: AlGaN/GaN MIS-HEMT with PECVD SiNx, SiON, SiO2 as Gate Dielectric and Passivation Layer
  • Authors:
  • Kuiwei Geng1,
  • Ditao Chen1 and
  • Quanbin Zhou1
  • et al.
Link: https://www.mdpi.com/2079-9292/7/12/416

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