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Atomic Layer Deposition of Inorganic Films for the Synthesis of Vertically Aligned Carbon Nanotube Arrays and Their Hybrids

1
Shanghai Key Laboratory of Intelligent Manufacturing and Robotics, School of Automation and Mechanical Engineering, Shanghai University, Shanghai 200444, China
2
SMIT Center, School of Automation and Mechanical Engineering, Shanghai University, Shanghai 201800, China
3
State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433, China
*
Author to whom correspondence should be addressed.
Coatings 2019, 9(12), 806; https://doi.org/10.3390/coatings9120806
Received: 6 November 2019 / Revised: 26 November 2019 / Accepted: 28 November 2019 / Published: 1 December 2019
(This article belongs to the Special Issue Surface Functionalization by ALD Technology)
Vertically aligned carbon nanotube arrays (VACNTs) have many excellent properties and show great potential for various applications. Recently, there has been a desire to grow VACNTs on nonplanar surfaces and synthesize core-sheath-structured VACNT–inorganic hybrids. To achieve this aim, atomic layer deposition (ALD) has been extensively applied, especially due to its atomic-scale thickness controllability and excellent conformality of films on three-dimensional (3D) structures with high aspect ratios. In this paper, the ALD of catalyst thin films for the growth of VACNTs, such as Co3O4, Al2O3, and Fe2O3, was first mentioned. After that, the ALD of thin films for the synthesis of VACNT–inorganic hybrids was also discussed. To highlight the importance of these hybrids, their potential applications in supercapacitors, solar cells, fuel cells, and sensors have also been reviewed.
Keywords: ALD; VACNTs; core-sheath structure; VACNT–inorganic hybrids ALD; VACNTs; core-sheath structure; VACNT–inorganic hybrids
MDPI and ACS Style

Yuan, G.-J.; Xie, J.-F.; Li, H.-H.; Lu, H.-L.; Tian, Y.-Z. Atomic Layer Deposition of Inorganic Films for the Synthesis of Vertically Aligned Carbon Nanotube Arrays and Their Hybrids. Coatings 2019, 9, 806.

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