Müller, R.; Ghazaryan, L.; Schenk, P.; Wolleb, S.; Beladiya, V.; Otto, F.; Kaiser, N.; Tünnermann, A.; Fritz, T.; Szeghalmi, A.
Growth of Atomic Layer Deposited Ruthenium and Its Optical Properties at Short Wavelengths Using Ru(EtCp)2 and Oxygen. Coatings 2018, 8, 413.
https://doi.org/10.3390/coatings8110413
AMA Style
Müller R, Ghazaryan L, Schenk P, Wolleb S, Beladiya V, Otto F, Kaiser N, Tünnermann A, Fritz T, Szeghalmi A.
Growth of Atomic Layer Deposited Ruthenium and Its Optical Properties at Short Wavelengths Using Ru(EtCp)2 and Oxygen. Coatings. 2018; 8(11):413.
https://doi.org/10.3390/coatings8110413
Chicago/Turabian Style
Müller, Robert, Lilit Ghazaryan, Paul Schenk, Sabrina Wolleb, Vivek Beladiya, Felix Otto, Norbert Kaiser, Andreas Tünnermann, Torsten Fritz, and Adriana Szeghalmi.
2018. "Growth of Atomic Layer Deposited Ruthenium and Its Optical Properties at Short Wavelengths Using Ru(EtCp)2 and Oxygen" Coatings 8, no. 11: 413.
https://doi.org/10.3390/coatings8110413
APA Style
Müller, R., Ghazaryan, L., Schenk, P., Wolleb, S., Beladiya, V., Otto, F., Kaiser, N., Tünnermann, A., Fritz, T., & Szeghalmi, A.
(2018). Growth of Atomic Layer Deposited Ruthenium and Its Optical Properties at Short Wavelengths Using Ru(EtCp)2 and Oxygen. Coatings, 8(11), 413.
https://doi.org/10.3390/coatings8110413