Effects of Drying Temperature and Molar Concentration on Structural, Optical, and Electrical Properties of β-Ga2O3 Thin Films Fabricated by Sol–Gel Method
Abstract
:1. Introduction
2. Experimental Procedure
3. Result and Discussion
3.1. Structural Properties
3.2. Optical Properties
3.3. Electrical Properties
4. Conclusions
Author Contributions
Funding
Institutional Review Board Statement
Informed Consent Statement
Acknowledgments
Conflicts of Interest
References
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Sample | A | B | C | D | E | F | G | H | I |
---|---|---|---|---|---|---|---|---|---|
Drying temperature (°C) | 60 | 80 | 100 | ||||||
Precursor concentration (M) | 0.5 | 0.7 | 1.0 | 0.5 | 0.7 | 1.0 | 0.5 | 0.7 | 1.0 |
Sample | A | B | C | D | E | F | G | H | I |
---|---|---|---|---|---|---|---|---|---|
Thickness (nm) | 52 | 65 | 70 | 120 | 130 | 176 | 238 | 254 | 412 |
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Park, T.; Kim, K.; Hong, J. Effects of Drying Temperature and Molar Concentration on Structural, Optical, and Electrical Properties of β-Ga2O3 Thin Films Fabricated by Sol–Gel Method. Coatings 2021, 11, 1391. https://doi.org/10.3390/coatings11111391
Park T, Kim K, Hong J. Effects of Drying Temperature and Molar Concentration on Structural, Optical, and Electrical Properties of β-Ga2O3 Thin Films Fabricated by Sol–Gel Method. Coatings. 2021; 11(11):1391. https://doi.org/10.3390/coatings11111391
Chicago/Turabian StylePark, Taejun, Kyunghwan Kim, and Jeongsoo Hong. 2021. "Effects of Drying Temperature and Molar Concentration on Structural, Optical, and Electrical Properties of β-Ga2O3 Thin Films Fabricated by Sol–Gel Method" Coatings 11, no. 11: 1391. https://doi.org/10.3390/coatings11111391