Article Versions Notes

Hegedüs N, Lovics R, Serényi M, Zolnai Z, Petrik P, Mihály J, Fogarassy Z, Balázsi C, Balázsi K. Examination of the Hydrogen Incorporation into Radio Frequency-Sputtered Hydrogenated SiN_x Thin Films. Coatings. 2021; 11(1):54. https://doi.org/10.3390/coatings11010054

Hegedüs, Nikolett, Riku Lovics, Miklós Serényi, Zsolt Zolnai, Péter Petrik, Judit Mihály, Zsolt Fogarassy, Csaba Balázsi, and Katalin Balázsi. 2021. "Examination of the Hydrogen Incorporation into Radio Frequency-Sputtered Hydrogenated SiN_x Thin Films" Coatings 11, no. 1: 54. https://doi.org/10.3390/coatings11010054

Hegedüs, N., Lovics, R., Serényi, M., Zolnai, Z., Petrik, P., Mihály, J., Fogarassy, Z., Balázsi, C., & Balázsi, K. (2021). Examination of the Hydrogen Incorporation into Radio Frequency-Sputtered Hydrogenated SiN_x Thin Films. Coatings, 11(1), 54. https://doi.org/10.3390/coatings11010054