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Journal: Coatings, 2020
Volume: 10
Number: 146
146
Article: Molecular Dynamics Simulations of Vacancy Generation and Migration near a Monocrystalline Silicon Surface during Energetic Cluster Ion Implantation
Authors: by Guoying Liang, Haowen Zhong, Yinong Wang, Shijian Zhang, Mofei Xu, Shicheng Kuang, Jianhui Ren, Nan Zhang, Sha Yan, Xiao Yu, Gennady Efimovich Remnev and Xiaoyun Le
Link: https://www.mdpi.com/2079-6412/10/2/146

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