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Journal: Coatings, 2020
Volume: 10
Number: 11
Article:
High Performance Multilayered Organosilicon/Silicon Oxynitride Water Barrier Structure Consecutively Deposited by Plasma-Enhanced Chemical Vapor Deposition at a Low-Temperature
Authors:
by
Ren-Da Fu, Che Kai Chang, Ming-Yueh Chuang, Tai-Hong Chen, Shao-Kai Lu and Day-Shan Liu
Link:
https://www.mdpi.com/2079-6412/10/1/11
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