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Journal: Coatings, 2020
Volume: 10
Number: 11

Article: High Performance Multilayered Organosilicon/Silicon Oxynitride Water Barrier Structure Consecutively Deposited by Plasma-Enhanced Chemical Vapor Deposition at a Low-Temperature
Authors: by Ren-Da Fu, Che Kai Chang, Ming-Yueh Chuang, Tai-Hong Chen, Shao-Kai Lu and Day-Shan Liu
Link: https://www.mdpi.com/2079-6412/10/1/11

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