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Nanomaterials 2019, 9(2), 306; https://doi.org/10.3390/nano9020306

Preparation and Characterization of Microsphere ZnO ALD Coating Dedicated for the Fiber-Optic Refractive Index Sensor

1
Department of Metrology and Optoelectronics, Faculty of Electronics, Telecommunications and Informatics, Gdańsk University of Technology, 11/12 Narutowicza Street, 80-233 Gdańsk, Poland
2
Department of Optoelectronics, Faculty of Electrical Engineering, Silesian University of Technology, 2 Krzywoustego Street, 44-100 Gliwice, Poland
3
Institut Européen des Membranes (ENSCM, UMR CNRS 5635), Univ. Montpellier, Place Eugène Bataillon, 34095 Montpellier, France
*
Authors to whom correspondence should be addressed.
Received: 5 January 2019 / Revised: 11 February 2019 / Accepted: 19 February 2019 / Published: 23 February 2019
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Abstract

We report the fabrication of a novel fiber-optic sensor device, based on the use of a microsphere conformally coated with a thin layer of zinc oxide (ZnO) by atomic layer deposition (ALD), and its use as a refractive index sensor. The microsphere was prepared on the tip of a single-mode optical fiber, on which a conformal ZnO thin film of 200 nm was deposited using an ALD process based on diethyl zinc (DEZ) and water at 100 °C. The modified fiber-optic microsphere was examined using scanning electron microscopy and Raman spectroscopy. Theoretical modeling has been carried out to assess the structure performance, and the performed experimental measurements carried out confirmed the enhanced sensing abilities when the microsphere was coated with a ZnO layer. The fabricated refractive index sensor was operating in a reflective mode of a Fabry–Pérot configuration, using a low coherent measurement system. The application of the ALD ZnO coating enabled for a better measurement of the refractive index of samples in the range of the refractive index allowed by the optical fiber. The proof-of-concept results presented in this work open prospects for the sensing community and will promote the use of fiber-optic sensing technologies. View Full-Text
Keywords: ZnO; atomic layer deposition; coating; microsphere; fiber-optic sensors; refractive index ZnO; atomic layer deposition; coating; microsphere; fiber-optic sensors; refractive index
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Listewnik, P.; Hirsch, M.; Struk, P.; Weber, M.; Bechelany, M.; Jędrzejewska-Szczerska, M. Preparation and Characterization of Microsphere ZnO ALD Coating Dedicated for the Fiber-Optic Refractive Index Sensor. Nanomaterials 2019, 9, 306.

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