Luong, V.; Philipsen, V.; Hendrickx, E.; Opsomer, K.; Detavernier, C.; Laubis, C.; Scholze, F.; Heyns, M.
Ni-Al Alloys as Alternative EUV Mask Absorber. Appl. Sci. 2018, 8, 521.
https://doi.org/10.3390/app8040521
AMA Style
Luong V, Philipsen V, Hendrickx E, Opsomer K, Detavernier C, Laubis C, Scholze F, Heyns M.
Ni-Al Alloys as Alternative EUV Mask Absorber. Applied Sciences. 2018; 8(4):521.
https://doi.org/10.3390/app8040521
Chicago/Turabian Style
Luong, Vu, Vicky Philipsen, Eric Hendrickx, Karl Opsomer, Christophe Detavernier, Christian Laubis, Frank Scholze, and Marc Heyns.
2018. "Ni-Al Alloys as Alternative EUV Mask Absorber" Applied Sciences 8, no. 4: 521.
https://doi.org/10.3390/app8040521
APA Style
Luong, V., Philipsen, V., Hendrickx, E., Opsomer, K., Detavernier, C., Laubis, C., Scholze, F., & Heyns, M.
(2018). Ni-Al Alloys as Alternative EUV Mask Absorber. Applied Sciences, 8(4), 521.
https://doi.org/10.3390/app8040521