Appl. Sci. 2018, 8(3), 468; https://doi.org/10.3390/app8030468
Development and Characterization of Two-Dimensional Gratings for Single-Shot X-ray Phase-Contrast Imaging
1
Karlsruhe Institute of Technology (KIT), Institute of Microstructure Technology (IMT), Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
2
Karlsruhe Institute of Technology (KIT), Institute of Photon Science and Synchrotron Radiation (IPS), Herrmann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany
*
Author to whom correspondence should be addressed.
Received: 22 December 2017 / Revised: 6 March 2018 / Accepted: 16 March 2018 / Published: 18 March 2018
(This article belongs to the Special Issue Advanced EUV and X-Ray Optics)
Abstract
Single-shot grating-based phase-contrast imaging techniques offer additional contrast modalities based on the refraction and scattering of X-rays in a robust and versatile configuration. The utilization of a single optical element is possible in such methods, allowing the shortening of the acquisition time and increasing flux efficiency. One of the ways to upgrade single-shot imaging techniques is to utilize customized optical components, such as two-dimensional (2D) X-ray gratings. In this contribution, we present the achievements in the development of 2D gratings with UV lithography and gold electroplating. Absorption gratings represented by periodic free-standing gold pillars with lateral structure sizes from 5 µm to 25 µm and heights from 5 µm to 28 µm have shown a high degree of periodicity and defect-free patterns. Grating performance was tested in a radiographic setup using a self-developed quality assessment algorithm based on the intensity distribution histograms. The algorithm allows the final user to estimate the suitability of a specific grating to be used in a particular setup. View Full-TextKeywords:
2D gratings; UV lithography; grating-based X-ray imaging; single-shot phase-contrast imaging
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Zakharova, M.; Vlnieska, V.; Fornasier, H.; Börner, M.; Rolo, T.S.; Mohr, J.; Kunka, D. Development and Characterization of Two-Dimensional Gratings for Single-Shot X-ray Phase-Contrast Imaging. Appl. Sci. 2018, 8, 468.
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