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Journal: Appl. Sci., 2022
Volume: 12
Number: 11878

Article: Improving Thickness Uniformity of Amorphous Oxide Films Deposited on Large Substrates by Optical Flux Mapping
Authors: by Chuen-Lin Tien and Kuan-Sheng Cheng
Link: https://www.mdpi.com/2076-3417/12/23/11878

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