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Journal: Appl. Sci., 2022
Volume: 12
Number: 10811
Article:
Analysis of TihxOy Films Produced by Physical Vapor Deposition Method
Authors:
by
Marius Urbonavicius, Simona Tuckute, Smagul Karazhanov and Martynas Lelis
Link:
https://www.mdpi.com/2076-3417/12/21/10811
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