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Actuators 2018, 7(4), 78;

Mechanical Response of Four-Bar Linkage Microgrippers with Bidirectional Electrostatic Actuation

Department of Engineering, Università degli studi di Roma Tre, 00146 Roma, Italy
Università degli studi Niccolò Cusano, 00166 Roma, Italy
Micro Nano Fabrication and Characterization Facility, Fondazione Bruno Kessler, 38123 Trento, Italy
Author to whom correspondence should be addressed.
Current address: via della Vasca Navale 79, 00146 Rome, Italy.
Received: 2 October 2018 / Revised: 19 October 2018 / Accepted: 7 November 2018 / Published: 11 November 2018
(This article belongs to the Special Issue Micromanipulation)
PDF [20826 KB, uploaded 11 November 2018]


This paper presents both an experimental and a numerical study concerning the mechanical response of a silicon microgripper with bidirectional electrostatic actuation to externally applied excitations. The experimental set-up is composed of a probe station equipped with mobile probes that apply contact forces. This part of the investigation aims to test the device’s mechanical resistance, its mobility capability and possible internal contacts during the system deformation. The second part of the paper is dedicated to the study of the free undamped vibrations of the microsystem. Finite Element Analysis (FEA) is carried out to evaluate the system vibration modes. The analysis of the modes are useful to predict possible mechanical interference among floating and anchored fingers of the actuating comb drives. View Full-Text
Keywords: MEMS; vibration modes; DRIE; microgripper; comb drive actuators MEMS; vibration modes; DRIE; microgripper; comb drive actuators

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Botta, F.; Verotti, M.; Bagolini, A.; Bellutti, P.; Belfiore, N.P. Mechanical Response of Four-Bar Linkage Microgrippers with Bidirectional Electrostatic Actuation. Actuators 2018, 7, 78.

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