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Journal: Symmetry, 2020
Volume: 12
Number: 1604
Article:
A New Macro-Model of Gas Flow and Parameter Extraction for a CMOS-MEMS Vacuum Sensor
Authors:
by
Shu-Jung Chen and Yung-Chuan Wu
Link:
https://www.mdpi.com/2073-8994/12/10/1604
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