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Novel SU-8/Ionic Liquid Composite for Tribological Coatings and MEMS

Tribology and Interface Chemistry Group (SCI-STI-SM), Ecole Polytechnique Fédérale de Lausanne (EPFL), CH-1015 Lausanne, Switzerland
Gersteltec Sàrl, Avenue Général-Guisan 26, CH-1009 Pully, Switzerland
Author to whom correspondence should be addressed.
Academic Editor: Jeong-Bong Lee
Micromachines 2015, 6(5), 611-621;
Received: 25 March 2015 / Accepted: 13 May 2015 / Published: 19 May 2015
(This article belongs to the Special Issue 15 Years of SU8 as MEMS Material)
PDF [5224 KB, uploaded 19 May 2015]


Tribology of SU-8 polymer is increasingly relevant due to bursting use of this material in a variety of applications. This study is directed towards introduction and investigation of a novel self-lubricating composite of an ionic liquid (IL) in SU-8. The new material can be utilized for fabrication of lubricating polymer coating with tunable surface properties or SU8-made elements for microelectromechanical systems (MEMS) with enhanced tribological performance. It is shown that addition of IL drastically alters water affinity of the composite while UV patternability remains unmodified. A lower coefficient of friction and wear has been obtained for two investigated compositions with 4 and 10 wt % ionic liquid. View Full-Text
Keywords: SU-8; tribology; ionic liquid; composite; MEMS SU-8; tribology; ionic liquid; composite; MEMS

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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MDPI and ACS Style

Batooli, L.; Maldonado, S.G.; Judelewicz, M.; Mischler, S. Novel SU-8/Ionic Liquid Composite for Tribological Coatings and MEMS. Micromachines 2015, 6, 611-621.

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