Special Issue: 15 Years of SU8 as MEMS Material
Microsystems Laboratory (LMIS4), École Polytechnique Fédérale de Lausanne (EPFL), Station 17, 1015 Lausanne, Switzerland
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Received: 15 June 2015 / Revised: 19 June 2015 / Accepted: 19 June 2015 / Published: 19 June 2015
Note: In lieu of an abstract, this is an excerpt from the first page.
In 1997, the first paper using SU-8 as a material for microfabrication was published , demonstrating the interest of this negative photoresist for the near-UV structuration of thick layers and the manufacturing of high aspect-ratio components.[...]
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Bertsch, A.; Renaud, P. Special Issue: 15 Years of SU8 as MEMS Material. Micromachines 2015, 6, 790-792.
Bertsch A, Renaud P. Special Issue: 15 Years of SU8 as MEMS Material. Micromachines. 2015; 6(6):790-792.
Bertsch, Arnaud; Renaud, Philippe. 2015. "Special Issue: 15 Years of SU8 as MEMS Material." Micromachines 6, no. 6: 790-792.
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