Next Article in Journal
Time of Flight Sensor with a Flow Parallel Wire
Next Article in Special Issue
Quantitative Studies on PDMS-PDMS Interface Bonding with Piranha Solution and its Swelling Effect
Previous Article in Journal
Design Issues for Low Power Integrated Thermal Flow Sensors with Ultra-Wide Dynamic Range and Low Insertion Loss
Previous Article in Special Issue
Capacitive Tactile Sensor Based on Dielectric Oil Displacement out of a Parylene Dome into Surrounding Channels
Article Menu

Export Article

Open AccessArticle
Micromachines 2012, 3(2), 315-324;

Flexible Tactile Sensor Using Polyurethane Thin Film

Faculty of Engineering Science, Kansai University, 3-3-35 Yamate-cho, Suita, Osaka 564-8680, Japan
Author to whom correspondence should be addressed.
Received: 11 February 2012 / Revised: 5 March 2012 / Accepted: 13 March 2012 / Published: 10 April 2012
(This article belongs to the Special Issue Polymer MEMS)
Full-Text   |   PDF [588 KB, uploaded 10 April 2012]   |  


A novel capacitive tactile sensor using a polyurethane thin film is proposed in this paper. In previous studies, capacitive tactile sensors generally had an air gap between two electrodes in order to enhance the sensitivity. In this study, there is only polyurethane thin film and no air gap between the electrodes. The sensitivity of this sensor is higher than the previous capacitive tactile sensors because the polyurethane is a fairly flexible elastomer and the film is very thin (about 1 µm). The polyurethane film is formed by spin-coating and etched back from 6 µm to 1 µm using 48% sulfuric acid. As a result of evaluation, the sensitivity of the developed sensor (diameter is 1 mm) is 1.3 pF/Pa (800 pF/N considering the sensing area). Young’s modulus of the thin polyurethane film was estimated to be 20 kPa. View Full-Text
Keywords: tactile sensor; capacitive sensor; poly-urethane; elastomer; thin film tactile sensor; capacitive sensor; poly-urethane; elastomer; thin film

Figure 1

This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

Share & Cite This Article

MDPI and ACS Style

Suzuki, M.; Takahashi, T.; Aoyagi, S. Flexible Tactile Sensor Using Polyurethane Thin Film. Micromachines 2012, 3, 315-324.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics



[Return to top]
Micromachines EISSN 2072-666X Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top