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Quantitative Studies on PDMS-PDMS Interface Bonding with Piranha Solution and its Swelling Effect

Department of Chemical and Environmental Engineering, University of Nottingham Malaysia Campus, Jalan Broga, Semenyih 43500, Selangor, Malaysia
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Micromachines 2012, 3(2), 427-441; https://doi.org/10.3390/mi3020427
Received: 10 March 2012 / Revised: 26 April 2012 / Accepted: 26 April 2012 / Published: 4 May 2012
(This article belongs to the Special Issue Polymer MEMS)
In this paper, a low-cost yet effective method of irreversible bonding between two elastomeric polydimethylsiloxane (PDMS) interfaces using Piranha solution is investigated. Piranha solutions at a weight ratio of 3:1 using different acids and hydrogen peroxide were attempted. The average tensile strengths of the device bonded with concentrated sulfuric acid-based piranha solution and nitric acid-based piranha solution were found to be 200 ± 20 kPa and 100 ± 15 kPa respectively. A PDMS surface treated with Piranha Solution demonstrated an increase in hydrophilicity. In addition, relatively straightforward swelling studies of PDMS using a weight loss method with common organic solvents were also investigated. Experimental results show that hexane, toluene, ethyl acetate, n-propyl alcohol and acetone swell PDMS significantly over a duration of up to 1 h and above; PDMS samples reached a steady state of swelling only after 5 min of immersion in other solvents. This will enable researchers to develop devices for the future according to the interaction between the material and the solvents in contact. View Full-Text
Keywords: polydimethylsiloxane (PDMS); swelling; bonding effects; piranha solution polydimethylsiloxane (PDMS); swelling; bonding effects; piranha solution
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Koh, K.-S.; Chin, J.; Chia, J.; Chiang, C.-L. Quantitative Studies on PDMS-PDMS Interface Bonding with Piranha Solution and its Swelling Effect. Micromachines 2012, 3, 427-441.

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