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Open AccessArticle

Quantitative Studies on PDMS-PDMS Interface Bonding with Piranha Solution and its Swelling Effect

Department of Chemical and Environmental Engineering, University of Nottingham Malaysia Campus, Jalan Broga, Semenyih 43500, Selangor, Malaysia
Author to whom correspondence should be addressed.
Micromachines 2012, 3(2), 427-441;
Received: 10 March 2012 / Revised: 26 April 2012 / Accepted: 26 April 2012 / Published: 4 May 2012
(This article belongs to the Special Issue Polymer MEMS)
In this paper, a low-cost yet effective method of irreversible bonding between two elastomeric polydimethylsiloxane (PDMS) interfaces using Piranha solution is investigated. Piranha solutions at a weight ratio of 3:1 using different acids and hydrogen peroxide were attempted. The average tensile strengths of the device bonded with concentrated sulfuric acid-based piranha solution and nitric acid-based piranha solution were found to be 200 ± 20 kPa and 100 ± 15 kPa respectively. A PDMS surface treated with Piranha Solution demonstrated an increase in hydrophilicity. In addition, relatively straightforward swelling studies of PDMS using a weight loss method with common organic solvents were also investigated. Experimental results show that hexane, toluene, ethyl acetate, n-propyl alcohol and acetone swell PDMS significantly over a duration of up to 1 h and above; PDMS samples reached a steady state of swelling only after 5 min of immersion in other solvents. This will enable researchers to develop devices for the future according to the interaction between the material and the solvents in contact. View Full-Text
Keywords: polydimethylsiloxane (PDMS); swelling; bonding effects; piranha solution polydimethylsiloxane (PDMS); swelling; bonding effects; piranha solution
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Koh, K.-S.; Chin, J.; Chia, J.; Chiang, C.-L. Quantitative Studies on PDMS-PDMS Interface Bonding with Piranha Solution and its Swelling Effect. Micromachines 2012, 3, 427-441.

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