An Effective Hybrid Rescheduling Method for Wafer Chip Precision Packaging Workshops in Complex Manufacturing Environments
Abstract
1. Introduction
2. Related Works
2.1. Semiconductor Manufacturing System
2.2. Lot Streaming Scheduling
2.3. Dynamic Scheduling
3. Problem Formulation
3.1. Problem Description
- To avoid the frequent switching, all sub-lots of each type of chip can only be processed continuously by the same processing unit or machine at each stage;
- All the processing unit can only deal with one sub-lot simultaneously, and each sub-lot can only be processed by one processing unit;
- There is no waiting time limit for each sub-lot between the adjacent processing stages;
- The capacity of the buffer between the adjacent processing stages is usually set to be much larger than the number of chips in process, so its impact on production plan and rhythm can be approximately ignored;
- The setup times can be approximated to be sequence independent and have been calculated within the processing times;
- The transportation time between adjacent processing stages has been calculated in the processing time;
- Machine breakdown events randomly occur at any time, and the maintenance time can be accurately predicted;
- Emergency order inserting events can randomly occur randomly at any time, and a certain number of sub-lots will be added to the production plan;
- Original order modifications can randomly occur randomly at any time, and a certain number of sub-lots will be removed from the production plan.
3.2. Rescheduling Mode
3.3. Mathematical Model
- Objective:
- Subject to:
4. Hybrid Firefly Algorithm Based on Variable Neighborhood Descent
4.1. Algorithm Framework
| Algorithm 1 The algorithm flow of HFA-VND |
|
4.2. Individual Description
- The “first come, first processed for sub-lot” rule: a certain sub-lot of a certain chip type that has been processed at a certain stage does not need to wait for the other subsequent sub-lots of this chip type, and can directly start to be processed at the subsequent stage;
- The “first idle machine, first processing” rule: the sub-lot that needs to be processed should be assigned on the first idle machine at this stage at this time.
| Algorithm 2 The algorithm flow of the decoding mechanism |
|
4.3. Population Initialization
| Algorithm 3 The algorithm flow of the hybrid initialization strategy |
|
4.4. Individual Movement
4.5. Local Search
| Algorithm 4 The algorithm flow of VND |
|
5. Experimental Study
5.1. Experimental Design
5.2. Algorithm Comparison
5.3. Case Study
6. Conclusions
Author Contributions
Funding
Data Availability Statement
Conflicts of Interest
Abbreviations
| Parameters: | |
| m | number of the processing stages |
| n | number of the chip types |
| k | index of processing stage, k∈{1,2,…,m} |
| i | index of chip type, i∈{1,2,…,n} |
| j | index of processing unit |
| e | index of sub-lot |
| M | set of all processing stages |
| J | set of all chip types |
| Mk | set of all processing units at processing stage k |
| mk | number of the processing units at processing stage k |
| li | number of sub-lots for chip type i |
| tPi,k | processing time of sub-lot for chip type i at processing stage k |
| tSi,e,k | starting time of sub-lot e for the chip type i at processing stage k |
| tCi,e,k | completion time of sub-lot e for chip type i at processing stage k |
| tCi | completion time for chip type i at processing stage m |
| tB | the time when the processing unit breaks down |
| tR | the time when the faulty processing unit is restored |
| Oi,e,k | operation of sub-lot e for chip type i at processing stage k |
| State 1 | State set 1 |
| State 2 | State set 2 |
| State 3 | State set 3 |
| bDi,j,k | 1 if chip type i is on machine j at processing stage k, 0 otherwise |
| bSi,i’,k | 1 if chip type i is superior to type i’ on same machine at stage k, 0 otherwise |
| Q | a sufficiently large positive integer |
| Decision variables: | |
| tS’i,e,k | starting time of sub-lot e for chip type i at processing stage k in rescheduling |
| tC’i,e,k | completion time of sub-lot e for chip type i at processing stage k in rescheduling |
| bD’i,j,k | 1 if chip type i is on machine j at processing stage k in rescheduling, 0 otherwise |
| bS’i,i’,k | 1 if chip type i is superior to type i’ on same machine at stage k, 0 otherwise |
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| Parameters | Values |
|---|---|
| n | {20, 40, 60, 80, 100} |
| s | {5, 10} |
| mk | integer in [5, 10] |
| tPi,k | integer in [10, 20] |
| li | integer in [5, 10] |
| Instance m × n | HFA-VND | MBO | GATS | GAVNS | GA | |||||
|---|---|---|---|---|---|---|---|---|---|---|
| Cmax | RPI (%) | Cmax | RPI (%) | Cmax | RPI (%) | Cmax | RPI (%) | Cmax | RPI (%) | |
| 20 × 5 | 480 | 0.1875 | 480 | 0.8125 | 480 | 0.4583 | 484 | 1.4583 | 486 | 1.9792 |
| 517 | 0.0000 | 517 | 0.3482 | 517 | 0.0193 | 518 | 1.1605 | 521 | 2.0309 | |
| 477 | 0.0000 | 477 | 0.0629 | 477 | 0.0000 | 477 | 0.0839 | 477 | 0.3145 | |
| 321 | 0.0000 | 321 | 0.7788 | 321 | 0.0000 | 322 | 2.2741 | 329 | 4.1745 | |
| 476 | 0.0000 | 476 | 0.2311 | 476 | 0.0000 | 476 | 0.5252 | 481 | 2.0588 | |
| 710 | 0.0000 | 710 | 0.0845 | 710 | 0.0000 | 710 | 0.0423 | 710 | 0.0423 | |
| 854 | 0.0000 | 854 | 0.0000 | 854 | 0.0000 | 854 | 0.0234 | 854 | 0.0585 | |
| 543 | 0.0000 | 543 | 0.0000 | 543 | 0.0000 | 543 | 0.0368 | 543 | 0.1105 | |
| 372 | 0.0000 | 372 | 0.6989 | 372 | 0.0000 | 372 | 0.4839 | 375 | 1.3172 | |
| 936 | 0.0000 | 936 | 0.0000 | 936 | 0.0000 | 936 | 0.0107 | 936 | 0.0214 | |
| 20 × 10 | 1029 | 0.0000 | 1029 | 0.0000 | 1029 | 0.0000 | 1029 | 0.0000 | 1029 | 0.0000 |
| 848 | 0.0000 | 848 | 0.1533 | 848 | 0.0000 | 848 | 0.0825 | 848 | 0.0708 | |
| 772 | 0.0000 | 772 | 0.1943 | 772 | 0.0000 | 772 | 0.2073 | 772 | 0.5829 | |
| 1104 | 0.0000 | 1104 | 0.0000 | 1104 | 0.0000 | 1104 | 0.0000 | 1104 | 0.5072 | |
| 966 | 0.4037 | 973 | 0.9627 | 968 | 0.5901 | 972 | 1.9048 | 974 | 3.4990 | |
| 519 | 0.0000 | 519 | 0.0000 | 519 | 0.0000 | 519 | 0.3083 | 519 | 1.0405 | |
| 1101 | 0.0000 | 1101 | 0.1817 | 1101 | 0.0091 | 1101 | 0.8629 | 1101 | 2.6431 | |
| 927 | 0.0000 | 927 | 0.0647 | 927 | 0.0000 | 927 | 0.1834 | 927 | 0.7443 | |
| 984 | 0.0000 | 984 | 0.0610 | 984 | 0.0000 | 984 | 0.0813 | 984 | 0.2642 | |
| 662 | 0.0000 | 662 | 0.6495 | 662 | 0.1511 | 668 | 2.5680 | 693 | 5.7100 | |
| 40 × 5 | 503 | 1.1730 | 506 | 1.7495 | 508 | 1.7296 | 517 | 5.6461 | 539 | 8.8469 |
| 930 | 0.1184 | 930 | 0.2476 | 929 | 0.1830 | 940 | 2.9064 | 963 | 5.6189 | |
| 1379 | 0.0000 | 1379 | 0.0000 | 1379 | 0.0000 | 1379 | 0.0000 | 1379 | 0.1015 | |
| 1667 | 0.0000 | 1667 | 0.0000 | 1667 | 0.0000 | 1667 | 0.0000 | 1667 | 0.0000 | |
| 944 | 0.0106 | 944 | 0.9216 | 944 | 0.2331 | 948 | 1.2606 | 954 | 2.3093 | |
| 609 | 0.0000 | 609 | 0.0000 | 609 | 0.0000 | 609 | 0.0821 | 609 | 0.3777 | |
| 601 | 0.0000 | 602 | 0.4825 | 601 | 0.2163 | 604 | 0.8319 | 608 | 1.5973 | |
| 771 | 0.1427 | 771 | 0.4410 | 772 | 0.3891 | 776 | 1.8029 | 786 | 3.7354 | |
| 694 | 0.1009 | 695 | 0.6484 | 694 | 0.1873 | 702 | 2.1470 | 706 | 3.1844 | |
| 800 | 0.0000 | 800 | 0.0000 | 800 | 0.0000 | 800 | 0.2250 | 801 | 0.9250 | |
| 40 × 10 | 1401 | 0.0000 | 1401 | 0.0000 | 1401 | 0.0000 | 1401 | 0.5639 | 1401 | 1.7987 |
| 1541 | 0.0000 | 1541 | 0.1363 | 1541 | 0.0454 | 1541 | 0.2141 | 1544 | 0.3504 | |
| 1473 | 0.0000 | 1473 | 0.0815 | 1473 | 0.0950 | 1473 | 0.3530 | 1478 | 0.5635 | |
| 1788 | 0.0000 | 1788 | 0.0224 | 1788 | 0.0000 | 1788 | 0.5817 | 1794 | 2.0246 | |
| 1442 | 0.0000 | 1442 | 0.0624 | 1442 | 0.0000 | 1442 | 0.1526 | 1447 | 0.9015 | |
| 1645 | 0.0243 | 1645 | 0.2736 | 1645 | 0.1216 | 1647 | 0.3404 | 1650 | 0.5410 | |
| 1180 | 0.1271 | 1181 | 0.1695 | 1182 | 0.1695 | 1190 | 2.3220 | 1211 | 4.5763 | |
| 1439 | 0.0000 | 1439 | 0.0000 | 1439 | 0.0000 | 1439 | 0.2224 | 1439 | 0.7088 | |
| 1666 | 0.1200 | 1666 | 0.4742 | 1666 | 0.2221 | 1681 | 2.3229 | 1732 | 5.0360 | |
| 1365 | 0.0000 | 1365 | 0.1465 | 1365 | 0.0293 | 1365 | 0.1612 | 1365 | 0.4762 | |
| 60 × 5 | 2449 | 0.0000 | 2449 | 0.0817 | 2449 | 0.0000 | 2449 | 0.0000 | 2449 | 0.0204 |
| 987 | 0.0101 | 988 | 0.2128 | 987 | 0.1621 | 987 | 0.6586 | 996 | 1.7021 | |
| 2198 | 0.0000 | 2198 | 0.0000 | 2198 | 0.0045 | 2198 | 0.1365 | 2198 | 0.1683 | |
| 1805 | 0.0000 | 1805 | 0.0000 | 1805 | 0.0000 | 1805 | 0.0000 | 1805 | 0.0000 | |
| 2266 | 0.0000 | 2266 | 0.0000 | 2266 | 0.0000 | 2266 | 0.1721 | 2266 | 0.1765 | |
| 2056 | 0.0000 | 2056 | 0.0000 | 2056 | 0.0000 | 2056 | 0.0049 | 2056 | 0.0632 | |
| 1293 | 0.0000 | 1293 | 0.0232 | 1293 | 0.0000 | 1293 | 0.2320 | 1293 | 0.1469 | |
| 1933 | 0.0000 | 1933 | 0.0000 | 1933 | 0.0052 | 1933 | 0.3001 | 1933 | 0.4190 | |
| 2064 | 0.0000 | 2064 | 0.0000 | 2064 | 0.0000 | 2064 | 0.0581 | 2064 | 0.4457 | |
| 2093 | 0.0000 | 2093 | 0.0096 | 2093 | 0.0000 | 2093 | 0.0334 | 2093 | 0.0956 | |
| 60 × 10 | 2548 | 0.0078 | 2548 | 0.1138 | 2550 | 0.2198 | 2556 | 0.9027 | 2569 | 1.4717 |
| 2312 | 0.0087 | 2312 | 0.0173 | 2312 | 0.0216 | 2312 | 0.1125 | 2314 | 0.1557 | |
| 2493 | 0.0000 | 2493 | 0.0000 | 2493 | 0.0000 | 2493 | 0.0000 | 2493 | 0.0000 | |
| 1318 | 1.0687 | 1310 | 0.8779 | 1323 | 1.7634 | 1354 | 4.6947 | 1390 | 7.7481 | |
| 2294 | 0.0000 | 2294 | 0.1351 | 2294 | 0.2180 | 2312 | 2.5327 | 2372 | 4.5205 | |
| 2303 | 0.0043 | 2303 | 0.0261 | 2303 | 0.0261 | 2303 | 0.8033 | 2303 | 1.3200 | |
| 2275 | 0.0132 | 2275 | 0.0000 | 2275 | 0.2022 | 2286 | 1.0022 | 2296 | 1.4374 | |
| 2807 | 0.0000 | 2807 | 0.0143 | 2807 | 0.0000 | 2807 | 0.1603 | 2807 | 0.1176 | |
| 2091 | 0.0000 | 2091 | 0.0000 | 2091 | 0.0000 | 2091 | 0.0191 | 2091 | 0.0670 | |
| 2314 | 0.0000 | 2314 | 0.0000 | 2314 | 0.0000 | 2314 | 0.4322 | 2316 | 0.6698 | |
| 80 × 5 | 3032 | 0.0000 | 3032 | 0.0000 | 3032 | 0.0000 | 3032 | 0.1682 | 3032 | 0.1748 |
| 2743 | 0.0000 | 2743 | 0.0292 | 2743 | 0.0146 | 2743 | 0.1568 | 2746 | 0.1969 | |
| 2963 | 0.0000 | 2963 | 0.0000 | 2963 | 0.0000 | 2963 | 0.0540 | 2963 | 0.2565 | |
| 1028 | 0.3307 | 1030 | 0.5545 | 1031 | 0.6712 | 1038 | 1.8580 | 1045 | 2.9961 | |
| 1466 | 0.0205 | 1466 | 0.1296 | 1466 | 0.1501 | 1467 | 0.7503 | 1472 | 0.9891 | |
| 2953 | 0.0000 | 2953 | 0.0000 | 2953 | 0.0000 | 2953 | 0.0000 | 2953 | 0.0847 | |
| 3049 | 0.0000 | 3049 | 0.0000 | 3049 | 0.0000 | 3049 | 0.0656 | 3049 | 0.0918 | |
| 1029 | 0.1069 | 1031 | 0.4859 | 1029 | 0.5831 | 1035 | 1.4383 | 1036 | 2.3032 | |
| 2933 | 0.0000 | 2933 | 0.0000 | 2933 | 0.0000 | 2933 | 0.0034 | 2933 | 0.0136 | |
| 3411 | 0.0000 | 3411 | 0.0000 | 3411 | 0.0000 | 3411 | 0.0967 | 3411 | 0.0850 | |
| 80 × 10 | 3330 | 0.0210 | 3330 | 0.0631 | 3330 | 0.0300 | 3336 | 0.4174 | 3340 | 0.7838 |
| 3001 | 0.0000 | 3001 | 0.0233 | 3001 | 0.0133 | 3009 | 0.6698 | 3031 | 1.6028 | |
| 3093 | 0.0000 | 3093 | 0.4753 | 3093 | 0.0000 | 3093 | 0.1843 | 3094 | 0.6790 | |
| 3254 | 0.0000 | 3254 | 0.0000 | 3254 | 0.0277 | 3254 | 0.3534 | 3263 | 0.6669 | |
| 3335 | 0.0000 | 3335 | 0.0090 | 3335 | 0.0300 | 3335 | 0.5607 | 3339 | 0.8126 | |
| 3390 | 0.0000 | 3390 | 0.0000 | 3390 | 0.0000 | 3390 | 0.1917 | 3390 | 0.5575 | |
| 3220 | 0.0000 | 3220 | 0.0000 | 3220 | 0.0000 | 3220 | 0.2143 | 3221 | 0.2640 | |
| 3318 | 0.0000 | 3318 | 0.0060 | 3318 | 0.0000 | 3320 | 0.3647 | 3321 | 0.7022 | |
| 3720 | 0.0000 | 3720 | 0.0269 | 3720 | 0.0054 | 3722 | 0.2124 | 3723 | 0.4086 | |
| 3235 | 0.0000 | 3235 | 0.0000 | 3235 | 0.0000 | 3235 | 0.0587 | 3235 | 0.1731 | |
| 100 × 5 | 1529 | 0.0131 | 1529 | 0.2158 | 1529 | 0.1504 | 1535 | 0.7194 | 1540 | 1.1969 |
| 3646 | 0.0000 | 3646 | 0.0000 | 3646 | 0.0000 | 3646 | 0.0439 | 3646 | 0.1015 | |
| 4494 | 0.0000 | 4494 | 0.0000 | 4494 | 0.0000 | 4494 | 0.0490 | 4495 | 0.1313 | |
| 3826 | 0.0000 | 3826 | 0.0000 | 3826 | 0.0000 | 3826 | 0.0261 | 3826 | 0.0497 | |
| 1269 | 0.0709 | 1270 | 0.1970 | 1271 | 0.5201 | 1272 | 1.8991 | 1289 | 2.6084 | |
| 3906 | 0.0000 | 3906 | 0.0000 | 3906 | 0.0410 | 3906 | 0.0205 | 3906 | 0.2125 | |
| 1920 | 0.0417 | 1920 | 0.1823 | 1921 | 0.1563 | 1922 | 0.4479 | 1925 | 0.6510 | |
| 3744 | 0.0027 | 3744 | 0.0053 | 3744 | 0.0374 | 3747 | 0.2404 | 3751 | 0.4006 | |
| 3453 | 0.0000 | 3453 | 0.0174 | 3453 | 0.0000 | 3453 | 0.0203 | 3453 | 0.4721 | |
| 851 | 0.9220 | 846 | 1.3475 | 856 | 1.9385 | 876 | 4.7518 | 889 | 7.1040 | |
| 100 × 10 | 4017 | 0.0149 | 4017 | 0.0797 | 4017 | 0.0697 | 4037 | 1.0456 | 4081 | 2.3973 |
| 4157 | 0.0168 | 4157 | 0.0433 | 4157 | 0.1203 | 4181 | 1.2846 | 4251 | 3.2090 | |
| 3854 | 0.0130 | 3854 | 0.1349 | 3855 | 0.2206 | 3866 | 0.4229 | 3875 | 0.9471 | |
| 3687 | 0.0000 | 3687 | 0.0434 | 3687 | 0.0108 | 3687 | 0.6618 | 3704 | 1.6273 | |
| 3931 | 0.0000 | 3931 | 0.0153 | 3931 | 0.0000 | 3931 | 0.3104 | 3942 | 1.0150 | |
| 3457 | 0.0000 | 3457 | 0.0579 | 3457 | 0.0289 | 3457 | 0.4484 | 3473 | 0.8360 | |
| 3671 | 0.0054 | 3671 | 0.0082 | 3671 | 0.1171 | 3683 | 0.5802 | 3689 | 1.0488 | |
| 4080 | 0.0123 | 4080 | 0.0368 | 4080 | 0.0735 | 4080 | 0.1642 | 4085 | 0.4240 | |
| 3930 | 0.0000 | 3930 | 0.0000 | 3930 | 0.0000 | 3930 | 0.3791 | 3933 | 0.5649 | |
| 4318 | 0.0903 | 4320 | 0.1065 | 4320 | 0.1667 | 4326 | 0.6901 | 4346 | 1.6350 | |
| Numbers of best Cmax or RPI | 97 | 98 | 89 | 38 | 88 | 51 | 66 | 8 | 44 | 4 |
| Averages of RPI | 0.0005 | 0.0017 | 0.0013 | 0.0069 | 0.0132 | |||||
| Variances of RPI | 0.000004 | 0.000009 | 0.000011 | 0.000106 | 0.000307 | |||||
| HFA-VND | MBO | GATS | GAVNS | GA | LPT | LPTF |
|---|---|---|---|---|---|---|
| Cmax (min) | Cmax (min) | Cmax (min) | Cmax (min) | Cmax (min) | Cmax (min) | Cmax (min) |
| 1513 | 1524 | 1536 | 1538 | 1574 | 1611 | 1618 |
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Wang, Z.; Fang, W.; Yang, Y. An Effective Hybrid Rescheduling Method for Wafer Chip Precision Packaging Workshops in Complex Manufacturing Environments. Micromachines 2025, 16, 1403. https://doi.org/10.3390/mi16121403
Wang Z, Fang W, Yang Y. An Effective Hybrid Rescheduling Method for Wafer Chip Precision Packaging Workshops in Complex Manufacturing Environments. Micromachines. 2025; 16(12):1403. https://doi.org/10.3390/mi16121403
Chicago/Turabian StyleWang, Ziyue, Weikang Fang, and Yichen Yang. 2025. "An Effective Hybrid Rescheduling Method for Wafer Chip Precision Packaging Workshops in Complex Manufacturing Environments" Micromachines 16, no. 12: 1403. https://doi.org/10.3390/mi16121403
APA StyleWang, Z., Fang, W., & Yang, Y. (2025). An Effective Hybrid Rescheduling Method for Wafer Chip Precision Packaging Workshops in Complex Manufacturing Environments. Micromachines, 16(12), 1403. https://doi.org/10.3390/mi16121403
