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Micromachines
Volume 13
Issue 8
10.3390/mi13081228
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Article

Ultra-Thin and Lithography-Free Transmissive Color Filter Based on Doped Indium Gallium Zinc Oxide with High Performance

by
Xiangrui Fan
1,
Shengyao Wang
2,
Dongdong Xu
2 and
Gaige Zheng
2,3,*
1
School of Electronics & Information Engineering, Nanjing University of Information Science & Technology, Nanjing 210044, China
2
Jiangsu Collaborative Innovation Center on Atmospheric Environment and Equipment Technology (CICAEET), Nanjing University of Information Science & Technology, Nanjing 210044, China
3
Jiangsu Key Laboratory for Optoelectronic Detection of Atmosphere and Ocean, School of Physics and Optoelectronic Engineering, Nanjing University of Information Science & Technology, Nanjing 210044, China
*
Author to whom correspondence should be addressed.
Micromachines 2022, 13(8), 1228; https://doi.org/10.3390/mi13081228
Submission received: 14 June 2022 / Revised: 24 July 2022 / Accepted: 28 July 2022 / Published: 31 July 2022
(This article belongs to the Section D1: Semiconductor Devices)
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Abstract

A kind of ultra-thin transmissive color filter based on a metal-semiconductor-metal (MSM) structure is proposed. The displayed color can cover the entire visible range and switches after H2 treatment. An indium gallium zinc oxide (IGZO) semiconductor was employed, as the concentration of charge carriers can be controlled to adjust the refractive index and achieve certain colors. The color modulation in the designed structure was verified using the rigorous coupled wave analysis (RCWA) method. The angular independence of the relative transmission could reach up to 60°, and polarization-insensitive performance could also be maintained. Numerical results demonstrated that the thickness of IGZO was the key parameter to concentrate the incident light. The overall structure is planar and lithography-free and can be produced with simple preparation steps. The obtained results can also be extended to other similar resonators where a proper cavity allows dynamical functionality.
Keywords: color filter; indium gallium zinc oxide; lithography-free color filter; indium gallium zinc oxide; lithography-free

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MDPI and ACS Style

Fan, X.; Wang, S.; Xu, D.; Zheng, G. Ultra-Thin and Lithography-Free Transmissive Color Filter Based on Doped Indium Gallium Zinc Oxide with High Performance. Micromachines 2022, 13, 1228. https://doi.org/10.3390/mi13081228

AMA Style

Fan X, Wang S, Xu D, Zheng G. Ultra-Thin and Lithography-Free Transmissive Color Filter Based on Doped Indium Gallium Zinc Oxide with High Performance. Micromachines. 2022; 13(8):1228. https://doi.org/10.3390/mi13081228

Chicago/Turabian Style

Fan, Xiangrui, Shengyao Wang, Dongdong Xu, and Gaige Zheng. 2022. "Ultra-Thin and Lithography-Free Transmissive Color Filter Based on Doped Indium Gallium Zinc Oxide with High Performance" Micromachines 13, no. 8: 1228. https://doi.org/10.3390/mi13081228

APA Style

Fan, X., Wang, S., Xu, D., & Zheng, G. (2022). Ultra-Thin and Lithography-Free Transmissive Color Filter Based on Doped Indium Gallium Zinc Oxide with High Performance. Micromachines, 13(8), 1228. https://doi.org/10.3390/mi13081228

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