Yue, Y.;                     Sun, M.;                     Chen, J.;                     Yan, X.;                     He, Z.;                     Zhang, J.;                     Sun, W.    
        Improvement of Crystal Quality of AlN Films with Different Polarities by Annealing at High Temperature. Micromachines 2022, 13, 129.
    https://doi.org/10.3390/mi13010129
    AMA Style
    
                                Yue Y,                                 Sun M,                                 Chen J,                                 Yan X,                                 He Z,                                 Zhang J,                                 Sun W.        
                Improvement of Crystal Quality of AlN Films with Different Polarities by Annealing at High Temperature. Micromachines. 2022; 13(1):129.
        https://doi.org/10.3390/mi13010129
    
    Chicago/Turabian Style
    
                                Yue, Yang,                                 Maosong Sun,                                 Jie Chen,                                 Xuejun Yan,                                 Zhuokun He,                                 Jicai Zhang,                                 and Wenhong Sun.        
                2022. "Improvement of Crystal Quality of AlN Films with Different Polarities by Annealing at High Temperature" Micromachines 13, no. 1: 129.
        https://doi.org/10.3390/mi13010129
    
    APA Style
    
                                Yue, Y.,                                 Sun, M.,                                 Chen, J.,                                 Yan, X.,                                 He, Z.,                                 Zhang, J.,                                 & Sun, W.        
        
        (2022). Improvement of Crystal Quality of AlN Films with Different Polarities by Annealing at High Temperature. Micromachines, 13(1), 129.
        https://doi.org/10.3390/mi13010129