Yue, Y.; Sun, M.; Chen, J.; Yan, X.; He, Z.; Zhang, J.; Sun, W.
Improvement of Crystal Quality of AlN Films with Different Polarities by Annealing at High Temperature. Micromachines 2022, 13, 129.
https://doi.org/10.3390/mi13010129
AMA Style
Yue Y, Sun M, Chen J, Yan X, He Z, Zhang J, Sun W.
Improvement of Crystal Quality of AlN Films with Different Polarities by Annealing at High Temperature. Micromachines. 2022; 13(1):129.
https://doi.org/10.3390/mi13010129
Chicago/Turabian Style
Yue, Yang, Maosong Sun, Jie Chen, Xuejun Yan, Zhuokun He, Jicai Zhang, and Wenhong Sun.
2022. "Improvement of Crystal Quality of AlN Films with Different Polarities by Annealing at High Temperature" Micromachines 13, no. 1: 129.
https://doi.org/10.3390/mi13010129
APA Style
Yue, Y., Sun, M., Chen, J., Yan, X., He, Z., Zhang, J., & Sun, W.
(2022). Improvement of Crystal Quality of AlN Films with Different Polarities by Annealing at High Temperature. Micromachines, 13(1), 129.
https://doi.org/10.3390/mi13010129