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Article

Static and Dynamic Analysis of Electrostatically Actuated MEMS Shallow Arches for Various Air-Gap Configurations

1
Mechanical and Industrial Engineering Department, College of Engineering, Sultan Qaboos University, P.O. Box 33, Al-Khoudh, Muscat 123, Oman
2
Physical Science and Engineering Division, King Abdullah University of Science and Technology, Thuwal, Jeddah 23955-6900, Saudi Arabia
*
Authors to whom correspondence should be addressed.
Academic Editors: Amal Z. Hajjaj and Nizar Jaber
Micromachines 2021, 12(8), 930; https://doi.org/10.3390/mi12080930
Received: 11 June 2021 / Revised: 14 July 2021 / Accepted: 17 July 2021 / Published: 5 August 2021
(This article belongs to the Special Issue New Advances in Micromachined Resonators)
In this research, we investigate the structural behavior, including the snap-through and pull-in instabilities, of in-plane microelectromechanical COSINE-shaped and electrically actuated clamped-clamped micro-beams resonators. The work examines various electrostatic actuation patterns including uniform and non-uniform parallel-plates airgap arrangements, which offer options to actuate the arches in the opposite and same direction of their curvature. The nonlinear equation of motion of a shallow arch is discretized into a reduced-order model based on the Galerkin’s expansion method, which is then numerically solved. Static responses are examined for various DC electrostatic loads starting from small values to large values near pull-in and snap-through instability ranges, if any. The eigenvalue problem of the micro-beam is solved revealing the variations of the first four natural frequencies as varying the DC load. Various simulations are carried out for several case studies of shallow arches of various geometrical parameters and airgap arrangements, which demonstrate rich and diverse static and dynamic behaviors. Results show few cases with multi-states and hysteresis behaviors where some with only the pull-in instability and others with both snap-through buckling and pull-in instabilities. It is found that the micro-arches behaviors are very sensitive to the electrode’s configuration. The studied configurations reveal different possibilities to control the pull-in and snap-through instabilities, which can be used for improving arches static stroke range as actuators and for realizing wide-range tunable micro-resonators. View Full-Text
Keywords: MEMS; shallow arch; resonators; response; sensitivity; tunability MEMS; shallow arch; resonators; response; sensitivity; tunability
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MDPI and ACS Style

Ouakad, H.M.; Alcheikh, N.; Younis, M.I. Static and Dynamic Analysis of Electrostatically Actuated MEMS Shallow Arches for Various Air-Gap Configurations. Micromachines 2021, 12, 930. https://doi.org/10.3390/mi12080930

AMA Style

Ouakad HM, Alcheikh N, Younis MI. Static and Dynamic Analysis of Electrostatically Actuated MEMS Shallow Arches for Various Air-Gap Configurations. Micromachines. 2021; 12(8):930. https://doi.org/10.3390/mi12080930

Chicago/Turabian Style

Ouakad, Hassen M., Nouha Alcheikh, and Mohammad I. Younis. 2021. "Static and Dynamic Analysis of Electrostatically Actuated MEMS Shallow Arches for Various Air-Gap Configurations" Micromachines 12, no. 8: 930. https://doi.org/10.3390/mi12080930

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