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Journal: Micromachines, 2021
Volume: 12
Number: 1153
Article:
Effect of High-Temperature Nitridation and Buffer Layer on Semi-Polar (10–13) AlN Grown on Sapphire by HVPE
Authors:
by
Qian Zhang, Xu Li, Jianyun Zhao, Zhifei Sun, Yong Lu, Ting Liu and Jicai Zhang
Link:
https://www.mdpi.com/2072-666X/12/10/1153
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