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Open AccessArticle

Extension of the Measurable Wavelength Range for a Near-Infrared Spectrometer Using a Plasmonic Au Grating on a Si Substrate

1
Department of Mechanical Engineering and Intelligent Systems, Graduate School of Informatics and Engineering, The University of Electro-Communications, 1-5-1 Chofugaoka, Chofu-city, Tokyo 182-8585, Japan
2
École Nationale Supérieure de Mécanique et des Microtechniques, 26 Rue de l’Épitaphe, 25000 Besançon, France
3
Mobile System Development Division, Imager & Analog LSI Technology Department, Olympus Corporation, 2-3 Kuboyama-cho, Hachioji-city, Tokyo 192-8512, Japan
*
Author to whom correspondence should be addressed.
Micromachines 2019, 10(6), 403; https://doi.org/10.3390/mi10060403
Received: 14 May 2019 / Revised: 10 June 2019 / Accepted: 13 June 2019 / Published: 17 June 2019
In this paper, we proposed near-infrared spectroscopy based on a Si photodetector equipped with a gold grating and extended the measurable wavelength range to cover 1200–1600 nm by improving a spectrum derivation procedure. In the spectrum derivation, photocurrent data during alteration of the incidence angle of the measured light were converted using a responsivity matrix R, which determines the spectroscopic characteristics of the photodetector device. A generalized inverse matrix of R was used to obtain the spectrum and to fit a situation where multiple surface plasmon resonance (SPR) peaks appeared in the scanning range. When light composed of two wavelengths, 1250 nm and 1450 nm, was irradiated, the two wavelengths were distinctively discriminated using the improved method. View Full-Text
Keywords: near-infrared; spectroscopy; surface plasmon resonance; Schottky barrier; grating; Si near-infrared; spectroscopy; surface plasmon resonance; Schottky barrier; grating; Si
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Suido, Y.; Yamamoto, Y.; Thomas, G.; Ajiki, Y.; Kan, T. Extension of the Measurable Wavelength Range for a Near-Infrared Spectrometer Using a Plasmonic Au Grating on a Si Substrate. Micromachines 2019, 10, 403.

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