Next Article in Journal
Research on the Disc Sensitive Structure of a Micro Optoelectromechanical System (MOEMS) Resonator Gyroscope
Next Article in Special Issue
In-Situ Measurements in Microscale Gas Flows—Conventional Sensors or Something Else?
Previous Article in Journal
Comparison of Micro-Mixing in Time Pulsed Newtonian Fluid and Viscoelastic Fluid
Previous Article in Special Issue
Design Guidelines for Thermally Driven Micropumps of Different Architectures Based on Target Applications via Kinetic Modeling and Simulations
Article Menu
Issue 4 (April) cover image

Export Article

Open AccessCommunication

Estimation of Air Damping in Out-of-Plane Comb-Drive Actuators

Department of Civil and Environmental Engineering, Politecnico di Milano, Piazza L. da Vinci 32, 20133 Milano, Italy
Author to whom correspondence should be addressed.
Currently with: Engineering Ingegneria Informatica S.p.A., 20090 Assago, Italy.
Micromachines 2019, 10(4), 263;
Received: 6 February 2019 / Revised: 9 April 2019 / Accepted: 16 April 2019 / Published: 19 April 2019
(This article belongs to the Special Issue Gas Flows in Microsystems)
PDF [1945 KB, uploaded 19 April 2019]


The development of new compliant resonant microsystems and the trend towards further miniaturization have recently raised the issue of the accuracy and reliability of computational tools for the estimation of fluid damping. Focusing on electrostatically actuated torsional micro-mirrors, a major dissipation contribution is linked to the constrained flow of air at comb fingers. In the case of large tilting angles of the mirror plate, within a period of oscillation the geometry of the air domain at comb-drives gets largely distorted, and the dissipation mechanism is thereby affected. In this communication, we provide an appraisal of simple analytical solutions to estimate the dissipation in the ideal case of air flow between infinite plates, at atmospheric pressure. The results of numerical simulations are also reported to assess the effect on damping of the finite size of actual geometries. View Full-Text
Keywords: resonant micro-electromechanical-systems (MEMS); micro-mirrors; out-of-plane comb actuation; fluid damping; analytical solution; FE analysis resonant micro-electromechanical-systems (MEMS); micro-mirrors; out-of-plane comb actuation; fluid damping; analytical solution; FE analysis

Figure 1

This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

Share & Cite This Article

MDPI and ACS Style

Mirzazadeh, R.; Mariani, S. Estimation of Air Damping in Out-of-Plane Comb-Drive Actuators. Micromachines 2019, 10, 263.

Show more citation formats Show less citations formats

Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Related Articles

Article Metrics

Article Access Statistics



[Return to top]
Micromachines EISSN 2072-666X Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top