3-D Design and Simulation of a Piezoelectric Micropump
AbstractThe objective of this paper is to carefully study the performances of a new piezoelectric micropump that could be used, e.g., for drug delivery or micro-cooling systems. The proposed micropump is characterized by silicon diaphragms, with a piezoelectric actuation at a 60 V input voltage, and by two passive valves for flow input and output. By means of a 3-D Finite Element (FE) model, the fluid dynamic response during different stages of the working cycle is investigated, together with the fluid–structure interaction. The maximum predicted outflow is 1.62 μL min
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Farshchi Yazdi, S.A.F.; Corigliano, A.; Ardito, R. 3-D Design and Simulation of a Piezoelectric Micropump. Micromachines 2019, 10, 259.
Farshchi Yazdi SAF, Corigliano A, Ardito R. 3-D Design and Simulation of a Piezoelectric Micropump. Micromachines. 2019; 10(4):259.Chicago/Turabian Style
Farshchi Yazdi, Seyed A.F.; Corigliano, Alberto; Ardito, Raffaele. 2019. "3-D Design and Simulation of a Piezoelectric Micropump." Micromachines 10, no. 4: 259.
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