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3-D Design and Simulation of a Piezoelectric Micropump

MEMS Modelling and Design Group, Department of Civil and Environmental Engineering, Politecnico di Milano, 20133 Milan, Italy
Author to whom correspondence should be addressed.
Micromachines 2019, 10(4), 259;
Received: 14 February 2019 / Revised: 5 April 2019 / Accepted: 11 April 2019 / Published: 18 April 2019
(This article belongs to the Special Issue Piezoelectric Transducers: Materials, Devices and Applications)
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The objective of this paper is to carefully study the performances of a new piezoelectric micropump that could be used, e.g., for drug delivery or micro-cooling systems. The proposed micropump is characterized by silicon diaphragms, with a piezoelectric actuation at a 60 V input voltage, and by two passive valves for flow input and output. By means of a 3-D Finite Element (FE) model, the fluid dynamic response during different stages of the working cycle is investigated, together with the fluid–structure interaction. The maximum predicted outflow is 1.62 μL min 1 , obtained at 10 Hz working frequency. The computational model enables the optimization of geometrical features, with the goal to improve the pumping efficiency: The outflow is increased until 2.5 μL min 1 . View Full-Text
Keywords: piezoelectric material; multiphysics simulation; finite element method (FEM); fluid–structure interaction (FSI); micro electromechanical systems (MEMS) piezoelectric material; multiphysics simulation; finite element method (FEM); fluid–structure interaction (FSI); micro electromechanical systems (MEMS)

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).

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Farshchi Yazdi, S.A.F.; Corigliano, A.; Ardito, R. 3-D Design and Simulation of a Piezoelectric Micropump. Micromachines 2019, 10, 259.

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