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Open AccessTechnical Note

Continuous Phase Plate Structuring by Multi-Aperture Atmospheric Pressure Plasma Processing

Center for Precision Engineering, Harbin Institute of Technology, Harbin 150001, China
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Micromachines 2019, 10(4), 260; https://doi.org/10.3390/mi10040260
Received: 1 April 2019 / Revised: 15 April 2019 / Accepted: 16 April 2019 / Published: 18 April 2019
(This article belongs to the Section D:Materials and Processing)
A multi-aperture atmospheric pressure plasma processing (APPP) method was proposed to structure the continuous phase plate (CPP). The APPP system was presented and removal investigation showed the removal function of APPP was of a high repeatability and robustness to the small disturbance of gas flows. A mathematical model for the multi-aperture structuring process was established and the simulation analysis indicated the advantages of the proposed method in terms of balancing the efficiency and accuracy of the process. The experimental results showed that multi-aperture APPP has the ability to structure a 30 mm × 30 mm CPP with the accuracy of 163.4 nm peak to valley (PV) and 31.7 nm root mean square (RMS). View Full-Text
Keywords: atmospheric pressure plasma processing; continuous phase plate; optic figuring; multi-aperture processing atmospheric pressure plasma processing; continuous phase plate; optic figuring; multi-aperture processing
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Li, D.; Li, N.; Su, X.; Liu, K.; Ji, P.; Wang, B. Continuous Phase Plate Structuring by Multi-Aperture Atmospheric Pressure Plasma Processing. Micromachines 2019, 10, 260.

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