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Journal: Micromachines, 2019
Volume: 10
Number: 6

Article: Process Variability—Technological Challenge and Design Issue for Nanoscale Devices
Authors: by Jürgen Lorenz, Eberhard Bär, Sylvain Barraud, Andrew R. Brown, Peter Evanschitzky, Fabian Klüpfel and Liping Wang

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